Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

ZSE30A(F)/ISE30A

Hysteresis mode Window comparator mode Hysteresis Variable (0 or above) Note 1) 0.6 to 5 V 2.5% F.S. 1 to 5V 2.5% F.S.

Vacuum

J fitlings Inch or metric size tube 77 $uclion lilEn IllZFB $erirs Model Symbol ,/\. < i > ,v 'Flow tale in less than 0-43 PSI (o.o3kgtcm'z) ol the inrtial pressure drop Spdcifications Principal Parts Description Material Body Polyester Cover Transparent nylon Universal ioint Polyester cap i3,6048 (Electroless plalingl Element PVF 'O" rino .

Vacuum

J fitlings Inch or metric size tube 77 $uclion lilEn IllZFB $erirs Model Symbol ,/\. < i > ,v 'Flow tale in less than 0-43 PSI (o.o3kgtcm'z) ol the inrtial pressure drop Spdcifications Principal Parts Description Material Body Polyester Cover Transparent nylon Universal ioint Polyester cap i3,6048 (Electroless plalingl Element PVF 'O" rino .

Digital Flow Switch (Remote type sensor unit)

PFM5-(N)01/(N)02/F01-1/2 -25No.PF-OMJ0016-J PFM5-(N)01L/(N)02L/F01L-1/2 -26No.PF-OMJ0016-J PFM5S-(N)01/(N)02/F01-1/2 -27No.PF-OMJ0016-J PFM5S-(N)01L/(N)02L/F01L-1/2 -28No.PF-OMJ0016-J PFM5-F02-1/2 -29No.PF-OMJ0016-J PFM5-F02L-1/2 -30No.PF-OMJ0016-J PFM5S-F02-1/2 -31No.PF-OMJ0016-J PFM5S-F02L-1/2 -32No.PF-OMJ0016-J PFM5-C/N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N

Common Supply Regulator

/4 53 86.5 30.5 26.5 M38X1.5 31.5 3.5 14.5 37.5 68 37.5 69 37.5 69 AR40M-D 3/81/2 1/8 1/43/8 70 91.5 35.5 35.5 M42X1.5 40.5 0 14.5 42.5 78 42.5 78 42.5 78 Optional specifications Optional specifications Square embedded type pressure gauge Right angle square type pressure gauge Digital pressure switch Bracket mount Panel mountNote 2) Model H J H J H J M N Q R S T U V W Y Z AR20M-D 28 27 28

PFxx-OMJ0005CN

NPN(1 )(15 V) PFM7--CNPN(1 )(420 mA) PFM7--DDC(+) OUT1 DC(-) Max.28 V80 mA 1 V C15 V 1 k D420 mA 600 50 NPN(1 ) PFM7--GDC(+) OUT1 DC(-) Max.28 V80 mA 1 V ()30 ms -18No.PF-OMJ0005CN-I PNP(2 ) PFM7--BDC(+) OUT1 OUT2 DC(-) Max.80 mA 1.5 V PNP(1 )(15 V) PFM7--EPNP(1 )(420 mA) PFM7--FDC(+) OUT1 DC(-) Max.80 mA 1.5 V E15 V 1 k F420 mA 600 50 PNP(1 ) PFM7--HDC(+) OUT1 DC(-) Max.80 mA

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Miniature Regulator Series ARJ210

AV Regulating pressure range AU Ambient and operating temperature range Weight AF Model AR Port size Model IR IN OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 Rc 1/8 VEX NPT 1/8, M5 x 0.8 NPT 1/8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting NPT 1/8, M5 x 0.8 5/32" One-touch fitting ITV 1/4" One-touch fitting JIS Symbol

PFM7

fitting 8 (5/16") one-touch fitting 1/4" one-touch fitting Output specification A B C D E F G H 2 NPN outputs 2 PNP outputs 1 NPN output + Analog (1 to 5 V) 1 NPN output + Analog (4 to 20 mA) 1 PNP output + Analog (1 to 5 V) 1 PNP output + Analog (4 to 20 mA) 1 NPN output + External input Note 3) Piping entry direction Straight Bottom Nil L Different combinations of piping entry directions

Pneumatic Positioner IP300/IP3100

Steel) 4w 1P300.1P3100 DIMENSIONS MODEL 1P300 (Lever Type) l t I I I J J O

IR10-OM00007

-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

IR30-OM00013

-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

Pressure Sensor

(Example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analog output of 5 V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V.) Output impedance R The pressure range in which the Pressure switch satisfies the specifications.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -