Air Catch Sensor Series ISA

2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

HRX-OM-Y098

Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months. 7-4 7.3 Operation Stop for an Extended Period of Time . 7-5 7.3.1 Discharge of the circulating fluid . 7-5 7.4 Replacement of consumables . 7-8 7.4.1 Replacing Particle

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

product can be selected alphabetically (a to c).

HRX-OM-W060

Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 HRL Series HRX-OM-W060 Contents 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months. 7-4 7.3 Operation Stop for an Extended Period of Time . 7-5 7.3.1 Discharge of the circulating fluid . 7-5 7.4 Replacement of consumables

Output block / Power block

(Tightening torque for M12: 0.1 Nm) -57No.EX-OMH0025-C Revision A: Change template. B: Contents revised in several places. [October 2018] C: Revision.

CL

38 4 5 127 41 M8 x 1.25 19.5 25 182 25 30 24 15 27 5.5 41 33.5 195 7 8 M26 x 1.5 41 9 7 6 137 45 M10 x 1.25 24 32 184 32 34.5 24 15 27 5.5 41 37.5 8 197 7 M26 x 1.5 41 9 7 6 139 45 M10 x 1.25 24 40 217 40 42.5 24 21.5 29 7 45 46.5 233 10 8 11 M32 x 2 41 7 8 167 50 M14 x 1.5 24 9-2-24 23 Series CLM2 Fine Lock Cylinder Double Acting, Single Rod Single Clevis Style (C) Rc BQ locking port for

SYJA3000

(0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure

VS7-6

Unit Air filter (Auto drain, Manual drain), Regulator, Pressure switch, Air release valve SX VV71-P-(02: ,03: ,C10: 10) Individual SUP spacer Individual EXH spacer Gallery blank disc (Differential pressure style) 1 4 3 8 VV71-R-(02: ,03: ,C12: 12) 1 4 3 8 AXT502-14 VK Including F.R.Unit ( equivalent to 2 stations ) VZ The manifold Series VV71 has a wide variety of functions and piping, compatible

CL

0.1 C 0.1 S + Stroke ZZ + Stroke With rod boot l h + l ZZ + l + Stroke AL A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM Bore size (mm) Stroke range 26 31 38 47 4 7 7 8 4 7 7 8 5.5 9 9 11 3.5 4 4 4 54 62 62 67 19 20 21 23 12 12 11 12 84 94 95 103 12 14 18 8 10 12 16 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 18 22 22 30 15.5 19.5 19.5 27 20 25 32 40 M8 x

CNG

IY-G02 IY-G03 IY-G04 Type C 8 for axis Type C 10 for axis Type C 10 for axis NT-02 NT-03 NT-G04 CD-G02 CD-G25 CD-G03 CD-G04 0.040 0.076 8 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 0.9 1.5 20 25, 32 40 21 7.6 9.6 9.6 16.2 13 17 19 20 25, 32 40 (15) 12.5 16.5 18 M8 x 1.25 5 6 8 0.040 0.076 8 0.9 1.5 38.6 7.6 20 25 32 40 43.4 0.040 0.076 10 0.040 0.076 10 1.15

Digital Gap Checker ( compatible)

/3/5/7 (With control unit, Bracket mounting) -23No.PS-OMW0009-C 2 About this product ISA3---B-R1/3/5/7 ISA3---B-R0/2/4/6/8 ISA3---B-LN ISA3---B-RN -24No.PS-OMW0009-C 2 About this product ISA-17 (Bracket when control unit fitted) Y200T-A (Spacer with bracket) ISA-20 (Bracket for centralized lead wire) -25No.PS-OMW0009-C 2 About this product ZS-31-B (Lead wire with connector (Straight)) ZS-

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Refer to "How to Order" on page 7 for auto switch model numbers.

PFxx-OMA1007

Dimensions with bracket Part number K F G H Q R S T U V W AMS20B-#C 85 71.2 103.2 76.2 35 7 14 54.5 6 47 42.5 AMS30B-#C 85 85.2 104.2 100.7 35 7 14 54.5 6 47 42.5 AMS40B-#C 85 103.2 105.2 122.2 40 9 18 65 7 55 50 AMS60B-#C 100 124.2 126.2 157.2 50 11 20 80 8 70 60 -139No.PF-OMA1007-B AMS20/30/40/60B-#00C Part number A F AMS20B-#00C 247.4 69.6 AMS30B-#00C 285.9 83.1 AMS40B-#00C 325.4 100.6

DOC1001322

Control, Inspection and Cleaning . 7-1 HRS Series DOC1001322 Contents 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-3 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months. 7-5 7.2.4 Inspection during winter season . 7-6 7.3 Operation Stop for an Extended Period of Time . 7-7 7.3.1 Discharge of the circulating

Digital Flow Switch (Integrated display type)

[January 2020] C: Contents are added. [April 2021] D: Contents revised in several places. [July 2021] E: Contents revised in several places.

MGG

Nickel plated Nickel plated C type snap ring for hole 15 Guide Cylinder Series MGG 63 to 100/MGGF #3 !5 #9 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @1 @0 !9 !0 #2 $0 A' For ball bushing #5 @5 #0 @8 @6 !7 !0 @1 !3 #8 !2 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

ISE70/75/75H

(White) (Black) OUT1 (NPN) Load Main circuit Main circuit + + 12 to 24 VDC 12 to 24 VDC OUT1 (PNP) (Black) Load OUT1 (PNP) Load (White) (Blue) DC () (Blue) DC () 16-2-47 4 2-color Display Digital Pressure Switch/For General Fluids Series ISE75/75H How to Order 02 43 M ISE75 10MPa 02 43 M ISE75H 15MPa Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

90

Note 7) Cannot be selected for vacuum pump system.

Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 0.7MPa, Connection Thread: R 1/4, Grade: Precision Cleaning, Clean Room M5.5, Attachment: Clear Cover w/Protrusion, is Removable