EXxx-OML0010CN

PLC (23 ) Enforce (21 ) (22 ) -20No.EX-OML0010CN-C a) (52) b) 28 c) /(16) d) e) f) 3 () (ON) (OFF) OFF ON Set Cancel Set Cancel -21No.EX-OML0010CN-C a) (52) b) 28 c) /(16) d) e) f) () g) / g)# Set Cancel Set() g)* Cancel() g) -22No.EX-OML0010CN-C (0 ) A,B Z, 0,19 "Wrong Password" -23No.EX-OML0010CN-C 2. Diagnosis Data() [2.DiangosisDate] 1.& & 2. 3. 1. (1718) 2. 25 3.

LV50-OMQ0002

Doc.No.LV50***-OMQ0002-G Product Name Electromagnetic Digital Flow Switch Model/ Series/ Product Number LFE# SMC Corporation No.LV50***-OMQ0002-G Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definitions and Terminology 14 Mounting and Installation 16 Installation 18 Piping Method 19 Wiring 21 Flow Setting 24 Function Settings 26 Default Setting

Air cylinder

PTFE Grease Specification Standard models -X446 Grease pack part number: GR-F-005(5g) 21 - Lubrication Caution 1) Lubrication for products using special grease Lubrication to this cylinder leads to operation failure. Otherwise, it may cause the operating failure. 2) Do not wipe off the grease on the sliding surface of the air cylinder.

VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling. Air Supply Precautions on Design Warning Warning 1.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Double side square Z Double side key Y Shaft type Bolt Double side round K Single side key Single shaft S Single side round T Single side square X B port A port A port B port Shaft pattern Vane Body end surface on short shaft side Rotation pattern Note) Consult P/A regarding order made specifications.

Air Fittings Fitting Series For Special Environment

L A D KRH06-02S KRH06-01S 1 8 10.8 15.8 27.8 21.9 19.9 26.9 20.3 12 20.5 24.5 1 4 18.5 19 19 5.7 6 14 17 15.5 25 3 8 1 8 KRH06-03S 26 18.0 KRH08-01S KRH08-02S KRH08-03S KRH10-01S KRH10-02S KRH10-03S 30 28.5 25.5 32 35.5 31 29 36.5 35 32 Reference dimensions after R(PT) thread installation. 14 1 4 3 8 1 8 1 4 3 8 22.5 19 28 29.5 24.5 17 8 20.5 17 17 20.8 31.3 29.5 10 23 1 2 KRH10-04S 21 54.3

LX Series Compact Electric Actuators

See pages 31-39 for more information on SMC'S LC6 series drivers, Seiles uff EleGriGlcMflors 0inrmh$l$till$swm LXFH5B (30Omm) ft hlor-T;+ -r-I "kl T slot dimensions (21 ) J I shows the location ai which origjn poinl swirch opetales.

PSxx-OML0002CN

No.PS-OML0002CN-G // ZSE30A(F) ISE30A 2 8 10 11 14 14 17 18 21 21 24 24 24 F0 26 F1 OUT1 27 F2 OUT2 30 F3 30 F4 31 F5 32 F6 34 F7 35 F8 36 37 F90 37 F97 39 F98 41 F99 43 44 47 48 49 56 56 58 -1No.PS-OML0002CN-G (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

Part Number Description: EXTERIOR SEAL   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 684   Family Description: XLF HIGH VACCUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number, EXTERIOR SEAL, VACUUM SERIES, XLF HIGH VACCUM VALVE, 21

Part Number Description: VALVE SEAL   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number, VALVE SEAL, VACUUM SERIES, XLD HIGH VACUUM VALVE, 21, XLD

VACUUM VALVE, 21, XLA NO SIZE RATING, .00000 lb

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 681   Family Description: XLA HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number, BONNET ASSY, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21,

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 683   Family Description: XLD HIGH VACUUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number, BONNET ASSY, VACUUM SERIES, XLD HIGH VACUUM VALVE, 21,

Compact Manometer Series PPA 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Handling Operating Environment Warning Warning 1. Absolutely never use in an atmosphere where explosive gases are used. The compact manometer does not have explosion proof construction.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Setting completed Adjust the set value. 1 Multi-channel Digital Sensor Monitor PSE200A Series 3-Screen Display Centralized Control Saves Installation Space. 66% reduction in installation space (Compared with the panel mounted Z/ISE20m) 40 mm PSE200A 138 mm 34.5 mm Panel mounted Differential Pressure Check Mode p. 16 One monitor displays 2 lines of differential pressure.

Compact Manometer Series PPA 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Handling Operating Environment Warning Warning 1. Absolutely never use in an atmosphere where explosive gases are used. The compact manometer does not have explosion proof construction.

E-P HYREG ® Series VY1 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Noise reducing effect: 30 dB or more. Large effective area Piping How to Use DIN Terminal Caution Caution Tightening the fittings and their torque When screwing fittings into the valves, make sure to tighten them to the proper torque values given below. Wiring procedures 1.

VM

Straight Plunger/VM220-02-05, VM230-02-05 Panel mounted hole JIS Symbol 2 port 3 port 56N F.O.F. 0.5MPa supply 3.5mm P.T. 2mm O.T. 5.5mm T.T. 3.5-21 VM200 Series VM200 Roller Plunger/VM220-02-06, VM230-02-06 VM220-02-06S, VM230-02-06S JIS Symbol 2 port Panel mounted hole 3 port SlA VlA 56N F.O.F. 0.5MPa supply 3.5mm P.T. SlA 2mm O.T. 5.5mm T.T.

Aluminum High Vacuum Angle Valve

D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

NCQ8

Minimum Auto Switch Mounting Stroke (inch) D-M9, D-F9W D-M9V, D-F9WV No. of auto switches D-A9 D-A9V D-F9BAL Model NCDQ8A(B)-(C)(M) NCDQ8A(B)-100S(M) NCDQ8A(B)-200S(M) NCDQ8A(B)W-(C)(M) NCDQ8A(B)Z-(M) NCDQ8A(B)Z-100S(M) NCDQ8A(B)Z-200S(M) NCDQ8A(B)Z-100T(M) NCDQ8A(B)Z-200T(M) 0.62 (5/8") 0.25 (1/4") 0.62 (5/8") 0.25 (1/4") 1.00 (1") 1 0.62 (5/8") 0.37(3/8") 0.62 (5/8") 0.25 (1/4") 1.00 (1