SMC Corporation of America
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of rated voltage Coil insulation type Class H Power consumption W 50/60Hz VCB2: 4.9/4.1, VCB3: 7.7/6.6, VCB4: 10.5/9.3 Inrush VCB2: 22/19, VCB3: 36/30, VCB4: 45/37 Apparent power VA 50/60Hz VCB2: 10/8, VCB3: 15/13, VCB4: 19/16 Holding Note 1) Vibration resistance Conditions when tested with one sweep of 10 to 300Hz in the axial direction and at a right angle to the armature, in both energized

psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160C (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra 10 in. (0.25 m) Option: 25 in. (0.62 m) Face seal, Tube weld 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel

19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 17 56 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 18.5 59 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5 3/8" 17.9 23 104 16.2 21 65 16.2 28.6 49.2 56.7 24 49.6 R 1/2 42.1 AS431FG

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

Applicable bore (mm) A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 9-14-9 10 Series ML1C Construction Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Applicable bore (mm) A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 9-14-9 10 Series ML1C Construction Component Parts Material No. Description Note Hard anodized Hard anodized Hard anodized Hard anodized Hard anodized Note Hard anodized Hard anodized Material No.

10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -() JIS B 8433-1993: 2) : : : 1 2 3 1 2 3 4 -2No.PS-OMH0002CN-D / / / / 1 1.5 3) 3) 1 1 () -3No.PS-OMH0002CN-D () () () () -4No.PS-OMH0002CN-D () * (ISE70 ) SUS630SUS430SUS304 (ISE75(H)) ON/OFF (ISE70 ) (10 10 ) UL1310 UL1585 UL -5No.PS-OMH0002CN-D * (50 N ) , ,ISE70 40 NmISE75(H)80

Operating pressure (MPa) Flow Characteristics/Weight Flow characteristics Pilot port size Weight (kg) b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size Valve model 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 2 position single 2 position double 3 position closed center 3 position

M1 0Xl.5 15 50 131 20 28 22 SO.6 44 B " M l 0)(1.5 M10)(I .S 63 138. 5 18 124 .5 SO.6 44 I. 8 Ml0Xl .5 15 20 30 22 " M12xl .75 M1 2x 1.75 lB 150 27 M1 6X2.0 21 80 168 22 38 28 64 56 18 10 10 0SM:: Series CDQ2BP High Magll8lic Field Resistance ," , [).P70 ' , D-~i4,,;'; ' ; ::~::Y_iidiz!C:::i Auto SWitch No.

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

of rated voltage Coil insulation type Class H Power consumption W 50/60Hz VCB2: 4.9/4.1, VCB3: 7.7/6.6, VCB4: 10.5/9.3 Inrush VCB2: 22/19, VCB3: 36/30, VCB4: 45/37 Apparent power VA 50/60Hz VCB2: 10/8, VCB3: 15/13, VCB4: 19/16 Holding Note 1) Vibration resistance Conditions when tested with one sweep of 10 to 300Hz in the axial direction and at a right angle to the armature, in both energized

384 372 494 476 Model L1 L2 L1 L2 VVX31 LQ VVX32 VVX33 LVN Z 59 62 64 W 83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

C B A A B A B A B ML1C25 ML1C32 ML1C40 MY-S25 MY-S32 MY-S40 5.5 9.5 5 8 M6 X 1 50 35 117 103 6.6 11 6 11.7 M8 X 1.25 64 45 146 128 9 14 5 14.8 M10 X 1.5 80 55 170 148 4.7-9 Series ML1 Construction Component Parts Component Parts Description Note Material No Description Note Hard anodized Hard anodized Hard anodized Hard anodized Hard anodized Material No Aluminum alloy Aluminum alloy Aluminum

Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39 0.47 0.39 0.80 0.55 0.55 0.80 0.55 0.40 0.35 0.35 0.40 0.35 0.27 0.32 0.32 0.27 0.32 0.13 0.10 0.10 0.13 0.10 0.19 0.14 0.14 0.19 0.14 0.48 0.41 0.41 0.48 0.41 0.83 0.65 0.65 0.83 0.65 0.47 0.38 0.38

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the below table for orifice and port size combinations.

19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 59 18.5 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5 3/8" 17.9 23 104 16.2 65 21 16.2 28.6 49.2 56.7 24 49.6 R 1/2 42.1 AS431FG

R . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 11 T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5 . 11-4 12 V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80

Cv b Cv b Cv b Cv Grommet VTA315 1.6 0.30 0.39 1.7 0.39 0.45 1.9 0.38 0.49 1.7 0.36 0.45 0.16 VOA315 1.4 0.12 0.33 1.2 0.18 0.29 1.5 0.16 0.35 1.2 0.13 0.28 Construction/Dimensions Precautions Breathing port of diaphragm Pilot port Rc 1/8 Be sure to read before handling.