Wedge Cam Operation Provides

Internal Holding Force External Holding Force MHKL2-12C MHKL2-12S 20 15 Holding force (N) Holding force (N) Pressure 0.6MPa 15 Pressure 0.6MPa 10 0.5MPa 0.5MPa 10 F F 0.4MPa 0.4MPa 5 5 0.3MPa 0.3MPa Note) In case of single acting type, the value is for stroke center. 0 0 10 20 30 40 50 10 20 30 40 50 10 20 30 40 50 Holding point L(mm) Holding point L(mm) MHKL2-16S MHKL2-16C External hold

Wedge Cam Operation Gripper Series MHK2

Holding Force MHK2-12C MHK2-12S 20 15 Pressure 0.6MPa Pressure 0.6MPa Holding force N Holding force N 15 10 0.5MPa 0.5MPa 10 0.4MPa 0.4MPa F F 5 5 0.3MPa 0.3MPa Note) In case of single acting type, the value is for stroke center. 0 0 10 20 30 40 50 10 20 30 40 50 1N = 0.2248 lbf = 0.102 kgf 1MPa = 145 psi = 10.2 kgf/cm2 Holding point L mm Holding point L mm MHK2-16S MHK2-16C O.

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8), EXH: 03 (Screw-in Rc 3/8)

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -66, Air Consumption Flow Rate(l/min): 162, Vacuum Port Connecting Port Shape: Rc3/8, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: Rc3/8, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature Range(°C): -5～50, Suction

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Refer to pages 7 to 10.

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: S (-90 kPa), SUP: 10 (One-touch Fitting ø10), VAC: 03 (Screw-in Rc 3/8), EXH: 12 (One-touch Fitting ø12), Accessories: S (w/Standard Bracket, w/Silencer)

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 162, Vacuum Port Connecting Port Shape: Rc3/8, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø10, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 03 (Screw-in Rc 3/8), VAC: 03 (Screw-in Rc 3/8), EXH: 03 (Screw-in Rc 3/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: ø1.8mm, Vacuum Pressure: -48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A, SUP: Screw-in Rc 3/8, VAC: Screw-in Rc 3/8, EXH: Screw-in Rc 3/8, Accessories: w/o Bracket, w/o Silencer

MHK2

16 26 235 MHZ MHK2-25D 25 14 19 33 440 MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed L1 MHF MHK2-16S 16 23 6 14.6 20.6 114 L2 L1 MHK2-20S 20 34 10 16 26 237 MHL L2 Series MHK2 MHK2-25S 25 58 14 19 33 443 Series MHKL2 MHK2-12C 12 12 4 9 13 76 MHR MHK2-16C 16 25 6 14.6 20.6 115 MHK MHK2-20C 20 44 10 16 26 237 MHK2-25C 25 73 14 19 33 443 MHS Series MHKL2/Long Stroke Type Made to

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)

IBV-OMY0015

Designated nozzle: IBG1-12-10: Nozzle length (50, 100, 150, 300) Silencing nozzle: IBG1-12S Set including the designated nozzle and silencing nozzle: IBG1-12-10-S : Nozzle length (50, 100, 150, 300) 4. Impact resistance of the product is 150[m/s2]. Vibration resistance is 30[m/s2]. Avoid applying vibration exceeding the allowable value to the product. Mounting Warning 1.

Slit Valve

10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM,

XG_-OMV0028

ASSY O 0.70.9mm 4-3. 4-4. 4-5. 4-6. 4KPa (1) (2) 9 - (3) (4) (5) 4-7.O ASSYO 5 O O O 4-8. ,, 10 - 5.

High Vacuum Slit Valve

Specifications Opening angle 50mm336mm Working pressure Pa Atmospheric pressure to 10-6 Operating pressure MPa 0.45 to 0.6 Internal leakage amount O-ring material : FKM 6.510-10 Pam3/sec O-ring material : Kalrez 6.510-9 Pam3/sec C O-ring material : FKM 6.510-8 Pam3/sec Internal leakage amount (At negative pressure 0.1MPa or less) O-ring material : Kalrez 6.510-7 Pam3/sec C External leakage

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: Positive Common (or None), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, P, E Port Size (One-touch Fitting): N (ø3/8"), Mounting: D (DIN Rail Mounting, w/DIN Rail), DIN Rail Option: 10 (for 10 Stations

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 9 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: R (External Pilot), P,E Port Size: ø12, Mounting: D (DIN Rail Mounting, w/DIN Rail), DIN Rail Option: 10 (for 10 Stations; Longer Rail

Parallel Seal Type Slit Valve

Maintenance Warning Please refer to the attached Procedure for maintenance. 10 - 7Troubleshooting Status Possible cause Countermeasure Operating pressure is too low Increase pressure to 0.45MPa or more.

Lightweight, point-of-use ZH and ZU series vacuum generators combine design simplicity with high performance. Simply plug an air supply tube in one end, and vacuum is ready at the other end. The slim ZU generators are extra compact. The ZH and ZU immediate response may be quicker than central vacuum systems. Also, these generators are often smaller and lighter than the bulky vacuum lines

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 10 (One-touch Fitting ø10), VAC: 12 (One-touch Fitting ø12), EXH: 12 (One-touch Fitting ø12)