Pad Diameter: ø16, Pad Type: Flat w/Groove, Pad Material: Silicone Rubber, Buffer Specifications: Rotating, Stroke: 6mm, Vacuum Inlet: ø2 Tubing, Barb Fitting

Pad Diameter: ø16, Pad Type: Flat w/Groove, Pad Material: Silicone Rubber, Buffer Specifications: Rotating w/Bushing, Stroke: 20mm, Vacuum Inlet: ø2 Tubing, Barb Fitting

Table of Contents

U3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

0.4

Note 1) 25P Note 1) 26P Top entry 20P Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 17 P. 21 P. 25 P. 29 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Note 2) Note 2) Note 2) Note

Air Cylinder Series CM2

MM ND hole H10 Axis d9 NX2 L R2 U2 A H Z (Min.)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Top entry Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable Note 2) Note 2) Note 2)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Top entry Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable Note 2) Note 2) Note 2)

Series VQ Metal Seal/Rubber Seal Body Ported

Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Mechanically Jointed Rodless Cylinder Series MY1

MY1M16/20 Stroke 4 x MM depth M 2 x 2 x B counterbore depth C LD through-hole (LL) L PA U1 LW U3 U2 QW NW PB U6 U4 U5 Q + Stroke PG Detailed figure of U section W U M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) 1 NE LH PP QQ PP QQ RR SS RR SS H NH NC TT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) GA GA 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) (Hexagon socket head

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 Driver type Nil Without cable S Standard cable R Robotic cable (Flexible cable) Nil Without cable 3 3 5 5 A 10 C 20 Compatible driver Power supply voltage [V] Nil Without driver M2 LECYM2-Vl 200 to 230 U2 LECYU2-Vl 200 to 230 25ALEC * When the driver type is selected, the cable is included. Select cable type and cable length. LEC S LEC SS-T !

Electric Actuator/Slider Type

2 Driver type Nil Without cable S Standard cable R Robotic cable (Flexible cable) Nil Without cable 3 3 5 5 A 10 C 20 Compatible driver Power supply voltage [V] Nil Without driver M2 LECYM2-V 200 to 230 U2 LECYU2-V 200 to 230 When the driver type is selected, the cable is included. Select cable type and cable length. !

MY1

MY1M16/20 Stroke (LL) L 4-MM depth M 2 x 2-B counterbore depth C LD through-hole PA U1 LW U3 U2 MX QW NW PB MTS U6 MY U4 U5 CY PG Q + Stroke Detailed figure of U section MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W U M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket

Table of Contents

MY1M16/20 Stroke (LL) L 4-MM depth M 2 x 2-B counterbore depth C LD through-hole PA U1 LW U3 U2 MX QW NW PB MTS U6 MY U4 U5 CY PG Q + Stroke Detailed figure of U section MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W U M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket

VQ5000

U3 U0 U1 U2 D0 D1 D2 D3 D0 D1 D2 12 12 stations F 1 to 12 Manifold is 12 stations max.

42

External pilot supply port Indicator light Connector entry direction D side U side Connector entry direction D side U side D0 D1 D2 D3 Type of connection IP65 compatible U0 U1 U2 U3 Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m F Kit F Kit L Kit L Kit Cable length 0.6 m Cable length 1.5 m Cable length 3 m D0 D1 D2 U0 U1 U2 1 to 12 stations 1 to 12 stations S T Kit (Terminal

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2

Series VQ1000 Body Ported Plug-in Unit: Flip Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

U3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light/surge voltage suppressor