Series IDG

(AFM, AFD) 0.12 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.08 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa Pressure drop MPa Pressure drop MPa 0.10 0.06 0.08 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.06 0.04 0.04 0.02 0.02 0 80 160 240 200 400 600 800 0 Inlet air flow rate l/min (ANR) Inlet air flow rate l/min (ANR) IDG75M, 75V (standard dew point 20C (4F)) IDG75HM, 75HV

Table of Contents

2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

One-touch Fittings

P.53 KQ2W P.54 KQ2E Use to connect tubing through a panel, etc. Bulkhead connector P.54 KQ2E Use to connect a male thread and tubing through a panel, etc. P.53 KQ2T Male branch tee Male connector P.52 KQ2H Use to pipe a female thread in the same direction. Most general model. Use to branch a female thread at both 90 angles.

IDG

state (AMH) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.12 0.12 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.10 0.10 0.08 0.08 0.06 0.06 0.04 0.04 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.02 0.02 100 200 300 400 0 400 800 1200 1600 0 Inlet air flow rate

Membrane Air Dryer

, 75HV2 Element saturated state (AMH) Element initial state (AMH) Element saturated state (AMH) Element initial state (AMH) 0.12 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.12 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.10 0.10 0.08 0.08 0.06 0.06 0.04 0.04 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.02 0.02 0 0 0 1200

AC Servo Motor Driver (Pulse input type/Positioning type ）

PA20]. 0: [AL. 54 Oscillation detection] will occur at oscillation detection. 1: [AL.

Table of Contents

53.5 81.5 48.5 MK(2) 25 76 76.5 54 53.5 81.5 48.5 32 92 92.5 57 56.5 97.5 51.5 RS Q G 40 130 130.5 64 63.5 135.5 58.5 Note) D-F7LF type cannot be mounted on bore size 10.

Battery-less

JXCE1/91/P1/D1/L1/M1 Series LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 How to Order JXC 7 D T 1 Communication protocol E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link M CC-Link For single axis Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 177.)

Modular Type Air Filter Series AF

P1 = 0.7MPa 0.08 0.08 P1 = 0.7MPa P1 = 0.5MPa P1 = 0.3MPa Pressure drop MPa Pressure drop MPa P1 = 0.1MPa P1 = 0.5MPa 0.06 0.06 P1 = 0.1MPa P1 = 0.3MPa 0.04 0.04 Maintenance Warning 1.

Table of Contents

(mm) D1 Note) A Weight (g) 6-applicable tubing D2 P2 L2 L3 M P1 L1 Model L1 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KQ2ZT04-01S 18.5 54.5 50.5 25 31 44 27 33 46 56 54 62 P2 14 KQ2ZT04-02S 10.4 13.4 21 16 13.4 10.4 4 21.5 57.5 51.5 KQ2ZT04-03S 17 23.5 59.5 53.5 L2 P1 P1 D1 KQ2ZT06-01S 18.5 54.5 50.5 14 6 KQ2ZT06-02S 21.5 57.5 51.5 12.8 13.4 22 17 13.4 12.8 KQ2ZT06-03S

Series SV

P1+0.1 293 Q=600XC(P1+0.1) 273+t P2+0.1 If > b, a subsonic flow results. P1+0.1 P2+0.1 2 b P1+0.1 293 Q=600XC (P1+0.1) 1 1 b 273+t 103 Series SV EX500 Decentralized Serial Wiring Flow Characteristics of Solenoid Valve Q : Air flow rate [dm3/min(ANR)]. The dm3 (cubic decimeter) in the SI system may be expressed by L(liter). 1dm3=1L.

Stability of suction position,

At this time, read vacuum pressure P1, obtain the suction flow rate from the flow rate characteristics graph for the ejector that is being used, and render this amount as the leakage of the workpiece.

Air Cylinder Series CM2

Refer to front matters 54 and 55 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions.

AC Servo Motor Driver (CC-Link Type ）

App. 28 APPENDIX LEFB25 LEFB25U LEFB32 LEFB32U LEFB40 LEFB40U Lead symbol S Series Lead 54 Parameter *1,*2 Para.

KQ2

(inch) Connection thread UNF NPT Min. port size Note) D2 L1 P2 Mass (g) A D1 L2 L3 M P1 Model 1 8 1 8 5 32 3 16 KQ2ZT01-34S 9.6 10.4 11.4 53.6 53.6 53.6 54.6 58 59.4 66.1 67.5 70.4 77 77.4 80.6 87.9 91.1 50.5 50.5 50.5 51.5 52.5 54 61 61.5 63.5 71.5 72 73 83 84 15.5 16 16.5 13.4 13.4 13.4 34 34 38 40 46 59 70 80 104 116 116 132 213 228 14.29 14.29 14.29 9.6 10.4 11.4 2.5 3 3.5 17.1 17.6 17.1

AC Servo Motor Driver (CC-Link Type ）

Servo amplifier Servo motor Driver M 4) P1-P2 (For 11kW or more, P1-P) should be connected. Driver Servo amplifier P1 P2 (c) When option and auxiliary equipment are used 1) When regenerative option is used under 3.5kW for 200V class The lead between P terminal and D terminal of CNP2 connector should not be connected.

Modular Type Regulators Series AR

8.5 50 54 70 2.3 35.5 42.5 21 7 8.5 10.5 54 56 50 70 2.3 37 42.5 21 7 AF800 AF900 13 65.8 11 70 66 90 3.2 13 66 65.8 11 70 90 3.2 Note 1) The total length of B dimension is the length when the filter regulator knob is unlocked.

AW

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

Electric Actuator

L1 Main circuit power supply L2 L2 L3 L3 N P1 P2 N Connect between P1 and P2. (Connected at time of shipping.) P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Details P P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

Smooth Cylinder/Low Speed Cylinder

As a guide, when W + P0a>P0A, adjust P1 to make W + P1a = P0A. W: Load (N) P0: Operating pressure (MPa) P1, P2: Reduced pressure (MPa) a: Rod side piston area (mm2) A: Head side piston area (mm2) D-X 1241 Smooth Cylinder Specific Product Precautions 2 Be sure to read before handling.