SFOD-OMT0005CN

<> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (01-194) Over current E <> -66- <> <> I sent ALM (1-195) E <> (01-196) E <> <>EEPROM (01-197) E <> (EEPROM 10 ) <>CPU (CPU ) CPU (01-198) CPU E <> *1 (code)-3 Byte16-19 10 -67- 16/ A () (50mm ) () ( ) 5m 5m 10%(15m 20%) -68- 17/ 17.1.

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L M a l e E l b o w . . . . . . L__ Plug-in Elbow .. ... L Union Elbow . . . . . . LF Female Elbow . K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

Refrigerated Thermo-chiller

P S O E N L C Breaker handle Display panel Cooling fan for the unit inside (exhaust) Power cable entry 85 mm or less 55 mm or less A B D Circulating fluid fill port REMOTE START/STOP RUN ALARM RESET Handle SEL Model no. label ENT Handle Ventilation (expiration) E S O L C SMC N E P O Circulating fluid return inlet Rc 3/4 (with plug) Circulating fluid level gauge Facility water outlet Refrigerant

3

Body material Port size Orifice diameter e VXS2 3 A w B 5 Body material C37 Port size 1/4 e A Orifice diameter 10 Step 3 Select electrical specification.

Applicable Auto Switch Model

Applicable Auto Switch Model Refer to p.5.3-2 to 5.3-75 for the detailed specifications of auto switches.

VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

6For PROFIBUS DP K e For EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK K w and K e are used in combination with each other. K !4For PROFIBUS DP Terminating resistor Plug (Male) K tFor CC-Link K oFor DeviceNetTM Socket (Female) K uFor CC-Link K !2For DeviceNetTM Connects to the communication port of the communication unit connected at the end K !3 K !8 K !

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg m s m s Type of impact s m 1 m 2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact with the

AR20-B to AR60-B

q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Blue e Power supply (Light terminal) N.C. N.O. q IFW50--75/76 e Color of lead wire Black Symbol Contact q w Power supply (Common) w Red Terminal (Relay terminal) 24 VDC Gray e Power supply (Light terminal) N.O. N.C. q IFW50--85/86 e Color of lead wire Black Symbol Contact q w Power supply (Common) White Terminal (Relay terminal) w 24 VDC Gray e Power supply (Light terminal) N.C. N.O.

XLF Series

E E E E E E E (K flange ) F F F Fn n n n (KF flange) F F F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154

AIR COMBINATION

F G J M N Q1 Q2 R S U V AC20C-A 1/8 126.4 87.6 23.5 41.6 40 23.4 30 43.2 24 33 5.5 12 3.5 29 1/81/4 AC25C-A 1/8 167.4 115.1 23.5 30 55.1 50 30.5 41 57.2 35 7 14 4 41 1/43/8 1/43/8 AC30C-A 1/8 167.4 115.1 27 30 55.1 50 30.5 41 57.2 35 7 14 4 41 AC40C-A 1/8 220.4 147.1 33.5 38.4 72.6 75 36.1 50 75.2 40 9 18 5 48 1/43/81/2 AC40C-06-A 1/8 235.4 149.1 33.5 38.4 77.6 75 39.6 50 80.2 40 9 18

25

Connection circuit (POWER connector) 0.8-1.0 26-24 0.14-0.2 ZS-28-C Wiring of the IZS40 e-con is adopted for the connector of the IZS40. Connector with cable or without cable may be selected when placing an order for the power supply cable. When only an e-con is required, place an order for it as a part.

Manifold Specifications

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

Series MXP Precision Air Slide Table

Kinetic energy (E)E max.) Allowable kinetic energy E max. : Table 1 Possible to use by E=0.018<E max.=0.045 Load rate 3 3-1 Load rate of moment Wa=W max. Calculate allowable load Wa(N). Wa=112=12 =1 W max.=12 1=2/12=0.167 Allowable load coefficient : Graph 1 Calcurate load rate (1) of moment.

High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.