Moisture Control Tube

Single Piston Actuator size Recommended model Piping condition Bore size (mm) Stroke (mm) Tube O.D. 2 mm IDK02-100 IDK02-200 Tube O.D. 4 mm IDK04-100 IDK04-200 Tube O.D. 6 mm IDK06-100 IDK06-200 Tube length (m) 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 2.5 All strokes 4 All strokes Less than 10 6 10 or more Less than 10 8 10 or more Less than 10 10 10 or more Less than 10

Solenoid Valve

(mm) SQ1000 SQ2000 If it is difficult to loosen the screw, loosen it while 3.2 VVQ1000-50A-C3 pressing the valve gently on the area near the manual override. 4 VVQ1000-50A-C4 VVQ1000-51A-C4 6 VVQ1000-50A-C6 VVQ1000-51A-C6 Mounting and Removal of Manifold with 8 VVQ1000-51A-C8 *Part numbers above are for one fitting; however, order them in 10 piece units.

Multi-channel Digital Sensor Monitor ( compatible)

Refer to the table for each pressure specification (page 110) Display/set pressure range Display/min. setting unit Power supply Used as switch output device 12 to 24 VDC (10%), and voltage ripple (p-p) 10% at max. voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Electric spec. Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max.

ZQ-OM01301

ZQ-OM01301-A 9 Clamping rod assembly (2 pcs. are included in one set) ZQ1-SR1-04-A (1) Number of stations 01 1 stations (1) 02 2 stations 08 8 stations 10 Sound absorbing material (for manifold ) (2 pcs. are included in one set) ZQ1-SE2-A 11 Silencer block assembly (2 pcs. are included in one set) ZQ1-SC1-A 12 Ejector body gasket for manifold (10 pcs. are included in one set) ZQ-3-005-10AS

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

Mist Separator Series AFM20/30/40

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

DOC1020530

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.

Metering Valve with Silencer Series ASN2 1

Dimensions (Hexagon width across flats) Dimensions Min L1 H Screw D D Model Max 20.5 20.5 30 34.2 37 49 ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 8 8 12(12.7) 17(17.5) 19 24(23.8) 23.3 23.3 35 39.2 42 54 10 10 15 20 25 30 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Screw D Note) (in parentheses) are the dimensions of NPT screw specifications. Caution Be sure to read before handling.

Pressure Relief 3 Port Valve with Locking Holes

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

VCB

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

Clean Regulator

Model XT13-394-06 XT13-394-10 INA-48-1-06 INA-48-1-10 INA-48-16-10 INA-48-16-06 INA-48-58-10-H INA-48-58-06-H Port size Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Relief mechanism Non-relief Relief Non-relief Fluid Deionized water (Pure water) Air, N2 Proof pressure 1.9 MPa 1.5 MPa Max. operating pressure 1.3 MPa 1.0 MPa Set pressure 0.1 to 1.0 MPa 0.05 to 0.5 MPa 5 to 60C Ambient and fluid

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

AMF

bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167

0.01

A 72 27 B 41.8 15.8 SFD100-02 23 Hole shape for bracket mounting 26.2 SMC 23 14.7 90 1.5 3 51 17 Use a countersunk head screw (M3) for bracket mounting. 72 27 3.5 SFD200-C SFD200-C Dimensions Model A 125 B SFD200C08 C10 C12 8 10 126 12 126 SMC 42 24 Bracket mounting dimensions 96.5 36 4 x 3.5 114.5 4 x 7 Applicable tubing O.D.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

Air Cylinder

17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8

VCB

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the below table for orifice and port size combinations.

IIIIIII

(5 Kgf/cm2) A B c D E F G A B c D E F G 4.25 (108) 2.20 (56) 1.32 :33.51 0.91 1.23l o.24 (6) 0.81 :20.5) 0.39 (10) 4.43 112.5 2.38 '60.5)1.32 33_5' 0.91 (231 o.24 (6) 0.81 (20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S m

Mechanical Valves Series NVM, NVFM, NVZNI

(5 Kgf/cm2) A B c D E F G A B c D E F G 4.25 (108) 2.20 (56) 1.32 :33.51 0.91 1.23l o.24 (6) 0.81 :20.5) 0.39 (10) 4.43 112.5 2.38 '60.5)1.32 33_5' 0.91 (231 o.24 (6) 0.81 (20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S

Piping: 42 (Base Mounted Common SUP Individual EXH), Stations: 4 Stations, A B Port Size: C6 (ø6 One-touch Fitting)