Guide Cylinder Series MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

Platform Cylinder Series CXT

For detailed specifications about shock absorber, /refer to page 1673 Shock Absorber Specifications CXT12 16 CXT20 CXT25 CXT32 40 Model Shock absorber model RB2015 RB1411 RB1007 RB0806 Max. energy absorption (J) 58.8 14.7 5.88 2.94 Stroke absorption (mm) 15 11 7 6 Collision speed 0.05 to 5 m/s Max. operating frequency* (cycle/min) 25 45 70 80 Made to Order Specifications (For details, refer

KF

O.D. 4 6 Effective area (mm2) Weight (g) Model d L1 L2 M 40.9 27.6 15.5 15.2 1.5 1.6 13 17 23 22 KFH04-00 KFH06-00 KFH08U-00 KFH08N-00 KFH10U-00 KFH10N-00 KFH12U-00 KFH12N-00 2.5 4 5 6 6.5 7.5 8 9 8 10 10 12 6 11 17 21 30 35 45 3 4 5 5.5 6.5 7 8 40.3 27 8 12 14 16.2 41.3 28 36 10 17 17 18.8 44.6 30 42 41 2-applicable tubing 12 17 19 19.3 45.5 32 Male Elbow: KFL H1 (width across flats) H2

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. The test was performed in both an axial direction and a perpendicular direction to the lead screw.

240

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Note 9) The power consumption (including the controller) is for when the actuator is operating.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

S) (mm) Dimensions PB S Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm PA 12.5 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 x 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 169.5 65 17.5

Ionizer

Before piping this product, exercise caution to prevent particles, water drops, or oil contents from entering the piping. 25 45 30 55 Static Neutralization Equipment 40 65 50 75 Wiring/Piping Warning 1. Confirm if the power supply voltage is enough and that it is within the specifications before wiring.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

A B C D E EE F G H J K Applicable size Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 JSXM20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 JSXM30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 JSXM40 45 JSX10, 20, 30 Series Table of UL-compliant Products * Refer to the table below for UL-compliant products.

Series 10-, 21- AF-A Air Filter

45 45 45 Drain guide port size 1/8 1/4 1/4 1/4 1/4 1/4 10-: Fluorine grease Grease 21-: Lithium soap based grease 10-: Class 3 Cleanliness class (ISO class) 21-: Class 3 Note 1) Inlet side pressure: 0.5 MPa, Pressure drop: 0.05 MPa (Representative value).

Series AP3500

Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish + Passivation Elgiloy PCTFE (Option: Vespel) PCTFE Dimensions inch (mm) AP3500 1.37 (34.8) AP3550 1.46 (37.1) AP3540/3580 AP3540 3.49 (88.6) AP3550 3.28 (83.3) AP3580 3.17 (80.5) 0.44 (11.2) A B B 45

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

VCHC Connection Female Thread: Rc, NPT, NPTF ASR ASQ Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 3.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

4 x M3 x 0.5 thread depth 6 M3 x 0.5 thread depth 4 35.5 (A, B common view) Vacuum suction port 0 12h9-0.043 +0.02 0 2 x 3 depth 6 (A, B common view) 1.5 Auto switch mounting groove 5 4.7 3.5 15.7 12 2-3 27 41.5 (45) 8 17 2 x 4.2 2 2 15.5 8-0.05 0 3.5-0.03 0 3.5-0.03 0 Open: 22, Closed: 14 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 935 Rotary Actuated Air

CL

CL CL1 Rod Side Flange Style Bore size (mm) MLGC B BZ FT FD FX FZ FY Rod side flange style: CLG1FN Head side flange style: CLG1GN 25 30 30 36 65 75 75 82 38 45 45 52 52 60 60 66 5.5 5.5 6.6 6.6 57.5 6 7 7 8 20 25 32 40 CNG 69 69 76 MNB For long stroke, refer to page 9-2-32.

15

4.6 6 CY1S15-Z 7.5 9.5 16.6 38 6.5 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 5.4 12 2 5 6 52 39 11 60 5.8 28 40 8 CY1S20-Z M6 x 1 M6 x 1 10 9.5 21.6 44 8.5 36 37.5 24 19 20 10.5 22 5.4 16 2 5.5 8 45 16 70 28 62 5.8 46 10 CY1S25-Z M6 x 1 M6 x 1 10 26.4 52 8.5 40.5 40.5 27.5 21.5 21 12.5 22 11 6.5 16 5.5 53 20 49 2 8 70 70 54 7 10 CY1S32-Z M8 x 1.25 M8 x 1.25 12.5 14 33.6 64 9.5 50

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

45 17 36 82.6 2 x 3/4, 1, 1 1/4 (IN, OUT port) 95 Note) External pilot port (PA port) 1/4 is processed for threads in external pilot model only.

High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. I High-temperature type (H0, H4, H5) 1. For models with a heater, take care not to damage the insulation components of the lead wires and the connector section. 2.

CXT

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Fieldbus system EtherNet/IP compatible SI Unit

IO-Link master unit (EX600-LAB1): 44 byte occupied Output date: (Unit 3) IO-Link maser unit (EX600-LBB1): 44 byte occupied Output date: (Unit 4) SI unit (EX600-SEN7): 4 byte occupied When Diagnostic mode 0 Input data Output data Byte 0 DXB (Unit 0) Input 0 to 7 Byte 0 DYB (Unit 1) Output 0 to 7 Byte 1 Byte 1 LAB1 (Unit 2) Process data : : LAB1 (Unit 2) Process data Byte 44 Byte 44 Byte 45