Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

BM2-032 BM2-040 D-C7, D-C8, D-H7 D-B5, D-B6, D-G5 D-A3A, D-A44A, D-G39A, D-K39A BM2-020 BM2-025 BA2-032 BA2-040 BA2-020 BA2-025 BM3-032 BM3-040 BM3-020 BM3-025 Caution Mounting Type and Accessories 1. Be careful of the snap ring springing out. When replacing the rod seal, take care that the snap ring does not spring out while you are removing it.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Flow rate (l/min (ANR)) Inlet pressure (MPa) ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 Flow rate (l/min (ANR)) Inlet pressure (MPa) ARP40(K) ARP40(K) Rc1/2 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35

3 Way,3 Port Solenoid Valve NVZ Series

N213 aOSilrtr 3 way.3 port sotenoid vatve NVZseies Rubber Seal Model 100/300/500 Low Power Consumption 1.8 WDC Compact Size, Large Flow Capacity Cv 0.05 0.5 High Speed Response Time -15 mSec (NVZ 100) Built-in One-Touch Fitting Manifolds Avaihbb Individual or Manifold Mounting Variat ions of C L Kl tmrn"..

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

C D E F Dimensions Part no.

Bearing Type: M (Slide bearing), Bore Size: 12mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 75mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Bearing Type: M (Slide bearing), Bore Size: 16mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 75mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Bearing Type: M (Slide bearing), Bore Size: 25mm, Port Type: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 30mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Mounting: G (Head Flange), Bore Size: Ø32 mm, Port Thread: M thread: ø12 to ø25, Rc: 32 to 63, Clamp Stroke: 10 mm, Rotary Direction: R (Clockwise), Body Option: N (w/Arm), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Bore Size: 10mm, Stroke: 30mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Series: NCDA1 (Standard w/ Magnet), Mounting: B (MX0, Basic), Bore Size: 150 (1 1/2"), Stroke: 1000 (10"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number:

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 044 (7/16"), Stroke: 0100 (1"), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 075 (3/4in), Stroke: 0050 (1/2"), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 044 (7/16"), Stroke: 0600 (6in), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 200 (2"), Stroke: 0700 (7"), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Magnet: D (Built-in), Mounting: C (Rear Pivot), Bore Size: 075 (3/4in), Stroke: 0050 (1/2"), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Bore Size: 20mm, Water Resistant: None, Port Thread: TN (NPT), Stroke: 20mm, Action: D (Double Acting), Rod End: Round Bar Style, Direct Mount Switch Groove: Z (Direct Mount Switch Groove), Mounting Bolt: None, Auto Switch: M9P--Solid State , Gen.