c Recommended radius Refraction value 10 7 20 15 20 15 35 20 35 20 60 40 95 60 100 65 100 65 130 110 160 130 220 160 400 290 Min. bending radius (mm) Note 4) 260oC Max. operating temperature Material PFA (Tetrafluoroethylene perfluoroalkoxy vinyl ether copolymer) How to measure the Note 1) Fluid varies depending on the applicable fittings.
Electric Actuator/Rod Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) LEY16, 25, 32 Series LEY How to Order LEY 16 30 B 1 1 6N S q w e r t y u i o !0 !1 !2 !
How to Order 6N 1 1 D B 25 50 LEY X5 R o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !
Long Stroke Air Slide Table Series MXY 6,8,12 Series MXY The slide table comes with a The slide table comes with a The slide table comes with a e slide table comes with a e slide table comes with a The slide table comes with a built-in magnetically coupled built-in magnetically coupled built-in magnetically coupled agneticall agnetica uilt-in magnetically cou uilt-in magnetically cou built-in
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Description Body Material Note Baking finish q Aluminum alloy w w Baking finish Aluminum alloy Housing e Baking finish Aluminum alloy Drain guard y r Foam rubber Float IN t Pilot valve Stainless steel + Rubber y Lever Resin u Flushing button Brass t i Orifice r o Diaphragm Rubber Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !
I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.
A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture
D E ZPY02U 2 4 6 8 Applicable tube O.D.
(Page 82) WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) 5 R/W U16 400 Y Settable values 0x0 to 0x1770 (0 to 6000) 6 R/W dt1 (Delay time) U16 0 Y Setting of OUT1 delay time 10 ms increment -78No.PF-OMX0002-B Product individual parameters (continued) Data Data Index Sub Access Initial value type storage 1 Parameter Set value 4 Remarks index 2 3 dec hex 0:
(Page 47) WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) 5 R/W U16 400 Y Settable values 0x0 to 0x1770 (0 to 6000) 6 R/W dt1 (Delay time) U16 0 Y Setting of OUT1 delay time 10 ms increment -43No.PF-OMX0007-A Product individual parameters (continued) Data Data Index Sub Access Initial value type storage 1 Parameter Set value 4 Remarks index 2 3 dec hex 0:
(Note3) (1)Ambient temp. : 32, (2)Circulating fluid : Tap water, (3)Circulating fluid rated flow, (4)Power supply : 400 VAC. (Note4) (1)Ambient temp. : 32, (2)Circulating fluid : Tap water, (3)Circulating fluid temp. : CH1 : 20/CH2 : 25, (4)Circulating fluid rated flow, (5)Power supply : 400 VAC, (6)Piping length : Shortest, (7)Rated cooling load is applied.
30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm/s Select MGF100 from Graph 7.
200 300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa
20 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC Note 1) Follow the same procedure for selecting PVQ10 series. 2) Flow rate depends on individual differences between valves and piping conditions.
(F dimension=0.51") D Rod clevis C B A E J K L G F H (inch) Part no.