Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

AC Servo Motor Driver (Network card type ）

SIGNALS AND WIRING 3.8 Interfaces 3.8.1 Internal connection diagram POINT Refer to section 13.3.1 for the CN8 connector. driver Servo amplifier (Note 1) 24 V DC CN3 CN3 Forced stop 2 Approximately 6.2 k EM2 20 3 DOCOM LSP 2 13 MBR RA (Note 3) (Note 2) LSN 12 9 INP Approximately 6.2 k 15 ALM DOG 19 RA (Note 3) Approximately 4.3 k TPR1 10 Approximately 4.3 k 1 TPR2 Isolated 5 DICOM CN3 (Note

AC Servo Motor Driver

K to 10 For 5 m/PLS, set constant K to 50 The additional program is not required for the unit setting is PLS.

Compact and Lightweight

ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1

Vacuum Unit Series ZK2

Note 10) Fixed unit: kPa Note 11) When K, Q, R or S is selected, select K for e Combination of Supply Valve and Release Valve.

13

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

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4D 4P Ii) I I NBR NLP-40 Piston packing NLP-SO NLP-63 I: NBR CM-040-16-127 Tube gasket CM-OSO-16-1 28 CM-063-16-129 I Plastic C1AOSO-07-306 C1A040-07-30S Wear ring C1A063-07-307 NBR Cushi9n packing A MC-2S $ I MC-25 NBR . Cushlb!')'p8cking B MC-20 MC-20 "qr .,. Gasket tor GusHi<:>n va 've. NBR CK40-1697 !

REC

9 2 NBR Cushion seal P-10AE P-12E P-16E P-18E @0 1 Resin Wear ring CM-20-07-301A CM-025-07-302A CM-032-07-304A C1A040-07-305A @1 1 NBR Piston gasket 5.79 X 1.02 6.50 X 1.0 8.50 X 1.0 10.4 X 1.0 @2 2 NBR Holder gasket 17.1 X 1.6 22.1 X 1.6 27.6 X 2.4 SO-031-4 @3 Operation Principles 1. In-rush 4.

Direct Solenoid

, VdEIwO' 6.r.rid.-+.smbry iEru<k! c!p, (1) ru&or @$prugd.Err 13,11) hdE bi|Eme$nbr! d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

SX

Specifications Symbol Specifications For SS5X-45S EX322-S001 EX122-SMB1 EX122-STA1 EX122-SSH1 EX122-SPA1 EX122-SUW1 For SS5X-45S Symbol J1 J2 K Q R1 R2 SUNX Corp.: S-LINK System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

Valve Single Unit

Specifications Symbol Specifications For SS5X-45S EX322-S001 EX122-SMB1 EX122-STA1 EX122-SSH1 EX122-SPA1 EX122-SUW1 For SS5X-45S Symbol J1 J2 K Q R1 R2 SUNX Corp.: S-LINK System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

Valve Single Unit

Specifications Symbol Specifications For SS5X-45S EX322-S001 EX122-SMB1 EX122-STA1 EX122-SSH1 EX122-SPA1 EX122-SUW1 For SS5X-45S Symbol J1 J2 K Q R1 R2 SUNX Corp.: S-LINK System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

V100

High pressure type (Metal seal only) (1.0 W) K (1) (0.5 W) Y Low wattage type External pilot type R (2) Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40. Note 3) For the power consumption of AC type, refer to page 4-14-28. Note 4) When two or more symbols are specified, indicate them alphabetically.

LEC-OM071xx

Recommended Noise Filter Noise Filter Selection Main Circuit Power Supply Driver Model LECYU2Recommended Noise Filter Details Model Specifications Leakage Current V5, V7 FN2070-6/07 Single-phase 250V 6A 0.734 mA 230VAC/50Hz [1] Single-phase V8 FN2070-10/07 Single-phase 250V 10A 200 V V9 FN2070-16/07 Single-phase 250V 16A V5, V7, V8 FN258L-7/07 Three-phase 80V 7A 0.5 mA 440VAC/50Hz [2] Three-phase

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-01 AS221F-U01-03 AS221F-U01-05 AS221F-U01-07 AS221F-U01-09 AS221F-U02-03 AS221F-U02-05 AS221F-U02-07 AS221F-U02-09 AS221F-U02-11 AS321F-U02-07 AS321F-U02-09 AS321F-U02-11 AS321F-U03-07 AS321F-U03-09 AS321F-U03-11 AS421F-U04-11 AS421F-U04-13 1 8" 5 32" 20.8 21.1 23.1 23.9 25.3 23.3 24.9 25.2 27.2 33.9 27.8 29.5 31.8 27.8 29.5 31.8 33.6 35.2 7.8 8.9 11.4 13.2 15.2 8.9

Vacuum Ejector Series ZM

(kg) -E 0.21 0.21 0.21 -EL 0.26 0.26 0.26 -M 0.27 0.27 0.27 -ML 0.32 0.32 0.32 Without switch 0.17 0.17 0.17 Model ZM2 ZM4 ZM6 ZM1-J ZM3-J ZM5-J ZM1-K ZM3-K ZM5-K ZM1-A ZM3-A ZM5-A ZM1-B ZM3-B ZM5-B ZM0.24 0.28 0.33 0.34 0.39 0.25 0.29 0.34 0.35 0.4 0.25 0.29 0.34 0.35 0.4 0.26 0.3 0.35 0.36 0.41 P Q 0.24 0.28 0.33 0.34 0.39 -04R/L 0.209 0.214 0.219 0.224 0.229 0.234 0.239 0.244 0.249 0.254

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@