Air Cylinder Series MB

7 !

CQS

Foot or Flange style: Body mounting bolt Double clevis style: Clevis pin, type C snap ring for axis, Body mounting bolt CQS-L025 7-4-37 38 Weight/Without Auto Switch (g) Made to Order Specifications (For details, refer to page 7-10-1.)

Air Cylinder

[mm] Auto switch model Bore size 6 10 16 Auto switch mounting Auto switch model Bore size [mm] 6 10 16 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2 2.5 3 D-M9l D-M9lV D-M9lW D-M9lWV D-A9l D-A9lV Band mounting D-A9l 4.5 6 7 D-H7l/H7lW D-H7BA/H7NF 3 4 4 BJ6-006 (A set of a, b, d, f) BJ6-010 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) D-H7C 5 8 9 D-C7l/C80/C73C/C80C 6 7 7 D-M9lA 2 D-M9lAV2

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

6 12 VDC C 7 240 VAC, 50/60 Hz 9 Other Conduit terminal T TZ Option VFR34 Option D DZ DIN terminal VFR30, VFR31: Pilot valve assembly is all plug-in (F).

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Aluminum High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

Basic type / Direct mount type Series CY3B/CY3R

10 14 18 17 20 26 34 48 60 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 M 3.5 4 5 5 6 7 8 10 10 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 Z 66 76 94 107 117 130 148 176 188 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 WS 6 8 7 7 7 7 7 10 10 X

MY1

7 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 5.1 x 3 x 1.05 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 MYM40-15AA5905 GMY40 RCS-12 TMY-40 8.3 x 4.5 x 1.9 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 2 2 2 2 2 4 Scraper Piston seal

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

A_HEC-OM-K001

Communication . 7-1 7.1 Preparation for Communication . 7-1 7.2 Specifications of communication method. 7-2 7.3 Communication format . 7-3 7.3.1 Control code used for communication . 7-3 7.3.2 Command code list . 7-3 7.3.3 Communication procedures and format . 7-4 7.3.4 Calculation of Check Sum . 7-6 7.4 Details of Communication Format . 7-7 7.4.1 Setting of target temp.

Mechanically Jointed Rodless Cylinder Series MY1

$ 7 9m. & -. : 0 ) $ # & !9m1max & 9 &0.08 M1+ !# m M1 max -$! -. $ 7 9M1. & -;:!. : M1 & m1 g X & < & -;:!.

0.4

(Station 7) 1 setBlanking plate part no.

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Air Cylinder NCA1 Series

8 1 1/8 3 1/16 5 7/8 3 1/4 6 1/4 8 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5 7/8 3 1/4 6 3/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7 7/8

NCA1

/8 3 1/4 6 1/4 8 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5 7/8 3 1/4 6 3/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7 7/8 12 2 1/2 1 7/8-12

7.5

Refer to pages 4 through to 7 for the JIS symbol.

Compact Manifold Regulator Series ARM5

P U C S O H L 7 26 (Max. 28) 12 7 IN OUT 12 Panel cutout dimensions 28 ARM10F1-06GPC 08GPC 4 x R1 or less 28 to 28.5 IN OUT 38 58 34 23 20 Plate thickness: Max. 2.1 30 15 6 OPEN 34 14 0.6 0.4 0.2 0.8 1 0 MPa 62 SMC P K U C S O H L 7 26 (Max. 28) 7 IN OUT 12 522 Regulator/Single Unit Type Options Pressure Gauge One-touch Fittings for Regulator VVQ1000-50A C4 Part no.

Programless Controller Series LECP1

8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) Retun to origin Position number 1 2 3 4 5 6 7 8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) Retun to origin 27 Programless Controller Series LECP1 SignalTiming LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions (1) Return to Origin 24 V 0 V Power supply IN0-3 all ON ON OFF IN0-3 Input ON OFF BUSY OUT0-3 Output ALARM Release

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

VQZ1000/2000/3000

A A () [+] SOL SOL C C (+) ZNR Indicator light [] Due to the use of non-polar light, the VQZ series has no polarity. Refer to page 2-7-26 for latching style. Caution Do not apply excessive torque when turning the locking type manual override. (0.1 Nm or less) Connection of Lead Wire (Not necessary if ordering the lead wire pre-connected model.)