AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

air-filter-e

Element mounting figure 264 Industrial Filter Series FGB Replacement Procedure is P.472 Replacement Parts and Seal List How to Order FGB C A 10 04 B N 002 Actuators Modular F.R.L.

Air Preparation Equipment

Element mounting figure 264 Industrial Filter Series FGB Replacement Procedure is P.472 Replacement Parts and Seal List How to Order FGB C A 10 04 B N 002 Actuators Modular F.R.L.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Red (+) Insulation: Black () 0.3 mm2 4.1 51.2 48.5 (92) Cable type (TT) 52-SY9240 (R) -TT03 04 Max.10 L 217.6 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 (108.8) 21 ATEX Compliant Base Mounted Type Series 52-SY9000 Dimensions 29 30 3-position closed centre/exhaust centre/ pressure centre L plug connector (L) 17.5 52-SY9440 (R) -L03 04 3 5 123 51.2 86.5 Manual override

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Compact Cylinder

11 99 134 20 53.5 77 100 100 64 12 43.5 M12 x 1.75 22 85 63 117 136 11 11 154 22 53.5 94 For details about the rod end nut and accessory brackets, refer to page 19.

NCQ2/CQ2

11 99 116 134 20 77 45.5 53.5 73.5 80 56 43.5 18 1/2-13UNC M12 x 1.75 10 35.5 100 53.5 11 11 117 136 154 22 94 50.5 63 85 100 64 43.5 22 1/2-13UNC M12 x 1.75 12 40.5 Flange bracket material: Carbon steel For details about the rod end nut and accessory brackets, refer to page 178.

CM2

SCM220A, #11, #3 SCM220A, #11, #3, #19 CM2L25SCM225A, #11 SCM225A, #11, #3 SCM225A, #11, #3, #19 CM2L32SCM232A, #11 SCM232A, #11, #3 SCM232A, #11, #3, #19 CM2L40SCM240A, #11 SCM240A, #11, #3 SCM240A, #11, #3, #19 1.4-40 Series CM2 Front Flange (F) CM2F Bore size Stroke S T (mm) Bore N NA NN P E B2 C2 D H2 I A F K AL FD Z B FT MM B1 FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8

Air Cylinder

x 1.25 15 29 1/8 11 81 11 M6 x 0.75 10+0.08 0 5 1 6.5 15 123 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12+0.08 0 5.5 1 7.5 24 123 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14+0.08 0 6 1.25 8.5 24 144 50 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16+0.08 0 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18+0.08 0 11.5 3 14.5 24 167 80 10 22 M22 x 1.5 23 80

CQ2

11 20 77 116 134 53.5 80 73.5 53.5 43.5 M12 X 1.75 18 100 117 11 11 22 94 136 154 53.5 100 85 63 43.5 M12 X 1.75 22 Refer to p.2.3-18 for rod end nut and optional brackets.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

134 11 77 99 116 53.5 73.5 53.5 43.5 M12 x 1.75 18 80 100 22 11 154 11 94 117 136 53.5 85 63 43.5 M12 x 1.75 22 100 For details about the rod end nut and accessory brackets, refer to page 7-6-20.

MU

148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Rear flange MUG25SMU25, #4 (#1+#4+#11) MUG32SMU32, #4 (#1+#4+#11) MUG40SMU40, #4 (#1+#4+#11) MUG50SMU50, #4 (#1+#4+#11) MUG63SMU63, #4 (#1+#4+#11) Front flange MUF25SMU25, #3 (#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50

Electric Actuator

Note 10) With lock only Note 11) For an actuator with lock, add the power consumption for the lock.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 25, 50, 75, 100, 125, 150

CM2

Dimensions are the same as standard type. 32 11.0 1.27 40 11.8 2.35 For construction, refer to page 6-4-11. Since the dimensions of mounting style is the same as pages 6-4-13 to 6-4-20, refer to those pages. For other specifications, refer to page 6-4-5. For construction, refer to page 6-4-11.

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.