Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

CLA

'I. 78 2S 52 14 / 113 21 30 72 23 17 M1 2X l .75 _boot With boot PW S W H 12 ... 1 h f zz j IBore olze k U M MM MM (mm) XIUS N P PG PH PL 40 6 71 11 M1 4Xl .5 7/' 6 20 27 'I, 42 11 20 45 153 8 51 215 43 11 .2 59 223 168 0 I50 58 237 52 11.2 66 245 50 7 80 11 M18Xl .5 30 0/, 46 10 21 V.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10-SYJ5223-WO-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107[111.4] 3 3 3 3 87.4[91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6

Air Fittings & Tubing

KQ2U23-M5 38 34.5 2.2 2.2 9 M5 X 0.8 10 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 1 8 KQ2U23-01S KQ2U23-02S 11 14 1 4 39.5 KQ2U04-M5 M5 X 0.8 M6 X 1.0 4 2.2 2.2 Kl KQ2U04-M6 40 36 10 11 10.4 16 4 10.4 1 8 42 38 KQ2U04-01S 4.2 4.2 11 Ml 1 4 KQ2U04-02S 46 40 20 14 42.5 KQ2U06-M5 M5 X 0.8 M6 X 1.0 2.2 2.2 12 KQ2U06-M6 43 39 13 Hl 1 8 12.8 45.5 41.5 KQ2U06-01S 12.8 11 17 6 1 4 49 43 17

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 25, 50, 75, 100, 125, 150

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

-11-1 for further information on auto switches.

Table of Contents

(Refer to page 14-19-11.)

KJ

(inch) Min. port size D Note) L Q M2 M1 Weight (g) Model Applicable tubing KQ2T01-03 KQ2T01-07 KQ2T03-05 KQ2T03-07 KQ2T05-07 KQ2T07-09 KQ2T07-11 KQ2T09-11 KQ2T09-13 KQ2T11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 18 20.5 19.5 20.5 20.5 23 26 26 29 29 4.5 5.3 4.8 5.3 5.3 6 6.6 6.6 7.8 7.8 16 17 16.5 17 17 18.5 21 21 22 22 5 8 6 8 8 11 17 17 26 28 5 32 2.5 15.5 1 8 1 4 3 16 3

SV

8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[90.4] 300 (Lead wire length) 107 79.8 VS 45.4 45.4 11 VS7 11 A B A B 5 5 2-2.6 (Mounting holes for manifold) 10 10 (Lead wire length) 19 19 2-2.6 (Mounting holes for manifold) 300 26.6 26.6 40.6[47.1] 29.5[36] 23 23 17.1 10.5 10.5 10 2-2.6 (Mounting holes) 3 3 11 2-2.6 (Mounting holes) 10 11 15 77.4 15 77.4 [ ] for AC Other dimentions are the same as the grommet style

MHZ

point L (mm) Gripping point L (mm) Internal Grip MHZJ2-10D/11-MHZ2-10D MHZAJ2, MHZJ2, 11-MHZ2 Pressure 0.7 MPa Pressure 0.7 MPa 25 0.6 MPa 0.6 MPa 20 Gripping force (N) 0.5 MPa 0.5 MPa 15 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa

MHZ

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Gripping point L (mm) Gripping point L (mm) MHS MHZJ2-10D/11-MHZ2-10D External Grip MHZAJ2, MHZJ2, 11-MHZ2 MHC 20 Gripping force (N) Pressure 0.7 MPa Pressure 0.7 MPa MHT 15 0.6 MPa 0.6 MPa 0.5 MPa 0.4 MPa 0.3 MPa 0.2 MPa 0.5

Electric Actuator/Slider Type

Note 11) Only when motor option With lock is selected. Note 12) For an actuator with lock, add the power consumption for the lock.

The MXJ air slide tables integrated front mounting part and table result in a highly accurate, rigid top and front mounting surface. Clean specification styles are available with no dimensional changes. Several options are available for both the standard and the clean series MXJ. These options include a symmetric style, stroke adjusters, axial piping and auto switches., Cylinder, Air,

The MXJ air slide tables integrated front mounting part and table result in a highly accurate, rigid top and front mounting surface. Clean specification styles are available with no dimensional changes. Several options are available for both the standard and the clean series MXJ. These options include a symmetric style, stroke adjusters, axial piping and auto switches., Cylinder, Air,

The CQS compact cylinder is available for those small bore cylinder applications where saving space is a concern. The CQS offers standard long strokes * in four bore sizes from 12 to 25mm. Long stroke versions incorporate a wear band and thicker piston to handle the increased bearing needs of the longer strokes. Both switch capable and non-switch capable body styles are the same, and switches

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Applicable Auto Switch/Refer to page 11-11-1 for further information on auto swiches.

CM2

Dimensions are the same as standard type. 32 11.0 1.27 40 11.8 2.35 For construction, refer to page 6-4-11. Since the dimensions of mounting style is the same as pages 6-4-13 to 6-4-20, refer to those pages. For other specifications, refer to page 6-4-5. For construction, refer to page 6-4-11.