4/5 Port Air Operated Valve Series SYJA3000 1

B 11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14

MXH

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30 4 30 40 45 72 6 20

Rotary Table

Auto Switch Operation range / Hysteresis / most sensitive position B Adjustment bolt Adjustment bolt A B Table 15.

2-Color Display Digital Flow Switch Series PFM

, 525 / For 25 (l/min) 30 15 750 (kPa) 300 (kPa) 300 (kPa) Flow rate (l/min) Flow rate (l/min) 100 (kPa) 750 (kPa) 20 10 100 (kPa) 5 10 0 5 10 15 5 10 15 0 Number of needle rotations Number of needle rotations PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 60 120 300 (kPa) 100 300 (kPa) Flow rate (l/min) Flow rate (l/min) 750 (kPa) 100 (kPa) 40 80 750 (kPa) 60 100 (kPa) 20 40

MXH Series Compact Slide

Auto switch groove positions (mm) B 6.9 8.8 13.7 17.1 A 10 14 19 26 Bore size (mm) 6 10 16 20 4-4.2 Auto switch mounting groove B A 38

Vacuum Gripper

ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B

CYP

Throttle valves and dual speed controllers for recommended speed adjustment of CYP cylinders Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Operation Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01

MY2

38 EA 8.5 13 EC 9 13.5 EY 36 56.5 S 67.3 73.2 T 12 15 TT 7.1 (MAX 18.6) 10 (MAX 26) E 17.5 25 16 Series MY2C Side Support Side support MYC-SA G 2-H C B A F E D H 3.4 4.5 6.6 E 15 25 45 A 60.6 95.9 121.5 F 26 38 64 B 64.6 97.5 121.5 G 4.9 6.4 11.7 C 70.6 107.9 134.5 D 77.2 115.5 145.5 Model MYC-S16A MYC-S25A MYC-S40A Applicable cylinder MY2C16 MY2C25 MY2C40 Guide for Using Side Supports kg

ZQ-OM01301

consumption -40 30 -40 Suction flow rate 20 -20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 Supply pressure [MPa] Suction flow rate [L/min (AMR) ] The flow characteristics curve shows the relationship between the vacuum pressure and the suction flow of the ejector.

Suction cups with flange

ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

Modular F.R.L. Unit

Metal bowl Metal bowl with level gauge With drain guide Drain cock with barb fitting Optional specifications B B B B B B N.O.: Black N.C.: Gray 10 One-touch fitting B O S O S 1/4 M5 x 0.8 Barb fitting Applicable tubing: T0604 Width across flats 17 Accessory specification Standard specification With bracket With auto drain Model Port size A B C D P E F G H J K L M B AFM20 1/8, 1/4 40 97 10

REC

2, 4, 6, ) 10 15 60 60 + 45 (n 2) D-C73C D-C80C DH7C 10 15 65 (n 2) 2 15 + 50 ( ) 65 + 50 (n 2) (n = 2, 4, 6, ) (n 2) 2 15 + 50 ( ) D-B5/B64 D-G5NTL 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n 2) (n 2) 2 20 + 50 ( ) D-B59W 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Information

R A-phase pulse detector (Differential line driver) 9 PG0 LZ 8 5 LAR PG0 COM 10 LZR 9 6 LB B-phase pulse detector (Differential line driver) LG 3 7 LBR Control common SD Plate 34 LG Control common 10 m or less Note 5) 33 OP Z-phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 EMG Emergency stop 42 SON 15 Servo ON Note 4) CN6 RES 19 Reset 3 MO1 PC 17

EXxx-OMS0026CN

W.S. 032767 032767 +0+32767 3276865535 -0-32767 -0-32767 -52No.EX-OMS0026CN AD -3276732767 = 15 V 15 V 5000 1000 10001 V 20002 V 30003 V 40004 V 50005 V (5 V-1 V)(5000-1000)1/1000 15 V 1/1000 AD 1000 5000 (AD ) (ab) [V] [mA] 10 010 15 05 020 420 -3276632767 10 5 5 20 20 -3276732766 0 1 0 0 4 /(E.O./W.S.) () E.O.

Card Motor

Pushing force 0.9 0.9 Pushing force Pushing force 0.9 4 4 4 Thrust setting value: 3 Thrust setting value: 2.8 Thrust setting value: 2.6 0.7 0.7 0.7 3 3 3 0.4 0.4 0.4 2 2 2 Thrust setting value: 1 Thrust setting value: 1 Thrust setting value: 1 0.2 0.2 0.2 1 1 1 0 0 0 0 0 0 0 2 4 6 8 10 Pushing position [mm] 0 5 10 15 20 Pushing position [mm] 0 5 10 15 20 25 30 Pushing position [mm] Pushing

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Drain cock Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth

155

26 52 4.5 44.5 25 26.3 115 79.9 VCC 1/2 63 49.6 29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 79.9 3/4 80 59 35 17.5 112 120.5 165 35 31 62 5.5 48 30 31 124.2 85.8 1 90 74 44 22 135.9 144.5 189 40 36 72 6.5 60 35 39.5 148.2 96.8 383 Series SGC How to Fix an Auto Switch Auto Switch Proper Mounting Position (mm) D-M9l Model A B A B A B A B A B A B A B A B A B 5 SGC(A)2lll-05l10, 15

CJP

MB C95 CA1 CS1 Standard stroke (mm) Rod end thread With thread Without thread B 5, 10, 15, 20 5, 10, 15, 20, (25), 30 6 10, 15 CJP D 10 15 F CDJP D 10 15 F 90 S With Auto Switch Number of auto switches Action Air cylinder with auto switch S 2 1 Mounting Bore Size * 5 stroke: S type only With auto switch 6 10 15 6mm 10mm 15mm Symbol Mounting Standard B F L D T Basic Flange Foot Clevis Trunnion

LEYx-OMZ0015

parallel LECSN2-T9(-) D In-line Rod end thread Motor option Lead[mm] [mm] Stroke[mm] Nill Without option Nill Rod end female thread 100 100 Symbol LEY100 M Rod end male thread B With lock B 10 1 rod end nut is included 1000 1000 D 3.33*1 *Refer to the applicable stroke table for details.