System/Body: Vacuum Pump System, Single Unit, Nozzle Size: Vacuum Pump System, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Sensor/Switch for Vacuum Specs.: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Valves/Switch for Vacuum Conn. Specs.: L-type Plug Connector, Vacuum, V Port: Inch Size, ø1/4" One-touch Fitting, Optional Specs. 1: B+D, Optional Specs

. / N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs, Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual

. / N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Without Pressure Sensor / Digital Pressure Switch for Vacuum, Connector: L3 [L-type Plug Connector - w/o Lead Wire with Connector - w/o Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release

. / N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Digital Pressure Switch for Vacuum / 0 to -101 kPa / NPN 2 Outputs, Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual

. / N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / NPN 1 Output, Connector: With Lead Wire for Switch with Energy Saving Function, Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release Pressure Supply: D [With

. / N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Digital Pressure Switch for Vacuum / -100 to 100 kPa / PNP 2 Outputs, Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual

System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: L3 (L-type Plug Connector), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting)

System: Vacuum Pump System, Single Unit, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: L-type Plug Connector, Vacuum, V Port: Metric Size, ø6 One-touch Fitting, Bracket: -, Pump System PE Port Female Thread: -, Individual Release Pressure Supply: -, Vacuum Break Flow Adjustment: -,

VACUUM GENERATOR, VACUUM EJECTOR, M18, 97 lb

CLS

Hard anodized (125 to 200) $1 Cylinder tube Hard chrome plated (125 to 250) 9-9-11 12 Series CLS Dimensions Basic style (B): CLSB BC CLS125 MODEL SMC BD CHECK FREE LOCK Cylinder With Locking Mechanism Rc BP Unlocking port (Unlocked when pressurized) GC BB BA Plug with breathing hole 2-Rc P Cylinder port 4-J M GA GA Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Cylinder with Lock Series CLS

across flats KA MM BZ GB EA D E V C B W FA AL T A K N N C B F M H BY S + Stroke ZZ + Stroke BW For 180, 200, 250 With rod boot BV e BZ BG BE l f h + l 4 x MA Effective thread depth MB (for holding eyebolt) ZZ1 + l + Stroke (mm) Stroke range (mm) Bore size (mm) A AL B BA BB BC BD BE BG BV BW MB BY BZ BP C D E EA F FA GA GB H K KA N M J MM MA GC 125 140 160 180 200 250 14 35 50 47 145 75 18

Rotary Table/Rack & Pinion Style Series MSQ

EE) YB effective depth YC GB GA EC ED ND 2 x J through JA counter bore depth JB 2 x K Shock absorber BD EF YA 2 WF Position of bottom positioning pin hole DD Note 1 Effective depth FB D NA 2 x JC depth JD BB 2 x P Port DE GD FA FD Effective depth FC GC 0.5 NB NC CB Q H (UU) SD SE BC DF (Through) SF A AA CA BA BA DG S Note 1) This part is not available with 180 specification.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

4H10 578 Series MHSH3 Parallel Style Air Gripper 3-Finger Type Through-hole Type MHSH3-32D to 80D 6 x TA, thread depth TB 3 x UA thread depth 6 UB P .C.D.R P (Finger opening port) 3 x SA through, SB, counterbore depth SC P .C.D.R (Mounting hole) FX CB CA 3 x YA, thread depth YB P .C.D.R 20 20 30 ZB BB BC BA Open EO Closed EC (Open DO) (Closed DC) ZC VA depth VB Q O K L J WA depth WB ZA BD

Table of Contents

SB, counterbore depth SC P .C.D.R (Mounting hole) FX CB CA 3-YA, thread depth YB P .C.D.R MHZ 20 20 MHF 30 K L ZB BB BC BA MHL Open EO Closed EC (Open DO) (Closed DC) ZC VA depth VB O MHR J Q WA depth WB ZA MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com BD NB

Compact Rotary Actuator Series CRQ2

6 i D249 Series CRQ2 Dimensions Size 10/15 3H9 effective depth 2 0.6 TA 30 BU 2 x M5 x 0.8 through (Opposite side 7.6 counterbore depth 4.2) B With double shaft DD W D 2 10 2 x M5 x 0.8 (Port) H Q (US) (UW) BD BC M ab BA BA BB D (AU) Max.

Electric Actuators

mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 Refer to page 303 for acceleration time. 211 Direct Acting Guide 5 Phase Stepper Motor Low Profile Slide Table Type Ball Screw Series LXF Without Motor Brake 8mm/5mm lead How to Order LXFH5 1 S BD

LX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series LXF Without Motor Brake 8mm/5mm lead How to Order LXFH5 1 S BD GD Stroke Proximity switch types Home position switch Lead wire length (m) Model Wiring/ Output type Symbol Contact None Yes (cable length 0.3m) Nil S GN With sensor rail and sensor

LX

mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 Refer to page 303 for acceleration time. 211 Direct Acting Guide 5 Phase Stepper Motor Low Profile Slide Table Type Ball Screw Series LXF Without Motor Brake 8mm/5mm lead How to Order LXFH5 1 S BD

Table of Contents

6.7 3.4 1.7 0.4 0.1 Refer to page 303 for acceleration time. 219 12 Ball Bushing 2 Phase Stepper Motor Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Guide Rod Type Ball Screw Series LXP Without Motor Brake 8mm/5mm lead How to Order Auto switch types LXPB2 1 S BD

Rotary Table/

EE) YB effective depth YC GB GA EC ED ND 2-J through JA depth of counter bore JB 2-K Shock absorber BD EF YA 2 WF Position of bottom positioning pin hole DD Effective depth FB D 2-JC depth JD BB 2-P Piping port NA DE GD FA FD Effective depth FC Q H (UU) GC 0.5 NB NC CB SD SE BC DF (Through) SF A AA CA BA BA DG S Note 1) This part is not available with 180 specification.