Compact Cylinder with Air Cushion and Lock Series RLQ

L D d m t d H B C l 0.040 0.076 0.050 0.093 32, 40 C type 10 for shaft NT-04 IY-G04 32, 40 41.6 9.6 36.2 1.55 1.15 M14 x 1.5 8 22 25.4 C type 14 for shaft 10 50, 63 NT-05 IY-G05 50, 63 50.6 13.4 44.2 2.05 1.15 M18 x 1.5 11 27 31.2 14 Retaining rings are included.

Dedicated Controller

H Load 2 Load 2 L L Be sure to use the attached mounting screws.

OMS0020

Sends a monitor command to acquire the INP signal 14 :01_MO :01MOOK information. Acquires the information repeatedly until the received information shows that the INP is "1". 15 Repeat No. 14-15 (INP = 1 indicates that the target location has been reached.)

Compact End Lock Cylinder Series CBQ2

Standard stroke A B Q A B F Q 32 72.5 65.5 12.5 65 58 7.5 10.5 13 16 45 M8 x 1.25 60 4.5 14 40 82 75 14 71.5 64.5 8 11 13 16 52 M8 x 1.25 69 5 14 10, 15, 20, 25 50, 75, 100 50 83.5 75.5 14 73.5 65.5 10.5 10.5 15 20 64 M10 x 1.5 86 7 17 63 85 77 15.5 79 71 10.5 15 15 20 77 M10 x 1.5 103 7 17 (mm) Bore size (mm) R W Z L M N O P 32 7 34 5.5 9 Rc 1/8 7 49.5 14 40 7 40 5.5 9 Rc 1/8 7 57 14 50

EXxx-OMY0004

Product Summary . 14 3.1. Features . 14 3.2. Structure . 15 3.3. Safe digital inputs and clock outputs UT1 and UT2 . 16 3.4. Safe power supply (outputs) . 20 4. General Specifications . 21 5. Power Supply Concept . 22 5.1. Power distribution . 22 5.2. Under-voltage detection . 23 6. Valve Manifold . 24 7. Installation . 25 7.1. Mounting . 25 7.2. Wiring . 27 8. Commissioning . 33 8.1.

Filter Regulator

AW-OMX0057-A PRODUCT NAME Filter Regulator MODEL / Series / Product Number AW20(K)-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AW30(K)-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)06(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW60(K)-(F,N)06(F,N)10(B,C,

3 Port Solenoid Valve Series VQ100

White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the

CRQ2

F MRQ (US) (UW) DCB Q BC 20M N BB BA BA G D A (AU)Max S L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) Rotating angle A AU B BA BB Size BE J JA JB BC BD BU CA CB F H 90, 180 90, 180 40 90, 180 20 30 10 12 15 8.3 32 30 32 36 M8 x 1.25 M10 x 1.5 M10 x 1.5 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 16 16

CE2

17 189 21 30 72 23 13 M12 x 1.75 11 16.5 37 25 to 750 25 to 600 80 40 131.5 41 116 56.5 25 92 35.5 30 36 15 52 14 19 198 21 31 76 25 16 M12 x 1.75 11 16.5 37 Without rod boot With rod boot W S P NN MM N Bore size (mm) f h e H ZZ ZZ 40 50 63 80 100 59 11.2 51 280.5 43 8 161.5 1/4 218.5 27 288.5 M14 x 1.5 66 304.5 52 11.2 58 3/8 235.5 0 175.5 30 312.5 M18 x 1.5 1/4 52 11.2 66 326 254 0 58

CE2

72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600 80 40 19 25 14 76 52 31 41 25 92 30 15 21 11 37 131.5 116 56.5 35.5 36 198 16 M12 x 1.75 16.5 Without rod boot With rod boot W S P NN MM N Bore size (mm) h f e ZZ H ZZ 40 50 63 80 100 59 11.2 43 280.5 51 8 218.5 1/4 161.5 288.5 27 M14 x 1.5 66 11.2 52 304.5 58 0 235.5 3/8 175.5 312.5 30 M18

HRX-OM-X010

Circulating Fluid: Fluorinated Fluid Operating Temperature: 20 deg C At maximum frequency operation by inverter HRZ008-L-F [ 6 0 H z ] 1.2 [ 6 0 H z ] 1.1 1.0 [Supply Port] [ 5 0 H z ] 0.9 Pressure [MPa] 0.8 [ 5 0 H z ] 0.7 0.6 0.5 0.4 0.3 [Return Port] 0.2 0.1 0.0 0 5 10 15 20 25 30 35 40 Flow Rate [L/min] Fig. 8-14 Pump Performance Curve ( HRZ008-L-F ) When circulating fluid flow rate lowers

Guide Cylinder Series MGG

21 14 Rc 1/8 M6 x 1 depth 13 90 150mm or more 201 82 37 52 65 114 16 38 12 350 to 600 21 14 Rc 1/8 M8 x 1.25 depth 16 101 200mm or more 238 92 44 62 84 138 20 47 12 350 to 800 15 25 Rc 1/4 M10 x 1.5 depth 21 116 250mm or more 285 104 55 75 94 164 25 58 14 26 350 to 1000 16 17 Guide Cylinder Series MGG Basic type/MGGB 63 to 100 4-F through, counter bore G Bottom 4-H Bracket (See table below

XM, XY

H J K P.C.D L1 8 x 8.4 L2 XMC-50 XMC-63 XMC-80 70 88 90 29 36 44 P.C.D 92.1 10.5 9 9 486 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Dimensions XYC-25, 40/In-line type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ

LEYx-OMZ0015

Guide rod type / LEYG Series . 14 3.1 Specification . 14 3.2 How to Order . 15 3.3 Construction . 16 4. Product Outline . 17 4.1 System construction . 17 5.

3 Port Solenoid Valve Series SYJ300/500/700

: SYJ34G H -M5 M5 x 0.8 (A port) 14 5 10 2-3.2 (For mounting) 26.4 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] (Light/surge voltage suppressor) 41.5 [48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (W0): SYJ34-W0-M5

CV/MVGQ

RS Q G ND hole H10 RS H A Rod dg RZQ +0.2 0 NX MI W S CEP1 Material: Rolled steel Material: Brass Material: Iron CE1 Applicable bore size A1 L1 L MM Part no. Y-J010B Applicable bore size Applicable bore size B C d H B C d H Part no.

JXCx-OMT0032CN

ID 0 1 2 1 063 1ABS() 3 1 ) 2INC() 4 H 2 065500 mm/s 5 L 6 3 7 2 4 2147483647 0.01mm 8 1 9 0 ID1 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ) 0 12 36 - / Bit No.

AKH/AKB Series Check Valve with One-touch Fitting

86 113 6.5 14 24 34 H Reference dimension after screwing into R threads.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

D1 D2 L1 L2 L3 L5 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) D3 L4 Max.

Electric Actuator Triple Axis P&P Unit

Motor mounting process M5 x 14 Tightening torque 4.4Nm0.2Nm M4 x 14 Tightening torque 2.1Nm0.1Nm Plate A M4 x 14 M4 x 12 B 22 22 B section detail A section detail 18 Electric Actuator/Maintenance Guide 3 Be sure to read before handling. Belt mounting procedure Belt mounting process Belt mounting process 1. Confirm that the belt to be used has the following part number.