VM

roller VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Cross roller plunger Toggle lever VM220-02-08 VM230-02-08 VM-30AR Red VM220-02-30R VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM-32AR Red VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AB Black VM220

SX

(Note that double and 3 position valves cannot be used where single solenoid wiring has been specified.). 26 pins (P) connector 20 pins (PG) connector 10 pins (PH) connector Note Stations Symbol Note Stations Symbol Note Stations Symbol 02 2 stations 02 2 stations 02 2 stations (1) (1) (1) Double wiring specifications Double wiring specifications Double wiring specifications 10 08 04 10 stations

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 14.2 S type: White color L type: Black color 14.2 Applicable tubing diameter N ZF 14.2 Applicable tubing diameter E 14.2 17.2 ZP 17.2 19.95 ZCU 19.95 93.3 58.5 41 10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

V100

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

KR

(mm) Connection thread RC Model N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 47 81 17 1 4 7.5 19.5 31.5 21.5 31 13 13.5 17 10 125 6 108 10 55 73 97 91 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 9 22.5 35.5 24 34.5 15.5 14.7 18.5 86 112 Spatter Cover 3: KRMC (Applicable: FR soft nylon) Weight (g) Applicable tubing O.D. (mm) Model N L A N-applicable tubing O.D.

VM

4N-02 VM1100-4NU-02 VM1010-4N-02 VM1010-4NU-02 VM1110-4N-02 VM1110-4NU-02 VM1000-4N-08 VM1000-4NU-08 VM1100-4N-08 VM1100-4NU-08 VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 VM1000-4N-32R VM1000-4NU-32R VM1100-4N-32R VM1100-4NU-32R VM1010-4N-32R VM1010-4NU-32R VM1110-4N-32R VM1110-4NU-32R VM1000-4N-32B VM1000-4NU-32B VM1100-4N-32B VM1100-4NU-32B VM1010-4N-32B VM1010-4NU-32B VM1110

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

KP/KPQ/KPG

KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1 25.3 32.4 16 25.2 34.4 4 10.4 5/16" 15.2 18.5 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02

SY

(Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN200-02 (Cv = 1.94) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 6 x 1m AS3001F-06 (Cv = 0.36) 10 x

Speed Controller with One-touch Fitting

(9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

VFS

Symbol 02 03 A, B P D Nil D side mounting None 01T, 10 1 4 Rc Rc Rc M Mixed 3 8 1 2 U 01C, 01F U side mounting Stations Symbol Porting specifications (A, B) 02 Passage 2 stations Symbol R1, R2 P 10 10 stations 1 Side 2 Bottom Common Common Base type 01T, 10: 2-10 stations Base type 01C, 01F: 2-8 stations Option Please indicate manifold base type, corresponding valve, and option parts.

KQ2

M5 M6 01 02 03 04 00 04 06 08 10 12 16 99 M5 x 0.8 M6 x 1.0 3.2 4 6 8 10 12 16 4 6 8 10 12 16 Thread connection Tubing (Rod) connection 23 04 06 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 R , Rc R , Rc R , Rc R , Rc 08 10 12 16 Same dia. tubing (Reducer) Different dia. tubing Same dia. rod Model Male connector Hexagon socket head universal male elbow Universal male elbow 45 male elbow Branch union elbow

Flow Control Equipment

AS2301F-02, AS2311F-02 AS2201F-02, AS2211F-02 AS3201F, AS3211F AS4301F, AS4311F AS4201F, AS4211F AS3301F, AS3311F Supply pressure: 0.5MPa Supply pressure: 0.5MPa Supply pressure: 0.5MPa 16 25 6 400 1000 14 10, 12 1500 12 80, 10 20 12 Effective area (mm2) Effective area (mm2) 08 06 Effective area (mm2) 300 10 Flow (l/min(ANR)) Flow (l/min(ANR)) Flow (l/min(ANR)) 06 10 1000 4 15 500 8 04 200

F

KM12-06-02-6 6 99 47 84 6 14 17 10 19.5 31.5 21.5 31 13 13.5 17 7.5 KM12-06-02-10 10 125 73 96 KM12-08-03-6 6 108 55 100 8 38 19 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 9 KM12-08-03-10 10 139 86 117 L5 T N H L3 L4 L6 P Q1 Q2 M L1 F L2 B Port Min Weight Model NPT Hex Inside Dia (g) (Inch Size) 19.5 6 16 16 18 29.5 29 40 12 1/4 87 5/32 10 6 67 KM12-03-35-6 19.5 10 16 16 18 29.5 29 61.5 12 1/

Valve Single Unit

(Note that double and 3 position valves cannot be used where single solenoid wiring has been specified.). 26 pins (P) connector 20 pins (PG) connector 10 pins (PH) connector Note Stations Symbol Note Stations Symbol Note Stations Symbol 02 2 stations 02 2 stations 02 2 stations (1) (1) (1) Double wiring specifications Double wiring specifications Double wiring specifications 10 08 04 10 stations

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1 25.3 32.4 16 25.2 34.4 4 10.4 5/16" 15.2 18.5 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02