EXxx-OMS0026CN

1 byte (2)(EX600-DYB)1 byte (5)SI (EX600-SEN3)4 byte Diagnostic mode 0 (LSB-MSB) 1 Lo byte DYB(1) 07 Byte0 AXA 0 Byte1 Hi byte DYB(2) 07 (0) Byte2 AXA 1 Lo byte 07 (0) Byte3 Hi byte 815 SEN3(5) Byte4 DXB(3) 07 1623 Byte5 07 2431 DXD(4) Byte6 815 Byte7 Padding 8 byte 6 byte Diagnostic mode 0 (MSB-LSB) 1 Hi byte DYB(1) 07 Byte0 AXA 0 Byte1 Lo byte DYB(2) 07 (0) Byte2 AXA 1 Hi byte 07

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

A L6 D L5 M L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

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I V I D U A L SUP S PA C E R VVQ2000-19A (Q2000) EXH B L O C K P L AT E KQPB L A N K I N G P L U G 04 06 03 07 AN200-KM10 S I L E N C E R (EXH P O R T) VVQ2000-R-1-C8 I N D I V I D U A L EXH S PA C E R VVQ2000-57A DIN R A I L M O U N T E D B R A C K E T [-D] Courtesy of Steven Engineering, Inc. !

4/5 Port Solenoid Valve

DC specifications of type D and DO is only available with 12 and 24 VDC.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

A L6 D L5 M L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M5 type U10/32 type Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

AS-FG/ASD-FG

Dimensions Metric size Inch size Model d Weight g D1 D2 L1 L2 L3 Model d Weight g D1 D2 L1 L2 L3 Max. Min. M1 Max. Min.

Compact Manifold Regulator Series ARM5

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.5 MPa Condition: Inlet pressure 0.7 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow rate l/min (ANR) Flow rate l/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Reuse AS-FE Nominal thread size Chamfered dimension D Min.

One-touch Fittings

H1 E Sealant/Gasket Seal Face Seal Gasket Seal H2 M T Release button dimensions X Y Plug: KQ2P Applicable fitting size d [inch] Model D*1 L A Weight [g] A L 1/8 KQ2P-01 5 31.5 18.2 1 5/32 KQ2P-03 6 32 18.7 1 3/16 KQ2P-05 6.8 34 20.7 1 1/4 KQ2P-07 8.5 35 21.7 1 5/16 KQ2P-09 10 39 24.8 2 3/8 KQ2P-11 11.5 43 27.4 3.5 1/2 KQ2P-13 15 45.5 28.5 5 D d Applicable fitting size d *1 D is maximum diameter

Compact and Lightweight

ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1

High Purity Chemical Valve

Dimensions LLCmA-mm-C Stations 4 x Mounting hole for W Y A K D L3 L2 L1 (Max.

Proposals for Energy Saving

Box Type (with Built-in Silencer) B S 07 ZH 06 06 Body Ported Type (without Silencer) D S 07 ZH 01 01 01 EXH port size Note) Nozzle diameter Symbol Size Type One-touch One-touch One-touch One-touch One-touch Threaded Threaded Threaded Threaded 05 07 0.5mm 0.7mm 6 8 10 12 16 06 08 10 12 16 01 02 03 04 10 1.0mm 13 1.3mm 15 1.5mm 18 1.8mm Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 20 2.0mm Maximum

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Purchasing order is available in units of 10 pieces. d D A Part no.

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THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

KJ

(inch) Applicable fitting size d (inch) Model Applicable tubing Weight (g) Note) A M D L KJR01-03 KJR01-07 KJR03-07 5 32 0.9 1.2 1.4 9.3 Note) D: Max. diameter 32 33 19.3 19.4 33.5 1 8 8.4 12.7 1 4 5 32 19.9 12.7 Applicable fitting Bulkhead Union: KJE H (Width across flats) Min. port size Applicable tubing O.D.

VM

VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB Black VM120

LVQ

LVQ20 C A B D (Max.

7ND9071en

-07, ISA 60079-107, ISA 60079-31-2009, ANSI/IEC 60529:2004 Ui 32 V Class I, Div 1, Groups B, C, D; Class II, Div 1, Groups E, F, G; Class III; T4T6, Enclosure type 4X Ex d IIC T4T6 AEx d IIC T4T6 Ex tb IIIC T100 C IP66 AEx tb IIIC T100 C IP66 Japanese Ex-d Certification: ND_E4 II 2 G Ex d IIC T6 Gb II 2 D Ex tb IIIC T80C Db Input: Ui 30 V Output: Ui 30 V, Pmax = device limits itself. 7