LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

Power Valve: Economy Valve Series VEX5

900 1000 700 600 500 400 300 200 100 0 E 800 900 1000 700 600 500 400 300 200 100 0 F 800 900 1000 700 600 500 400 300 200 100 0 G When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

IP80-OM00019

11-5 (1) DARA(24) (2) (50%)50% (25)50% (3) 0%100% (26 24 25 26 90 27 25 12.

Programless controller (with stroke study) Step motor (servo 24 VDC)

17500 15 1000 20 2000 20 48 No.JXC-OMU0030-A 11.

KJ

Nylon Urethane 3.2 4.5 11 Applicable tubing O.D.

New

12 100 15 100 15 100 Note 1) Power consumption, Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

HRX-OM-K003

Attach the front panel. 11. Connect the power cable to the power breaker on customer side (primary side).

MHF2

11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 12-3-13 14 Series MHF2 Dimensions MHF2-8D2 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing

MHF2

0.5MPa 100 Pressure 0.2MPa Pressure 0.2MPa 80 0.5MPa 0.6MPa 80 0.6MPa Overhang Hmm Overhang Hmm 0.3MPa 0.7MPa 0.3MPa 60 0.7MPa 0.4MPa 60 0.4MPa 40 40 20 20 100 80 60 40 20 0 100 80 60 40 20 0 Gripping point L mm Gripping point L mm 12-3-6 7 Model Selection Series MHF2 Confirmation of External Force on Fingers: Series MHF2 Step 3 MHZ L L MHF MHL Mr Mp Fv My MHR MHK Courtesy of Steven Engineering

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model K J M L1 E L2 M H t W1 W2 1/8 LQ1P11 LQ1P12 LQ1P21 LQ1P22 LQ1P31 LQ1P32 LQ1P33 LQ1P41 LQ1P42 LQ1P51 LQ1P52 LQ1P61 LQ1P62 4 3 6 4 10 8 6 12 10 19 12 25 19 Class 1 11.5 17 6 44 10 11 13 8 10.5 16.5 23.5 55.5 15 15 17 8 14.5 6 14 J Panel thickness (Max. t) 23 30 69 20 21 24 8 20.5 7 17 W2 W1 M 28 35 78.5 24 26 28 8 24.5 7 21 1/4 (E) (E) H 39 43.5 29 100 39 43 9 36.5 9 26 L1 Class 2 to

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard strokes (mm) Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 40 L/min) below 80 L/min) 50 to 1050 L/min 100 to 2100 L/min 5.0 0 to 5%F.S. (Displays 0 when the value is (Displays 0 when the value is below 50 L/min) below 100 L/min) 60 to 1050 L/min 120 to 2100 L/min 6.0 0 to 6%F.S.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

IDX-OM-W035

T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 11-6 . 11-4 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 12-4 . 12-2 13 13-1 . 13-1 -2 IDX-OM-W035 i i i-1 () 3 i-1-1 3 IDFB Series i-1 i-1 IDX-OM-W035 i i-2 5 . i-2-1 i-2 IDFB Series i-2 IDX-OM-W035 i i-2-2 i-2-3 50 i-2-4 i-2-5 0 i-2 IDFB Series i-3 IDX-OM-W035 i i-2-6 WARNING !

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

2-Color Display Digital Flow Switch Series PFM

of needle rotations PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 60 120 300 (kPa) 100 300 (kPa) Flow rate (l/min) Flow rate (l/min) 750 (kPa) 100 (kPa) 40 80 750 (kPa) 60 100 (kPa) 20 40 20 0 5 10 15 0 5 10 15 0 Number of needle rotations Number of needle rotations 930 2-Color Display Digital Flow Switch Series PFM7/PFM5 Parts Description PFM7 Description Item Button Button

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 151 165 180 180 226 226 100 110 118 118 150 150 143 152 168 168 208 208 24 24 24 24 40 40 6.5 9 10.5 12 14 15 4 4 5 9 11.5 17 92 97 106 106 132 132 11 11 11 11 21 21 1/8 1/4 1/4 3/8 3/8 1/2 35 40 43.5 43.5 56 56 27 27 31.5 31.5 38 38 19 19 19 19 23 23 1.7-34 End Lock Series MBB With Mounting Bracket Foot(L)/Locking at head end (