LEC-OM02704CN

12 .2 12.1 .2 12.2 .3 12.3 .5 12.3.1 .5 12.3.2 .6 12.4 .7 12.5 .8 12 1 12 12 12.1 12.11(A50) 2(A51) 70% 04575 1000 1000 100 100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15

AC

T[s] = (V/10) X (T2 T1)/(Z) T(s) = (4.8/10) X (12 3.7) = 4 NO NO Increase number of booster regulators (Z) to decrease T.

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

IMPACT BLOW GUN

.*2 Screw-in type Nil Without nozzle 01 Symbol Size Nil Rc3/8 N NPT3/8 F G3/8 50 mm IBG1-12-10-50 02 100 mm IBG1-12-10-100 03 150 mm IBG1-12-10-150 04 300 mm IBG1-12-10-300 11 Long nozzle*1 With S coupler/One-touch fitting 50 mm IBG1-12-10-50S 12 100 mm IBG1-12-10-100S 13 150 mm IBG1-12-10-150S 14 300 mm IBG1-12-10-300S Symbol Applicable tubing O.D. Part no.

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)

ASP

MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 20 10 11,12,13 12 10,11 08,09 1000 10 15 8 500 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 548 Series ASP Speed Controller with Pilot Check Valve with One-touch Fitting Dimensions Applicable tubing O.D. d L2 L3 M D2 L1 T2 L4 H1 (Hexagon width across flats

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

ASP630F 1500 1000 14 Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 20 Flow rate (l/min (ANR)) 10 11,12,13 12 10,11 08,09 1000 10 15 8 500 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-10-2 3 Series ASP

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

4 24 17 28.6 70.3 61.8 ASP630F-04-12S-X369 12 21.7 35.2 49.5 25 21.8 ASP330F-N01-07S-X369 NPT1/8 10-32UNF 12 8 14.2 23.9 31 13.6 38.6 35.2 16.8 1/4 13.2 ASP430F-N02-07S-X369 25.2 34.4 18.3 16.8 ASP430F-N02-09S-X369 5/16 15.2 27.2 36.4 18.4 18.7 17.46 12.7 18.5 48.7 42.4 NPT1/4 ASP430F-N02-11S-X369 3/8 18.5 35.3 44.5 19 20.8 NPT1/8 ASP530F-N03-09S-X369 5/16 15.2 29.7 41.2 18.7 NPT3/8 19 12

XG_-OMV0028

12 18 2 A 16 U 17 21 23 2B 9 10B 11 9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4.

High Vacuum Slit Valve

Precautions 9 to 10 5. Replacement Part List 11 6. Maintenance 12 7. Troubleshooting 12 AttachmentProcedure for Maintenance 13 to 15 1 - SLIT VALVE Safety Instructions C These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

IBV-OMY0015

Designated nozzle: IBG1-12-10: Nozzle length (50, 100, 150, 300) Silencing nozzle: IBG1-12S Set including the designated nozzle and silencing nozzle: IBG1-12-10-S : Nozzle length (50, 100, 150, 300) 4. Impact resistance of the product is 150[m/s2]. Vibration resistance is 30[m/s2]. Avoid applying vibration exceeding the allowable value to the product. Mounting Warning 1.

Slit Valve

10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM,

Parallel Seal Type Slit Valve

For XGTP31 -50336C C016 30D006 100 12(AMP) 6.

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: S (-90 kPa), SUP: 10 (One-touch Fitting ø10), VAC: 12 (One-touch Fitting ø12), EXH: 12 (One-touch Fitting ø12), Accessories: S (w/Standard Bracket, w/Silencer)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 10 (One-touch Fitting ø10), VAC: 12 (One-touch Fitting ø12), EXH: 12 (One-touch Fitting ø12), Accessories: S (w/Standard Bracket, w/Silencer)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: S (-90 kPa), SUP: 10 (One-touch Fitting ø10), VAC: 12 (One-touch Fitting ø12), EXH: 12 (One-touch Fitting ø12), Accessories: S (w/Standard Bracket, w/Silencer)

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -66, Air Consumption Flow Rate(l/min): 162, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø12, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø10, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 162, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø12, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø10, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 196, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø12, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø10, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating