Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

Lubrication Equipment

7 7 7 C 16 16 30 30 B 70 70 108 108 Model A 174 174 234 234 ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 1.17-14 Oil Distributor VA, VB/Nylon Tubing Related Products Oil Distributor Series VA, VB How to Order V A 4 6 Applicable tube O.D. 6 6 Oil Distributor Number of distribution ports (VA) (VB) VB6-6 Distribution 4 ports 6 ports 8 ports 4 ports 6 ports 10 ports 16 ports 4 6 8 4 6 10 16 Both sides

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

AMR3000 to 6000

Model Description AMR3000 AMR4000 AMR5000 AMR6000 : E4-02 : E4-03 : E4-04 1 4 3 8 1 2 1 4 1 2 : E6-06 : E6-10 3 4 1 : E3-02 : E3-03 : E5-04 : E5-06 Adapter assembly (6) 3 8 3 4 AD33-X203 AD33-X202 AD33-X210 AD33-X201 Float style auto drain (Bowl assembly) IS1000-01 (Set at 0.4MPa) Compact pressure switch PT elbow (7) 135510 135613 Note 5) in the gauge part number (e.g.

OML0002-C

Precautions for mounting 7 4-2. How to mount 9 4-3. Wiring table 15 4-4. Power supply cable wiring diagram 16 4-5. Timing chart 16 5. Functional Explanations 17 6. Outline Dimensions 18 7. Maintenance 7-1. Precautions for maintenance 19 7-2. How to maintain electrode needle 20 2 - 1.

High Power Cylinder:

7 @1 !6 !5 w o !0 i e r y !3 !4 @0 !9 t !8 @2 @4 !

VZ1000

198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 VV4Z1-25Station U-00C L plug connector (L) M plug connector (M) DIN terminal (D) (Pitch) D side U side (Station n)(Station 1) Applicable cable O.D. 3.5 to 7 (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Hysteresis Note 5) Variable from 0 Protection Output type Short circuit protection Voltage output: 1 to 5 V, Current output: 4 to 20 mA Output impedance: Approx. 1 k7 Voltage output Analog output Note 6) Impedance Max. load impedance at power supply voltage 24 V: 600 7, at power supply voltage 12 V: 300 7 Current output Response time Note 7) Linked with the response time of the switch output

Common Supply Regulator

Note 2) -5 to 50C for the products with the digital pressure switch. -7- 4.

Water-cooledThermo-chiller

For the circulating fluid piping connection, install a drain pan just in case the circulating fluid may leak. 7. Do not return the circulating fluid to the unit by installing a pump in the customer system. Breaker Operating Characteristics Common for all models 4 h 2 h 1 h 5 s 10 s 20 s 30 s 1 min 2 min 4 min 6 min 10 min 14 min 20 min 30 min Max.

Manifold Specifications

198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 VV4Z1-25Station U-00C L plug connector (L) M plug connector (M) DIN terminal (D) (Pitch) D side U side (Station n)(Station 1) Applicable cable O.D. 3.5 to 7 (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200

4 Port Solenoid Valve Series VQD1000

$ %&' () $* $ %&' () $* # " 7( ! ! ! " >9 47 ! ! ! ! + ',! 34 %() +(# ' 5 & $%#6 / (7 ( , ./$ 0 1 0 1 VV061 ! ''()% ,)# % # ## ., & /, '# & , . '0 23/ 414 e u q t r y !0 V100 S070 i VQD o 23/ 4#40 56"4!4 ! VKF w /, 1 !() '!2 VK VT VS & "# # & # ''()% * 8 7 23/ 9 : : 7 23/ : 7 9;9 8 : (; ! (7( :9 : (<8 9( = ' Series VQD1000 # $ % "" "" " ! !

5 Port Air Operated Valve Series VFA3000 1

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Model AMR3000 AMR4000 AMR5000 AMR6000 Model name 1 4 3 8 1 2 : E4-02 : E4-03 : E4-04 1 4 1 2 : E6-06 : E6-10 3 4 : E3-02 : E3-03 : E5-04 : E5-06 Adapter assembly (7) 3 8 3 4 1 AD33-X203 AD33-X202 AD33-X210 AD33-X201 Float type auto drain (AMR 100) (8) IS10-01 (0.4 MPa setting) Compact pressure switch 135510 135613 Elbow (R x Rc) (9) Note 5) in the gauge part number (e.g.

NARM Series

NARM 2500 05 A 02 G1 Optimal for central pressure control. Accessory Regulator for manifold Pressure easily set using the new handle. One-touch lock system.

KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

VZ3000

-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed Center/Exhaust Center

PSxx-OMH0002CN

43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A M12 (5 m) ZS-31-B S M12 (5 m) ZS-31-C L -8No.PS-OMH0002CN-D LCD () SET UP DOWN 4 24 ()OUT1ON LCD 4 UPON/OFF DOWNON/OFF SET -27-67 (-27-67 OUT2()) -9No.PS-OMH0002CN-D 7 7 "8"7 "-"(

Serial Transmission System Series EX250 Series EX500

Note 7) The supply and exhaust ports on U side are branched (to the cylinder port side and coil side). A One-touch fitting for 12 is attached to each port.