IDX-OM-U010 Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD .
B Contact output signal 3 selected alarm Sets the alarm selected for the contact output signal 3.
Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Cautions for handling the motor type auto drain . 11 2 11 4 Electric circuit . 11 2 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12 3
A B Manual override 35.5 10.8 In case of locking type, turn after pushing in. A side: Orange (for supply valve) B side: Green (for release valve) 11
A B 10 20 20 40 B B B 25 45 A A 30 55 Detection hole Detection hole 40 65 50 75 Electrified object Electrified object 60 90 70 100 75 105 (2) After installation, confirm if electrified potential is correctly measured. (Unit: mm) Detected value of electrified potential depends on ambient installation conditions. Confirm detection condition of sensor electrified potential.
/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.
Applicable bore size (mm) SNJ-016SUS d A1 L L1 NDd9 MM B C H B C d H 0.030 0.060 0.030 0.060 10 10 10 14 7 3.3 8 16.2 4 8.1 3.2 15.2 21 M10 x 1.0 M4 x 0.7 M4 x 0.7 16 16 16 Y-J016SUS 17 8 NTJ-015SUS 5 11 19.6 4 9.2 4 SNKJ-016SUS 16.6 21 M12 x 1.0 M5 x 0.8 M5 x 0.8 NX R1 NDH10 U1 Part no. + 0.048 0 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 Y-J016SUS 5 6.5 12 10 Rod End Cap CJ5 CG5 T-bracket Flat type
D. 9 to 11:P368010-27 At accessory H: (with external scale plate) 100 44 46 IP8100-01 (With terminal box) OUT2.Rc1/4 110 38 192 251 110 40 35 58 218 OUT1.Rc1/4 SUP.Rc1/4 23.5 43 23.5 38 39 11 9 39 OUT2 MPa 0% 50 42 20 162 117 25% MPa 65 A 15 122 ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 22.5 75% 100% 125 View A 12 168 8 2 x M8 x 1.25 depth12 Female thread for side mounting 2 x
Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.
(Refer to CAT.E501-B "Air Fittings and Tubing" pages 143 and 144 for details.)
2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1 (P) 3
B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138 315 200 3 11 190 180 153 112 9 XL*-OMJ0003-D 5.
A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.
(Page 77) 8000 0x1F40 0 R 8010 0x1F4A 0 R Flow rate PD conversion equation: b F32 N 8020 0x1F54 0 R Flow peak value S16 N 0x0 to 0x1068 (0 to 4200) 8030 0x1F5E 0 R Flow bottom value S16 N 8060 0x1F7C 0 R Accumulated PD conversion equation: a F32 N Measurement related 8070 0x1F86 0 R Accumulated PD conversion equation: b F32 N Refer to "Inclination and intercept to the unit specification".
D. 9 to 11:P368010-27 At accessory H: (with external scale plate) 100 44 46 IP8100-01 (With terminal box) OUT2.Rc1/4 110 38 192 251 110 40 35 58 218 OUT1.Rc1/4 SUP.Rc1/4 23.5 43 23.5 38 39 11 9 39 OUT2 MPa 0% 50 42 20 162 117 25% MPa 65 A 15 122 ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 22.5 75% 100% 125 View A 12 168 8 2 x M8 x 1.25 depth12 Female thread for side mounting 2 x
gauge Rc 1/8 Pressure gauge port 107 One-touch fitting Air 21.6 70.4 Fitting Part Dimensions (mm) 26.5 Fitting size VAC/SET Straight R Elbow S Elbow T Elbow U 8 8.5 11 14 Elbow V 26.6 40.5 65 5.2 6 1/4" 8, 5/16" 10, 3/8" 1 1.5 4 7 27.5 27.5 28.5 30.5 21 21 21 21 10.5 10.5 10.5 11 N P A B IRV20A-lllZ : With digital pressure switch 64.5 53 52 U V 41 VAC side VAC 38 R l30 46 50 SET 6 10.5 x
lines in clean room environments TPH 06 04 B 20 Tube O.D.
PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin
XYC Exterior dimensions D G C C B J Fd (K Flange) 45 H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J XYC-25 100.2 85 48 1 23.5 40 26 64 28 XYC-40 130 115 66 2 38 55 41 84 36 C D G C B J Fd (K Flange) 45 K H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J K XYC-50 178 121 80 31 53 75 52 104 29 10.5 XYC-63 209 148 100 39 61 87 95 70 126 36 9 XYC-80 268 177 117 45.5 80 114 110
Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11