Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 2 (90°), Thread: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 23 (ø3.2)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: 2 (90°), Thread: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 23 (ø3.2)

Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-out, Indicator Direction: 180°, Thread: R, Port Size: M5 x 0.8, Width Across Flats: 9mm, Tubing: ø3.2, Seal: -

Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-in, Indicator Direction: 180°, Thread: R, Port Size: M5 x 0.8, Width Across Flats: 9mm, Tubing: ø3.2, Seal: -

Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-in, Indicator Direction: None (0°), Thread: R, Port Size: M5 x 0.8, Width Across Flats: 9mm, Tubing: ø3.2, Seal: -

Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-out, Indicator Direction: 90°, Thread: R, Port Size: M5 x 0.8, Width Across Flats: 9mm, Tubing: ø3.2, Seal: -

Body Size: M5 x 0.8, 10-32UNF, Type: Elbow, Control Type: Meter-in, Indicator Direction: 90°, Thread: R, Port Size: M5 x 0.8, Width Across Flats: 9mm, Tubing: ø3.2, Seal: -

Size: M3, M5 Basis, Style: Universal, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: -, Lock Nut: -

Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: -, Lock Nut: -

Size: M3, M5 Basis, Style: Universal, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: -, Lock Nut: -

Size: M3, M5 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: M5X0.8, Tube Size: Ø3.2, Option: -, Lock Nut: -

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 23 (ø3.2)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 23 (ø3.2)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 23 (ø3.2)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 23 (ø3.2)

•

U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?

Air Cylinder

x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32

Slider Type Ball Screw Drive/11-LEFS Series

Page 576 Page 590 515 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500 50 to 600 50 to 800 150 to 1000 LECP6/LECP1/LECPMJ 14 15 25 30 45 50 55 65 Horizontal Note 2) Work load [kg] LECPA 9 10 20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 2 23

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

) Specifications 6 10 Bore size (mm) Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Air (Non-lube) Size Suction flow rate L/min (ANR) 6 10 1.05 MPa 7 15 0.7 MPa 0.15 MPa 0.1 MPa 10C to 60C (No freezing) 30 to 400 mm/s Rubber bumper 0 to 5 mm compared to the standard stroke M3 x 0.5 M5

A

67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5