FILTER REGULATOR

-10-N01-L G46-10-N01-L G36-4-N01-L G46-4-N01-L 1 0.2MPa setting G G36-10-01-L G46-10-01-L G36-4-01-L G46-4-01-L 1 0.2MPa setting ARP20P-310AS-01 Rc Aluminium die Pressure gauge adaptor assembly ARP20P-310AS-N01 G cast ARP20P-310AS-F01 NPT ARP20P-320AS-01 Rc Plug assembly ARP20P-320AS-N01 G ARP20P-320AS-F01 NPT AR20P-370AS-01 Rc Plug AR20P-370AS-N01 PBT resin G AR20P-370AS

Filter Regulator

Bowl assembly / auto drain for AW30-D Option symbol Semi-standard symbol 6 J 6J Semi-standard: (Standard) Semi-standard: J Piping port Piping port (9) Part No. thread ty pe (9) Part No. thread ty pe Rc Rc C3SF-J-D C3SF-D G G C3SFF-J-D NPT C3SF(-Z)-D NPT C3SFN-J(Z)-D Appearance and part No.

•

I"P.1/4, .. . , ASP530F-N03-11 S 3/S' ~ 25.9 1 51Jtr 11 / 16" 28.6 ~6~5 ~ 61 ;a.: ~:B-.9 :2D.S 220 tU6' /36,3 . 34:7 .26~ 21.7 . . ~ A efertlllCe dll'l'lerlSlons 1 01 NPT Ihmads aller installalion 3 Speed Controller 5 . ASP w"" P;lo' Ch.,k V,'v. efles Construction Parts list .QesCr;plian ' ''' fi1t~lal , . . .

Digital Pressure Switch

-J Bracket C -60No.PS-OML0003-J Panel mount adapter Panel mount adapter + Front protective cover -61No.PS-OML0003-J Panel cut-out dimensions -62No.PS-OML0003-J Revision history A: Modified errors in text.

2-Color Display High Precision

Piping 01/N01 A B D ZS-24-A ZS-24-B ZS-24-D ZS-35-C ZS-35-D ZS-35-F ZS-35-G Bracket A Bracket B Bracket D E E Panel mount adapter Panel mount adapter + Front protective cover F W1/WF1/M5/C4/C6 Output specifications R T S V X Y NPN open collector 2 outputs + Analog voltage/Auto-shift switching PNP open collector 2 outputs + Analog voltage/Auto-shift switching NPN open collector 2 outputs +

1

Symbol Type Page t P, E port entry F FW P PG PH J G T L1 L2 L3 M S S6 S S S4 S3 IP40 IP67 26 pins 20 pins 10 pins D-sub connector (25 pins) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 24 stations) Flat ribbon cable 95 Refer to page 151 for the EX600 and u on page 163 for the EX250.

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Vacuum System Peripherals:

ZZYX3 45 P J Ejector mounting positions Common specifications U side D side U D Positive common Negative common Nil N SUP/EXH block assembly specifications Standard, Internal pilot specifications External pilot specifications Internal pilot, Built-in silencer External pilot, Built-in silencer RS Nil R Number of ejectors 1 to 10 stations Mounting position of connector S Voltage specifications

Digital Pressure Switch

Compound -100.0 to 100.0 kPa -100 kPa 100 kPa Positive pressure -0.100 to 1.000 MPa -0.1 MPa 0 1 MPa -57No.PS-OMM0005-J Dimensions Side piping Z/ISE10(F)-M5-#-# Rear piping Z/ISE10(F)-M5R-#-# -58No.PS-OMM0005-J Side piping Z/ISE10(F)-01-#-# Side piping Z/ISE10(F)-N01-#-# -59No.PS-OMM0005-J Panel mount side piping Z/ISE10(F)-M5-#-### + ZS-39-B Panel mount rear piping Z/ISE10(F)-M5R-#-###

9.8

(ZSE/ISE30A) P Reduction in setting w Reduction in setting work ork P Pre Prevention of mistakes in setting vention of mistakes in setting P Reduction in setting work P Prevention of mistakes in setting Cop Copy Copy 1 switch Slave pressure switch Master pressure switch (source of copy) 2 switches 10 switches 3-step setting -step setting 3-step setting 1 2 3 Push Push Adjust to the set-value

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1

2-Color Display

P Reduced setting efforts P Reduced chance of set-value input error Cop Copy Copy Master Unit 1 Slave Unit 2 Unit 10 3-step setting -step setting 3-step setting 1 2 3 Push Push Push Push Push Push Adjust to set-value with buttons. Finish setting Added vacuum range. P Rated pressure range: 0.0 to 101.0 kPa 0 101 kPa Expanded pressure range for positive-pressure type to the vacuum range.

ZSE30A(F)/ISE30A

Output voltage (Rated pressure range) Linearity Output impedance Note 2) Voltage output 1% F .S. Approx. 1 k Analog output 2.4 to 20 mA 2.5% F.S. 4 to 20 mA 2.5% F.S. Output current (Rated pressure range) Linearity Note 3) 1% F .S.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

Miniature Regulator Series ARJ210

AV Regulating pressure range AU Ambient and operating temperature range Weight AF Model AR Port size Model IR IN OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 Rc 1/8 VEX NPT 1/8, M5 x 0.8 NPT 1/8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting NPT 1/8, M5 x 0.8 5/32" One-touch fitting ITV 1/4" One-touch fitting JIS Symbol

IR30-OM00013

SU P.

IR10-OM00007

SU P. PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 0050. 2 M Pa M AD E I N J APAN So G No.

Digital Flow Switch (Integrated display type)

-J Dimensions PFM7-(N)01/(N)02/F01 -59No.PF-OMJ0006-J PFM7-(N)01L/(N)02L/F01L -60No.PF-OMJ0006-J PFM7S-(N)01/(N)02/F01 -61No.PF-OMJ0006-J PFM7S-(N)01L/(N)02L/F01L -62No.PF-OMJ0006-J PFM7-F02 -63No.PF-OMJ0006-J PFM7-F02L -64No.PF-OMJ0006-J PFM7S-F02 -65No.PF-OMJ0006-J PFM7S-F02L -66No.PF-OMJ0006-J PFM7-C4/C6/C8/N7 -67No.PF-OMJ0006-J PFM7-C4L/C6L/C8L/N7L -68No.PF-OMJ0006-J PFM7S-C4/C6/C8/N7