90 Release valve 9 stations Release valve 23 Supply valve 6 5 Supply valve 11 10 stations Release valve 10 stations 24 Release valve 4 3 12 Supply valve Supply valve 25 11 stations Release valve 11 stations Release valve 2 1 13 Supply valve Supply valve 12 stations Release valve 12 stations Release valve COM. 25 Triangle mark indicator position COM. 26 Positive common specification Positive
. 5-1 5.1 Start of Operation . 5-1 5.2 Setting of Values . 5-1 5.3 Cautions for Operation Control. 5-2 5.3.1 Indication and Setting when Output Cutoff Alarm Operates . 5-2 5.4 Operation of Controller . 5-3 5.4.1 Details of Operation and Display Panel . 5-3 5.5 How to operate . 5-4 5.5.1 Setting Mode, Level 1 . 5-5 5.5.2 Detail of setting mode level 1. 5-6 5.5.3 Setting Mode, Level 2 . 5-
22 15 17 30 18.5 11 9 (6.5) 18.5 11 15.5 27.5 22 15 5 22 15 17.5 37.5 18.5 11 9 (6.5) 18.5 11 16.5 35 ( ): D-A93 For actual setting, check the operation of the auto switch and adjust as necessary.
460 460 460 460 460 460 1/8 C6 13/64 VX210 1 5/64 1/8 C8 13/64 5/32 9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.
to 60 (High temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Operating time s 0.15 0.35 0.4 0.54 0.7 0.08 KF (NW), CF KF (NW) KF (NW),
5 C C *Applicable stroke Standard produced upon receipt of order *produced upon receipt of order (Only Robotic type cablecan be selected) 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Actuator cable type 11-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard
Top mounting [LEY25/32/63] (Right / Left side parallel) 24 25 19 22 23 16 11 20 21 18 10 9 17 7 7 12 13 14 15 1 2 3 4 5 6 8 In-line [LEY63] In-line [LEY25/32] Rod end male thread 26 24 32 26 29 30 27 28 27 31 27 28 27 25 7 Parts list No.
08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.
Construction 11. Auto switch P19 11-1. Applicable auto switches 11-2. Minimum auto switch mounting stroke 11-3. Auto switch proper mounting position (detection at stroke end) and its mounting height 11-4. Auto switch operating range 11-5.
175 185.5 5 77.5 88 162.5 173 4 67 77.5 150 160.5 3 56.5 67 150 160.5 2 46 56.5 137.5 148 VQ4 25 35.5 112.5 123 L1 L2 L3 L4 VQZ Dimensions/Top entry connector [FU] (mm) VQD n L 1 100 110.5 16 15 250 260.5 14 237.5 248 13 237.5 248 12 225 235.5 11 212.5 223 10 200 210.5 9 187.5 198 8 175 185.5 7 162.5 173 6 162.5 173 5 150 160.5 4 137.5 148 3 125 135.5 2 112.5 123 L3 L4 100 110.5 VZS How
to 55C (23 to 131F) Note 1) 5 to 55C (23 to 131F) 5 to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6
30 24 33 5.5 12 3.5 29 1/81/4 1/43/8 AC30A-B 1/8 110.2 115.1 85.6 30 55.1 80 29.4 3.5 41 35 7 14 4 41 AC40A-B 1/8 145.2 147.1 91.7 38.4 72.6 110 33.8 1.5 50 40 9 18 5 48 1/43/81/2 AC40A-06-B 1/8 155.2 149.1 93.2 38.4 77.6 110 33.8 1.2 50 40 9 18 5 48 3/4 AC50A-B 1/8 191.2 220.1 175.5 93.1 110 43.3 3.2 70 50 11 20 6 60 3/41 AC60A-B 1/8 196.2 234.1 175.5 98.1 110 43.3 3.2 70 50 11 20
08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.
5 Not specified Not specified 100,000 5 +7 6 +10 -19No.
6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective
Setting the circulating fluid discharge temperature . 5-7 5.3.3 Setting the CH1 circulating fluid discharge pressure (When selecting Option P) . 5-8 5.4 ALARM MENU . 5-9 5.4.1 Alarm menu . 5-9 5.4.2 Items shown on the alarm menu . 5-9 5.5 MONITOR MENU . 5-10 5.5.1 Monitor menu . 5-10 5.6 SETTING MENU . 5-11 5.6.1 Setting menu . 5-11 5.6.2 Key-lock setting . 5-12 5.6.3 Key click sound setting
) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S
. 5-5 5.3.7 Setting screen . 5-6 5.3.8 Mode Selection screen . 5-6 5.3.9 Initial Setting screen . 5-7 5.3.10 Maintenance screen . 5-9 5.3.11 Option screen . 5-9 5.3.12 Alarm Display screen . 5-10 5.3.13 Information screen . 5-10 5.4 Examples of System Operation . 5-11 5.4.1 Example 1: Circulating fluid set temperature is changed from 25.0C to 34.1C. . 5-11 5.4.2 Example 2: Communication
D-A9 D-M9 D-M9W 2 6 5 8 12 11 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.