Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

[Torque: 0.1 Nm or less] Push-turn locking lever type [Type E] While pressing, turn in the direction of the arrow. If it is not turned, it can be operated in the same way as the non-locking push type. Locked position PUSH LOCK Caution When locking the manual override on the push-turn locking types (D, E), be sure to push it down before turning.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Assembly 1) Terminal box e connected with housing r should be reinstated.

ARM10/11

Material Description Description q w e r t y u i o !0 !

ARM10/11

Material Description Description q w e r t y u i o !0 !

Digital Pressure Switch

E: Measurement laws are added. F: Contents are added. G: Contents revised in several places. H: Contents revised in several places. [June 2018] I: Contents revised in several places. [March 2020] J: Contents revised in several places.

Digital Pressure Switch

E: Contents are added. F: Measurement laws are added. G: Contents are added. H: Contents revised in several places. I: Contents revised in several places. [June 2018] J: Contents revised in several places.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Refer to the LECA Operation Manual for installation. e CC-Link direct input type (LECPMJ) is not CE-compliant. t Lead [mm] Symbol LEFS16 LEFS25 LEFS32 LEFS40 A 10 12 16 20 B 5 6 8 10 y Stroke [mm] 50 50 to to 1000 1000 * Refer to the applicable stroke table.

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.

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F = degrees Fahrenheit S = SeCOndS NUmin = Normal liters per mlnute World Wide QS\E Support...

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Spool valve assembly Resin/HNBR e r t !0 !1 i q q u y For N.O.

CE

2r e y @4@8 !0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Rotary Gripper Series MRHQ

To confirm by calculation, use formula (1) on the right and check kinetic energy of load: E will be within the allowable value below.

Air Cylinder CLA Series Fine Lock Model

Vertical downward mounting (use Spring lock-up) ON OFF Locking ON Extend up E E OFF Lockinq As compared wilh Diagram 3, this circuit employs 5-port instead A and s-port 3 position solenoid valve (pressure center) instead of Sol As compared with Diagram 2, this circuit employs 3-port 2 position solenoid valve inslead of s-port 3 position solenoid valve leaving the others unchanged.

E-P HYREG

(With spring washer) ( ) Port 3 (R) Port 1 (P), 2 (A) 2 x 1 1/2, 2 View A 1000 E-P HYREG VY1 Series R Construction/Component Parts/Working Principle Working principle When the command signal is below 1 VDC, (refer to page 992) the solenoid valve is inactive, and the port 2(A) pressure is zero. When a command signal between 1 and 5 VDC is provided, the solenoid is activated.

Desktop Duster Box

Ionizer Additional air blow Air blow Ionized air 497 ZVB Series Dimensions C B D A C B A D F E [ZVB20] F E [ZVB40] Model A B C D D Note 1) E F F Note 2) ZVB20 211 202 212 310 351 210 297 341 ZVB40 248 392 298 349 390 400 384 428 Note 1) Dimension D is the overall height including the knob of the regulator.

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

Description Extract Initial input value Input range ORIG direction 2 1:CW , 2:CCW Note1) ORIG mode 1 ORIG limit 100 ORIG time 100 ORIG speed 20 ORIG ACC /DEC 1000 Creep speed 10 ORIG sensor 0: Disable Note 1) CCW direction: motor side origin, CW direction: end side origin. Become effective after restarting the controller. -9- 2.