Air Cylinder

EE EA Bore (in) Y XD G J C CB CD L KK M R B D WF A MM P LF ZD 3/8 2.02 2 1/4-28 3/8 0.3 150 (1.5") 1.71 5 3/4 1.26 1.1 3/4 3/8 1/2 3/4 7/16-20 0.63 1.43 1 1/8 9/16 1 3/4 5/8 2.36 3 5/8 6 3/8 3/8 2.6 2 1/2 5/16-24 3/8 0.3 200 (2") 1.71 5 3/4 1.26 1.06 3/4 3/8 1/2 3/4 7/16-20 0.63 1.84 1 1/8 9/16 1 3/4 5/8 2.4 3 5/8 6 3/8 3/8 3.1 3 5/16-24 3/8 0 250 (2.5") 1.75 5 7/8 1.3 1.06 3/4 3/8 1/2 3/

NCQ8

/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 1/4-20UNC -2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-1/2 3-3/4 4 4-1/4 4-3/4 5-1/4 5-3/4 6-1/4 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 2-1/8 2-1/4 2-3/8 2

5 Port Solenoid Valve

One-touch fitting (Metric) 1 2 3 4 5 A B C 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center 4-position dual 3-port valve (N.C./N.C.) 4-position dual 3-port valve (N.O./N.O.) 4-position dual 3-port valve (N.C.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

/N.C. 4 position dual 3 port valve: N.C./N.C. 4(A) 2(B) 4(A) 2(B) A 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.O./N.O. 4 position dual 3 port valve: N.O./N.O. 2(B) 4(A) 2(B) 4(A) B 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.C./N.O. 4 position dual 3 port valve: N.C.

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

VFR

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 5 60 or less 1.87 (1.82) Closed center VFR530 VFR531 3 80 or less Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 60 or less 5 1.87 (1.82) Closed center VFR530 VFR531 80 or less 3 Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

Base Mounted Metal Seal/Rubber Seal Series VQ

terminals) 3.

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Refer to section 3.10. 3 4 3.

HRX-OM-X037

3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and maintenance space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical wiring . 3-11 3.3.3 Preparation and wiring of power supply cable

VQ7-6/7-8

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 8 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62

VQ7-6/7-8

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62

HRX-OM-S004

2.3 Function of Parts . 2-4 2.4 Operation display panel . 2-5 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and Maintenance Space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical

HRX-OM-Y098

Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and maintenance space . 3-7 3.3 Installation . 3-8 3.3.1 Installation . 3-8 3.3.2 Electrical wiring .3-10 3.3.3 Preparation and wiring of power supply cable .3-12 3.3.4 Contact input/output communication

HRX-OM-T002

Parts . 2-4 2.4 Operation display panel . 2-5 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and Maintenance Space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical wiring . 3

HRX-OM-W060

Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and maintenance space . 3-7 3.3 Installation . 3-8 3.3.1 Installation . 3-8 3.3.2 Electrical wiring .3-10 3.3.3 Preparation and wiring of power supply cable .3-12 3.3.4 Contact input/output communicatin wiring .3-17

HRX-OM-W032

3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Operation at low ambient temperature or low circulating fluid temperature . 3-6 3.2.3 Location . 3-7 3.2.4 Installation and maintenance space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical wiring . 3-11 3.3.3 Preparation

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

DOC1001322

Transport. 3-1 3.1.1 transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Operation at low ambient temperature or low circulating fluid temperature . 3-5 3.2.3 Location . 3-6 3.2.4 Installation and maintenance space . 3-7 3.3 Installation . 3-8 3.3.1 Installation . 3-8 3.3.2 Electrical wiring .3-10 3.3.3