Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

-C01 PSE56-A2 A 24 B B PSE56-B2 (mm) Model A A 8.2 12 9.2 12.2 15.5 9.5 B R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 ZS-31-X H D (mm) Model 1 E D 20 20 29 29 E 9 9 13 13 F R 1/8 NPT 1/8 R 1/4 NPT 1/4 G Rc 1/8 NPT 1/8 Rc 1/4 NPT 1/4 H 14 14 17 17 I 1.5 1.5 1.6 1.6 ZS-31-X188 ZS-31-X189 ZS-31-X175 ZS-31-X186 G M5

Thermo-chiller

-W-m +HRL-JK001 G1/2 G1/2 G1/2 G1/4 G3/8 G3/4 HRL-EP018 NPT thread conversion fitting set NPT1/2 NPT1/2 NPT1/2 NPT1/4 NPT3/8 NPT3/4 HRL-EP011 G thread conversion fitting set HRLE090-A-m +HRL-JK001 G1 G1/2 G1/4 G3/8 G3/4 HRL-EP012 NPT thread conversion fitting set NPT1 NPT1/2 NPT1/4 NPT3/8 NPT3/4 HRL-EP013 G thread conversion fitting set HRLE090-W-m +HRL-JK001 G1 G1/2 G1/2 G1/4 G3/8 G3/4

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Bracket Stainless steel 304 -8- 2-3 Dimensions 1) SFB300-02: Rc1/4 2) SFB302-02: TSJ1/4 (Tube Swage Joint) 3) SFB305-02, SFB315-02: URJ (Union Ring Joint) Model A SFB305-02 79 SFB315-02 84 -9- 3.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

VCA

1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

SL5200

1 to 30 psig (0.007 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) Bonnet option 02 06 10 Bonnet Standard Panel installation 4) Code No code P Connections (Inletq, Outletw) 4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Pilot Operated Regulator AR425 to 935 Series

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

VCA

1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

PFxx-OMJ0005CN

8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01

Regulator AR30 to 60

Applicable model AR30 AR40 AR40-06 AR50 AR60 Option Note 4) Note 4) Note 1) AR30P-270AS AR40P-270AS AR40P-270AS AR50P-270AS AR50P-270AS Bracket assembly Note 5) Note 5) AR30P-260S AR40P-260S AR40P-260S Set nut G46-10-02 G36-10-01 G46-10-02 G46-10-02 G46-10-02 Round Square embedded type Round Square embedded type 1MPa Note 2) Note 3) Pressure gauge GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3

F

Needle Rotations AS1000 Not Applicable Panel Cut Out Dimensions AS2000 16.5 AS3000 16.5 AS4000 25 D I M E N S I O N S S E R I E S (N)AS1000-M5 D I M E N S I O N S S E R I E S (N)AS2000, 3000 Port Size G H I K A B C D E F Model 1/8 50 54.5 16 4.5 40 30 5 17 10 15.5 (N)AS2000-01 3/4 51.5 56 20 4.5 40 30 5 23 11.5 17 (N)AS2000-02 1/4, 3/8 61 68 26 5.5 56 45.5 5.25 25 13.2 20.6 (N)AS3000-02,

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

AN

Model (Screw-in connection) Model Port size Effective area (mm2) Weight (g) ANA1-01 10 4 37 16 A B C Dimensions (mm) 1 8 ANA1-02 15 14 64 22 18 1 4 ANA1-03 35 3 8 22 84 25 21 36 98 30 24 110 111 46 36 180 132 50 41 544 200 74 60 612 230 74 60 873 271 86 70 ANA1-04 60 1 2 ANA1-06 90 3 4 JIS symbol ANA1-10 160 1 1 1 ANA1-12 280 1 4 ANA1-14 450 1 2 ANA1-20 610 2 Construction/Parts/Dimensions

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

Direct Operated Solenoid Valve Metal Seal Series VS4
10

Manual override P L 5 24 VDC 02 Rc 1/4 (8A) Rc 3/8 (10A) 9 Other 03 3-9-1 Series VS410 Accessory (Option) Apparent Power (Power Consumption) 1.

Soft Start-up Valve AV2000/3000/4000/5000 1

R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D

AMR3000 to 6000

0 00 02 E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR300-02 to 03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.) 8 3 standard standard standard Pressure switch 1 2 E2 E3 E4 E6 E10 None With

A

R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000