Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4"), Accessories: S (w/Standard Bracket, w/Silencer)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4"), Accessories: S (w/Standard Bracket, w/Silencer)

Nozzle Diameter: ø0.5mm, Vacuum Pressure: -48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A, SUP: One-touch Fitting ø1/4", VAC: One-touch Fitting ø1/4", EXH: One-touch Fitting ø1/4", Accessories: w/Standard Bracket, w/Silencer

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 13, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 1/4 (Ø6.35), Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: 1/4 (Ø6.35), Application: Manifolds, Operating Pressure Range(MPa)

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 27, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 1/4 (Ø6.35), Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: 1/4 (Ø6.35), Application: Manifolds, Operating Pressure Range(MPa)

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing Nut Insert bushing LQ1T2A-ST1 2 2-07 LQ1-2N07 LQ1-2B07 Applicable body size 2 2-07 LQ1-2N07 LQ1-2B07 LQ1T2A-ST2 2 Applicable body size 2 2-07 LQ1-2N07 LQ1-2B07 2-07 LQ1-2N07 LQ1-2B07 LQ1T2A-ST3 2 2-07 LQ1-2N07 LQ1-2B07 Applicable body size 2 LQ1T2A-ST4 2 Applicable body size 2 2-07 LQ1-2N07 LQ1-2B07 LQ1T3A-ST1 3 3-11 LQ1-3N11 LQ1-3B11 Applicable body

2

Thread type Nil R N NPT G G INDEX 498 Series AS-FS Needle Valve/Flow-rate Characteristics AS1201FS-M5, AS1211FS-M5 AS2201FS-01, AS2211FS-01 AS2201FS-02, AS2211FS-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 06, 07, 08, 09, 10 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (

Table of Contents

-01 KDM20S-03 KDM20S-07 KDM20P-01 20 KDM20P-03 KDM20P-07 KDM20S-09 KDM20P-09 Clamp bolt Panel mounting Loosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No. 2) until the bracket touches the stop ring.

KJ

-01 KDM20S-03 KDM20S-07 KDM20P-01 20 KDM20P-03 KDM20P-07 KDM20S-09 KDM20P-09 Clamp bolt Panel mounting Loosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No. 2) until the bracket touches the stop ring.

Speed Controller with Indicator

, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Vacuum Unit

For nozzle size 07 to 12, the value is common to the ejectors with valve and without valve. Max.

Air Fittings & Tubing

KDM10S-01 Plug Socket 1 8 5 32 KDM10P-01 KDM10P-03 KDM10P-07 KDM10S-03 KDM10S-07 10 1 4 Red KDM10P-09 KDM10S-09 KDM20S-01 KDM20S-03 KDM20S-07 5 16 1 8 KDM20P-01 5 32 1 4 5 16 KDM20P-07 20 KDM20P-03 KDM20P-09 KDM20S-09 Panel mounting qLoosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No.2) until the bracket touches the stop ring.

Vacuum System Peripherals:

Special specifications M 07 07 When creating the special specifications, complete the stations table on the right. Includes number of blanking plate assembly. w Ejector Valve Model Fill in the blanks below with symbols of necessary specifications.

Compact and Lightweight

ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1

1

Applicable fitting size d (Inch size) Model Applicable fitting size d (Metric size) A L D A L D Model KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 KQ2P-13 KJP-02 KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 d 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 16 18 20.5 22 24 31.5 32 35 39 43 46 5 6 8.5 10 11.5 15 2 3.2 4 6 8 10 12 8.2 16 16 18 20.5 22 24 17 31.5 32 35 39 43 45.5 3 5 6 8 10 12 14 D A L Note

KQ2

P. 71 63 Series KQ2 Male Connector: KQ2H Note) 01-32 KQ2H03-32 07-32 H Connection thread UNF NPT 01-32 KQ2H03-32 07-32 Applicable tubing O.D.

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: N01 (Screw-in NPT 1/8), EXH: 07 (One-touch Fitting ø1/4"), Accessories: NS (w/o Standard Bracket, w/Silencer)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: N01 (Screw-in NPT 1/8), EXH: 07 (One-touch Fitting ø1/4"), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: ø0.7mm, Vacuum Pressure: -48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A, SUP: One-touch Fitting ø1/4", VAC: Screw-in NPT 1/8, EXH: One-touch Fitting ø1/4", Accessories: w/o Standard Bracket, w/Silencer

Nozzle Diameter: ø0.7mm, Vacuum Pressure: -48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A, SUP: One-touch Fitting ø1/4", VAC: Screw-in NPT 1/8, EXH: One-touch Fitting ø1/4", Accessories: w/o Bracket, w/o Silencer