1

SY (65.4) (12) (Fitting for the type with P/E ports on the U and/or D sides) EX600 VM PE PE LOCK FREE A B A B A 14 3/5 A B A 14 A B A 14 A B A 14 3/5 A 14 26.9 52.8 113.4 XT34 1 X E 1 X E (159.5) 61.7 P P 12 B 12 B 12 B 12 B 12 B 4.7 12.6 17.9 28.6 36.9 (Fitting for the type with P/E ports on the U and/or D sides) 1(P) port 2(B) port P, E port entry: D External pilot for straight piping One-touch

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

2

P.265 AFD30-A AFD40-A AFD40-06-A AR AR10-A AR20-B AR25-B Regulator AR30-B P.274 AR40-B AR40-06-B AR50-B AR60-B ARlK AR20K-B Regulator with Backflow Function AR25K-B AR30K-B AR40K-B P.277 AR40K-06-B AR50K-B AR60K-B 215 Modular F.R.L.

5-Port Solenoid Valve

2(B) (A)4 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) (EA)5 1 (P) 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 3-position pressure

5 Port Solenoid Valve Series SY3000/5000/7000/9000

B B B B P SS5Y3-45S1DStations U.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

With External Pilot Specifications (Pitch) 24 P=24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E) port

4/5 Port Solenoid Valve

port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.

A

D I M E N S I O N S S I D E S U P P O R T U N I T S I D E S U P P O R T A: C O U N T E R B O R E T Y P E S I D E S U P P O R T B: T H R E A D E D T H R O U G H H O L E Part No Cylinder Side Support A Side Support B A B C D E F G H J MY-S16A/B MY1C16 MY-S16A MY-S16B 61 71.6 15 26 4.9 3 6.5 3.4 M4X0.7 MY-S20A/B MY1C20 MY-S20A MY-S20B 67 79.6 25 38 6.4 4 8 4.5 M5X0.8 MY-S25A/B MY1C25 MY-S25A

0.4

2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

0.4

: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2

Series SV

With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

4 port base mounted 10-SYJ3000 Common SUP/Common EXH Common SUP/ Individual EXH R P A P. 299 B Type 32 4 port base mounted 10-SYJ3000 P R A P. 299 B Type 40 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 P. 357 Type 41 10-SYJ3000 5 port base mounted P. 299 10-SYJ5000 P. 327 10-SYJ7000 P A P. 357 B Type 42 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 B B R P A P. 357 Type 43 5 port

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) 20.5 15.8 9.5 17.5 P = 16 11.9 9.2 25.2 11.8 5.4 30.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 49.9 E 3/5 E 3/5 E 3/5 E 3/5 63.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 1 P P 1 1 P PE One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 3/8" PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16

5 Port Solenoid Valve

56.6 73.2 BUS IN 8.7 PWR PWR 4.7 (9.5) (Fitting for the type with P/E ports on U and/or D sides) 48.2 18 (Pitch) P = 16 (20.5) [External pilot] 18 31.8 4.7 (20) 50.5 39.7 15 3/5 E 3/5 E B 2 B 2 B 2 B 2 B 2 PE B A 3/5 14 A B A 14 A P 1 A 4 P 1 A 4 A 4 A 4 A 4 1 X E Cut dimensions for panel mounting Refer to panel cut dimensions for details. (59.8) P (31.7) 12 B 12 One-touch fitting [1(P),

Compact Cylinder

Stroke range 12 to 40 1 to 9 50 1 to 19 Part no.: CQP2B20-3T CQP2B20-5T with 2 mm width spacer inside The B dimension is 24.5 mm. Example Type Mounting/Removal 12 P P 16 P P 20 P P 25 P P 32 P P 40 P P 50 P P Bore size (mm) 1. Do not remove the hexagon socket set screw on the side of the rod.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing