Direct Operated Precision Regulator Modular Style Series ARP3000 1

Handle Note Body 1348102#1 ADC POM e Piston assembly Bonnet 1348104A r POM POM, NBR Valve 1348105 t Brass, NBR Valve spring 1348109 y Stainless steel 1348108 (For 0.85 MPa) Steel wire Adjusting spring u 1348108-1 (For 0.3 MPa) Dimensions Panel cutout dimensions 26 R2.5 SUP OUT SMC K C O P A A L U S H 12 37 54 25 1.6 (Max. thickness 4.5) 44 79.5 (When regulating pressure = 82) 5.4 10 31.5

PSxx-OMR0001CN

4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -21No.PS-OMR0001CN-J 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F(

VND

D E F G H J Model 1 8 1 4 1 4 VND50D-32A VND60D-40A VND70D-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8

HRX-OM-M090

Plug (Prepared by customer) L N E [Accessory] Power supply connector N E Earth leakage breaker (Secondary side) L N Cable Crimped terminal (Prepared by customer) E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-M090 Chapter 3 Transport and Setting Up Wiring 1.

Rotary Table

The end angular speed is obtained by: t Table 9 Allowable kinetic energy (J) Size Allowable kinetic energy : Rotation angle [ rad ] : Rotation time [ s ] 1 0.001 Kinetic energy E is obtained by: 2 0.0015 3 0.002 7 0.006 E Therefore, the rotary table rotation time is: E: Allowable kinetic energy [ J ] : Rotation range [ rad ] I: Moment of inertia [ kgm2 ] During uniform acceleration, the

CJ2Q

CJ1 CJP CJ2 CM2 C85 Component Parts CG1 No. q w e r t y No. u i o !0 !1 !

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

Title not found

Range Back Pressure SMC 22 8.0 -750mmHg~58psi 0~100C 0~30psi (60psi) 136 150 75 Height Width Operator Dia. 1 LVQ60 LQ Seal Locations N u t S e a l L o c k T ubing Support T aper Surface T u b i n g T r ap e zoidal T h re a d s I n s e rt Bushing Nut Lock U.S. Patent #5,996,636 Quadruple Seal Maximum leak protection. Up to 215psi @ 200C.

Pressure Gauge Guide

Model (Made to Order) Model Pressure rangeNote) Indication unit Connection thread Note MPa G46-2-01 to 02-C/ C1 G46-4-01 to 02-C/ C1 G46-7-01 to 02-C/ C1 G46-10-01 to 02-C/ C1 G46-2-01 to 02M-C/ C1 G46-4-01 to 02M-C/ C1 G46-7-01 to 02M-C/ C1 G46-10-01 to 02M-C/ C1 G46-4-02-X30 G46-10-02-X30 G46-2-02M-X4 G46-4-02M-X4 G46-7-02M-X4 G46-10-02M-X4 G46-2-02M-C/ C1-X4 G46-4-02M-C/ C1-X4 G46-7-02M-C

IDX-OM-W011

IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded

Dedicated Controller

Power supply Single phase 200V AC (A type) or Single phase 100V AC (A1 type) MC NFB Servomotor HC-PQ C P U V W L1 U V Servo amp MR-CA or SM L2 E W MR-CA1 The cable length between the controller and servo amp is 2m or less. 24VDC Z CN1 EMG Note 7) Shuts off with alarm signal when servo ON is turned OFF.

VT317

(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

MGP

3.68 4.10 4.53 4.95 5.99 6.85 7.70 8.55 50 MGPM50 3.36 4.00 4.73 5.37 6.01 6.65 7.29 7.93 9.54 10.8 12.1 13.4 63 MGPM63 4.18 4.94 5.78 6.54 7.29 8.05 8.80 9.56 11.4 12.9 14.4 15.9 80 MGPM80 6.49 7.43 8.67 9.61 10.5 11.5 12.4 13.4 15.8 17.7 19.5 21.4 100 MGPM100 10.5 11.9 13.6 14.9 16.3 17.6 18.9 20.2 23.6 26.2 28.9 31.5 (kg) MGPL12100/MGPA12100( (mm) (mm) 10 20 25 30 40 50 75 100 125 150

BP1000

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520

HRX-OM-R005

e 40 40 32 32 1000 1000 25 25 20 20 5 500 5 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-5 Heating capacity(HRS060-A-20-(BJM)) 9.5.2 HRS060-W-20-(BJM) 2000 2000 Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15