Number of Ports: 2 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 08 (Toggle Lever), Suffix: None

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 08 (Toggle Lever), Suffix: None

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10), Accessories: S (w/Standard Bracket, w/Silencer)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10), Accessories: NS (w/o Standard Bracket, w/Silencer)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: 08 (One-touch Fitting ø8), VAC: 02 (Screw-in Rc 1/4), EXH: 10 (One-touch Fitting ø10)

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 84, Vacuum Port Connecting Port Shape: Rc1/4, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø8, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature Range(°C

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 84, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø10, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø8, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 84, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø10, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø8, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 84, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø10, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø8, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

2-Color Display Digital Flow Switch Series PFM

(kPa) Pressure loss (kPa) 0.8 0.25 0.6 0.20 0.15 0.4 0.10 0.2 0.05 1 2 4 6 8 10 0 5 10 15 20 25 0 Flow rate (l/min) Flow rate (l/min) PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 4 14 12 Pressure loss (kPa) Pressure loss (kPa) 3 10 8 2 6 4 1 2 5 10 20 30 40 50 0 10 20 40 60 80 100 0 Flow rate (l/min) Flow rate (l/min) Flow Characteristics PFM710, 510 / For 10 (l/min) PFM725

0.01

(Nil) IN side connection symbol OUT side connection symbol IN side connection symbol Connection size OUT side connection symbol Connection size C04 C06 C08 C10 C12 02 N02 F02 C04 C06 C08 C10 C12 02 N02 F02 4 6 8 10 12 4 6 8 10 12 Clean One-touch fittings (KP series) Clean One-touch fittings (KP series) Specifications The specifications are the same as the standard models.

Speed Controller: Standard Type Series AS In-line Type

-32 UNF 10-32 UNF AS120-M5-D M5 x 0.8 8 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 A 9 9 4.7 10 31 10.3 0.7 27.4 AS220-N01-SD NPT 1/8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 R 1/8 14.3 14.6 7.2 18 35.6 14.1 1.2 31.6 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 R 1/4 18 19.5 7.2 27.2 40.7 18 1.2 36.7 AS320-N02-SD NPT 1/4 NPT 1/4 AS320-F02-SD G

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Model T2 H D1 T1 D2 D3 L3 L4 L1 L2 9 4.7 10 31 10.3 0.7 27.4 13 AS220-N01-SD NPT 1/8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 14.3 R 1/8 14.6 7.2 18 34.7 13.2 1.2 31.6 33 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 18 R 1/4 19.5 7.2 27.2 40.2 17.5 1.2 36.7 72 AS320-N02-SD NPT 3/8 NPT 1/4 AS320-F02-SD G 3/8 AS320-02-SD Rc 3/8 19 22.5 R 1/4 24.3

PFxx-OMJ0005CN

A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 13 11 17 13 39 17 NPT1/81/4 G1/8 G1/8 G1/4 17 15 21 G1/4 17 43 21 -74No.PF-OMJ0005CN-I (Ar)(CO2) Ar:CO2 92:890:1080:2070:3060:40 10 [F97] Ar 92CO2 8 Ar 90CO2 10 1 Ar 80CO2 20 Ar 70CO2 30 Ar 60CO2 40 2 1[8.2] 2[oFF][F_3] <> [F97] [F97] -75No.PF-OMJ0005CN-I Ar CO2 Vmax lmax 92% 8% 90% 10% PFM710 80% 20% 0.27.0 L/min 0.27.4 L/min 07.4 L/min

2-Color Display Digital Pressure Switch Series ISE70/75/75H

Pressure range Switch 100 kPa 0 0.5 MPa 10 MPa 15 MPa 0.4 MPa 1 MPa 0 1 MPa For 1 MPa (For Air) ISE70 100 kPa (0.1 MPa) 1 MPa For 10 MPa (For General Fluids) 10 MPa 0 ISE75 10 MPa 0.4 MPa For 15 MPa (For General Fluids) 0 15 MPa ISE75H 0.5 MPa 15 MPa The ISE75(H) switch shows zero (0) when the pressure being applied goes below the lower limit of the set pressure range, when the cut-too-zero

ISE70/75/75H

1 2-color Display Digital Pressure Switch Series ISE70/75/75H ZSE ISE PSE Metal Body Type Metal Body Type Metal Body Type (Die-cast aluminum) Z I SE3 10 MPa 15 MPa 10 MPa 15 MPa 1 MPa 1 MPa For General Fluids For General Fluids PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

DIN rail is not suitable for port size F02 (G1/4).

PFxx-OMO0004CN

(0100)() 90 () (0100) ()90ON(OFF) () 10 L/min 10 L ON OFF ON OFF 0 -14No.PF-OMO0004CN-E , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 ripple -15No.PF-OMO0004CN-E AB.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.