VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

AS

T D2 L1 D2 L1 L2 L2 Metric Size A (2) M1 L5 (1) Mass (g) d T Model D2 D3 H D1 L1 L3 L4 L2 Min.

ZP

ZP3-T(10/13/16)UM;(J/K)3-@ ZP3-T(10/13/16)B;(J/K)3-@ ZP3-T(10/13/16)UM;(J/K)6-@ ZP3-T(10/13/16)B;(J/K)6-@ ZP3-T(10/13/16)UM;(J/K)10-@ ZP3-T(10/13/16)B;(J/K)10-@ ZP3-T(10/13/16)UM;(JB/K)15-@ ZP3-T(10/13/16)B;(JB/K)15-@ ZP3-T(10/13/16)UM;(JB/K)20-@ ZP3-T(10/13/16)B(JB/K)20-@ Buffer assembly part no. Note 3) Buffer assembly part no. Note 3) Pad unit part no.

Compact and Lightweight

-N01-N01 12.7 12.7 12.7 67 42.5 27 26 NPT1/8 NPT1/8 NPT1/8 ZH07DA-N01-N01-N01 70.2 ZH10DA-N01-N01-N01 76.4 ZH13DA-N01-N02-N02 17.46 17.46 90.8 51 29.5 36.3 NPT1/4 NPT1/4 ZH15DA-N02-N03-N03 17.46 22.23 22.23 108.2 63.3 34.3 37.1 NPT1/4 NPT3/8 NPT3/8 ZH18DA-N03-N03-N03 22.23 131 73.6 41.1 39 NPT3/8 ZH20DA-N03-N04-N04 23.81 23.81 142.6 74.9 44.1 NPT1/2 NPT1/2 Inch Dimensions when the standard

FILTER REGULATOR

G46-10-N01 G36-4-N01 G46-4-N01 1 0.2MPa setting Round type pressure gauge NPT G36-P10-N01-X30 G46-P10-N01-X30 Z Imperial unitMPa, psi 0.2MPa setting 1Z G36-P4-N01-X30 G46-P4-N01-X30 Imperial unitMPa, psi G36-10-01 G46-10-01 G G36-4-01 G46-4-01 1 0.2MPa setting G36-10-01-L G46-10-01-L Rc G36-4-01-L G46-4-01-L 1 0.2MPa setting Round type pressure gauge (with colour zone) G36-10-N01

Table of Contents

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

y o t y o ZA Component Parts r e i No.

FILTER REGULATOR

-10-N01-L G46-10-N01-L G36-4-N01-L G46-4-N01-L 1 0.2MPa setting G G36-10-01-L G46-10-01-L G36-4-01-L G46-4-01-L 1 0.2MPa setting ARP20P-310AS-01 Rc Aluminium die Pressure gauge adaptor assembly ARP20P-310AS-N01 G cast ARP20P-310AS-F01 NPT ARP20P-320AS-01 Rc Plug assembly ARP20P-320AS-N01 G ARP20P-320AS-F01 NPT AR20P-370AS-01 Rc Plug AR20P-370AS-N01 PBT resin G AR20P-370AS

Compact Manifold Regulator Series ARM5

V L4=50+T+X 50 SMC H H L L O O S S U U C C P P K K 8 U 57 (at handle locked) DIN rail part no.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

A Rectified value Rectified value P-1 P-1 (Differential) Pressure (P-3) H-1 H-1 (H-2) P-2 Min. B Nonadsorption ON Switch output 1(2) OFF Work 1 Work 2 Work n Atmosphere ZSE ISE Switch output response time when autoshift is input.

2-Color Display Digital Flow Switch Series PFM

Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

•

Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

2-Color Display High Precision

Pressure Momentary change Set-value P-1 H-1 t (ms) t (ms) Time Switch output operation in normal conditions ON OFF Time Switch output operation when anti-chattering function is on. ON OFF Time I Display unit switching function (F 0) Display units can be switched with this function.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

q w e r t i i o o !

1

t q e w r e q w r 2-position single 5 (EA) 3 (EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 1 (P) (A)4 2(B) 1 (P) (EA)5 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Vacuum System Peripherals:

ZYX3000: For Serial Transmission Unit by SMC DIN rail manifold (IN313) Customer name Contact person Sheet number P .O. number Equipment Quantity set(s) Date required Manifold Specification Sheet Please fill in the order of q to t. q How to Order Manifold Fill in the blanks below with symbols of necessary specifications.