Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-out, Indicator Direction: 90°, Thread: R, Port Size: M5 x 0.8, Width Across Flats: 9mm, Tubing: ø3.2, Seal: -

Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-in, Indicator Direction: 90°, Thread: R, Port Size: M5 x 0.8, Width Across Flats: 9mm, Tubing: ø3.2, Seal: -

Size: M3, M5 Basis, Style: Universal, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: -, Lock Nut: -

Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: -, Lock Nut: -

Size: M3, M5 Basis, Style: Universal, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: -, Lock Nut: -

Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: -, Lock Nut: -

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 23 (ø3.2)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 23 (ø3.2)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 23 (ø3.2)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 23 (ø3.2)

•

U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?

Air Cylinder

x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32

Slider Type Ball Screw Drive/11-LEFS Series

Page 576 Page 590 515 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500 50 to 600 50 to 800 150 to 1000 LECP6/LECP1/LECPMJ 14 15 25 30 45 50 55 65 Horizontal Note 2) Work load [kg] LECPA 9 10 20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 2 23

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

) Specifications 6 10 Bore size (mm) Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Air (Non-lube) Size Suction flow rate L/min (ANR) 6 10 1.05 MPa 7 15 0.7 MPa 0.15 MPa 0.1 MPa 10C to 60C (No freezing) 30 to 400 mm/s Rubber bumper 0 to 5 mm compared to the standard stroke M3 x 0.5 M5

A

67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5

ML1

A ML1C25 ML1C32 ML1C40 23 27 32 MK/MK2 Operation of brake qSupply the air for releasing brake to braking air supply port on the head cover. This should be 0.4 to 0.5MPa. wScrew the manual rod into the slide table completely. eExhaust the air for brake releasing.

Soft Start-up Valve AV2000/3000/4000/5000

67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5

ZB-OM00301

M5 Q1 +COM N.C.

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 23 (ø3.2)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: 1 (180°), Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats: E (8mm), Tubing: 23 (ø3.2)