The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Head Cover Port Position: 90° to axis, Rod End Bracket: Without bracket, Lock Position: -, Type of Mount Support: Base mounting type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Head Cover Port Position: 90° to axis, Rod End Bracket: Without bracket, Lock Position: -, Type of Mount Support: Base mounting type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Without bracket, Rod End Bracket: Without bracket, Type of Mount Support: Basic type, Custom-made Specifications: None, Connector Type: -

The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Without bracket, Rod End Bracket: Without bracket, Type of Mount Support: Basic type, Custom-made Specifications: None, Connector Type: -

The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Without bracket, Rod End Bracket: Without bracket, Type of Mount Support: Rod end flange, Custom-made Specifications: None, Connector Type: -

The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Head Cover Port Position: Axial direction, Pivot Bracket: Without bracket, Rod End Bracket: Without bracket, Type of Mount Support: Single foot, Custom-made Specifications: None, Connector Type: -

The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Type of Mount Support: Basic type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Without bracket, Rod End Bracket: Without bracket, Type of Mount Support: Basic type, Custom-made Specifications: None, Connector Type: -

The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Without bracket, Rod End Bracket: Without bracket, Type of Mount Support: Basic type, Custom-made Specifications: None, Connector Type: -

The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Without bracket, Rod End Bracket: Without bracket, Type of Mount Support: Rod end flange, Custom-made Specifications: None, Connector Type: -

The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Head Cover Port Position: Axial direction, Pivot Bracket: Without bracket, Rod End Bracket: Without bracket, Type of Mount Support: Single foot, Custom-made Specifications: None, Connector Type: -

The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Head Cover Port Position: 90° to axis, Rod End Bracket: Without bracket, Lock Position: -, Type of Mount Support: Base mounting type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

The number of the switches: N/A, Type of Auto Switch Mounting: Rail mounting, Head Cover Port Position: 90° to axis, Rod End Bracket: Without bracket, Lock Position: -, Type of Mount Support: Base mounting type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Free Mount Cylinder

Applicable models: D-A93, A93V 1) Even if connections are reversed on a 2-wire type switch, the switch will not be damaged because it is protected by a protection circuit, but it will remain in a normally ON state.

Table of Contents

Seal guide B Slide plate Spacer Hexagon socket head cap screw MYMK-16-A MYMK-16-A MYMK-25-A MYMK-25-A MYMK-25-A Side seal unit Nickel plated Seal List No. !

Aluminum High Vacuum Angle Valve

(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Right flange surface 2 Reed auto switch Without auto switch (with built-in magnet) When the seal material is not being changed, there is no need to select a symbol.

ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

Table of Contents

Working principle A + A A Series CXS 6, 10, 15, 20, 25, 32 Reverse mounting Piston seal A A A R H R H 1. When the piston is retracting, air is exhausted through both A and A until piston seal H passes air passage A. 2. After piston seal H has passed air passage A, air is exhausted only through A.

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C