VFS

/60 Hz Inrush Holding AC VFS2320-T-02 1.8 W (2.04 W: With light/surge voltage suppressor) Power consumption Grommet, Grommet terminal, Conduit terminal, DIN terminal Electrical entry VFS2120-E-02-F Note 1) Use dry air at low temperatures.

ZP

) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly 10 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

ZP3

Type/ZP3-T ZP3-T-B ZP3-T-A w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W 02 2 stations Note) Note) 20 20 stations (Max.)

smcmaintenancepartslist

3 t !8 @8 #2 w Actuators Modular F.R.L. Pressure Control Equipment Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

VFR

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

2/3 Port Valve

T F N Table q Port/Orifice Size Table w Voltage-Electrical Entry-Options Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) Class B Class H G S L, Z S L, Z Orifice size 1 (1.5mm) 2 (2.2mm) 3 (3mm) 4 (4mm) Solenoid C D, T G, C S(1) T VX31 VX32 VX33 01( ) 02( ) 02( ) 03( ) 02( ) 1 8 1 4 1 4 3 8 1 4 AC 03( ) 3 8 Ordering Example (

Modular F.R.L. Unit

) T-interface Note 6) (02) 02 02 03 03 (04) 04 Y61004 02 VHS40-06 02 04 VHS50-(10) pressure release 02 02 06 3-port valve for residual Note 6) 03 VHS2001 VHS3003 VHS3003 VHS4002 03 01 02 02 06 06 06 Piping adapter Note 6) E200-02 E30003 E300-03 E40004 E500-06 E600-10 E60010 E60010 E100-M5 03 04 04 06 02 01 02 02 Pressure switch Note 6) 03 IS1000E-20 02 IS1000E-3003 IS1000E-3003 IS1000E

Proposals for Energy Saving

Differential pressure gauge GD40-2-02 Page 81 w Confirm clogged condition visually.

ZP

(Pad diameter: 20 mm or less) ZP T 02 U N A5 From p. 33 p. 115 p. 117 From p. 121 With adapter ZP T 02 U N J 6 B3 A8 From p. 43 p. 116 p. 118 From p. 124 With buffer q w e r t y u i Flat type q Vacuum inlet direction w Pad diameter t Buffer stroke 02 2 16 16 04 4 20 20 06 6 25 25 08 8 32 32 10 10 40 40 13 13 50 50 e Material Nil Pad unit T Vertical R Lateral (With One-touch fitting) Y Lateral

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Except for M5 Coil type Standard Nil T With power saving circuit (24 VDC, 12 VDC only) A port size Power saving circuit is not available for D, Y, DO, YO or W types.

0.4

) w t r y @0 u i !

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Modular F.R.L. Units

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

5 Port Solenoid Valve

How to OrderValves (With two mounting screws) SY 3 5 C6 1 0 3 1 q w r e t y u i o !0 !1 !2 !3 Top ported !

Compact 5-Port Solenoid Valve

Specification External pilot (SUP/EXH block assembly) q e r t w y u i o 10 Side ported q Series t Valve stations w Type 1 JSY1000 3 JSY3000 5 JSY5000 L1m: 34 cores L2m: 17 cores Symbol Stations Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 16 16 stations 02 2 stations Specified layout*2 (Up to 32 solenoids available) 08 8 stations 02 2 stations Specified

Modular F.R.L. Units

1 q r e w t i u y o !0 !

0.55

M-type plug connector (M): VF5220-;M;;1; 02 03 Conduit terminal (T): VF5220-;T ;;1; 02 03 Max. 10 201.8 (Lead wire length) 179.2 Applicable cable O.D. 56 Approx. 300 4.5 to 7 169 (Indicator light) Pg9 89.2 [79.2] 79.2[69.2] [ ]: Without indicator light Unless otherwise indicated, dimensions are the same as Grommet (G).