LEC-OM02704CN

P-D()14.2 2. 14.1 3. 4.8.3 4. 4.10 4 4 4 (3) LECSC-AC100120V ON OFF RA MC MC SK NFB MC CNP1 L1 AC100120V CNP3 (5) U 2 U V 3 L2 V M W 4 N W 1 P1 (1) P2 PE CNP2 P (2) C D (3) CN2 L11 L21 CN6 CN6 DC24V DOCOM EMG (4) DOCOM DICOM (4) ALM RA 1. P1-P2() 2.

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

Table of Contents

(mm) D1 Note) A Weight (g) 6-applicable tubing D2 P2 L2 L3 M P1 L1 Model L1 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KQ2ZT04-01S 18.5 54.5 50.5 25 31 44 27 33 46 56 54 62 P2 14 KQ2ZT04-02S 10.4 13.4 21 16 13.4 10.4 4 21.5 57.5 51.5 KQ2ZT04-03S 17 23.5 59.5 53.5 L2 P1 P1 D1 KQ2ZT06-01S 18.5 54.5 50.5 14 6 KQ2ZT06-02S 21.5 57.5 51.5 12.8 13.4 22 17 13.4 12.8 KQ2ZT06-03S

VFS

or less VFS5300 VFS5310 300 1.16 VFS Exhaust center VFS5400 VFS5410 55 or less 1.14 300 VS4 Pressure center VFS5500 55 or less VFS5510 1.14 VQ7 300 EVS Double check VFS5610 60 or less 1.99 180 VFN Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

30 30 Example 2 20 20 P1 = 0.5 MPa P1 = 0.4 MPa Example 1 10 10 P1 = 0.3 MPa P1 = 0.2 MPa 5 4 5 4 P1 = 0.1 MPa 3 3 2 2 1 1 Glossary of Terms 0.002 0.003 0.02 0.03 0.04 0.004 0.001 0.01 0.1 Pressure differential P [MPa] Graph (2) Flow rate characteristics Example 1) Obtain the pressure difference when 15 [L/min] of water runs through a solenoid valve with a Kv = 1.5 [m3/h].

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Stability of suction position,

ZP3EU-F6-TAL16 [Weight: 249 g] M16 x 1.5 Width across flats 22 Width across flats 24 Width across flats 24 Width across flats 22 M16 x 1.5 Rc1/8 Rc1/8 6 6 19 25 55 6 6 19 30 25 55 32 32 30 4 4 11.11) 11.11) 30 30 (Rotating angle) (Rotating angle) Applicable pad part no. ZP3E-125UM ZP3E-100BM 78.6 93.8 Applicable pad part no.

KJ

(mm) D1 Note) A Weight (g) 6-applicable tubing D2 P2 L2 L3 M P1 L1 Model L1 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KQ2ZT04-01S 18.5 54.5 50.5 25 31 44 27 33 46 56 54 62 P2 14 KQ2ZT04-02S 10.4 13.4 21 16 13.4 10.4 4 21.5 57.5 51.5 KQ2ZT04-03S 17 23.5 59.5 53.5 L2 P1 P1 D1 KQ2ZT06-01S 18.5 54.5 50.5 14 6 KQ2ZT06-02S 21.5 57.5 51.5 12.8 13.4 22 17 13.4 12.8 KQ2ZT06-03S

Ejector Valve Unit Series ZYY/ZYX 1

V B A B A P1 Hysteresis setting trimmer 28.1 Pressure setting trimmer 28.5 25 15.8 8 Accessory (packed together) 1. Silencer (AN203-KM81 pc.) 51 26 16 2.

ZP

62.5 10.3 10.9 10.3 10.9 12.3 13.4 12.3 13.4 36.5 44 55 62.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Y (DC Low Wattage Type (0.5W), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: B (Locking Type), Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.), Air Pressure

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: DC Low Wattage Type (0.5W, Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Locking Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port: ø4,

A

demand = 1000 n/min (N)VBA2, (N)VBA4 C H A R G E C H A R A C T E R I S T I C S NVBA1 C H A R G E C H A R A C T E R I S T I C S Charging time for 10l t(s) Charging time for 10l t(s) Pressure increase ratio (P2/P1) Pressure increase ratio (P2/P1) These graphs illustrate the time required to inrease pressure in a closed tank e.g.

Process Valve

105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 170.1 187.6 210.6 211.5 229 252 55 63 74 Port size: Flange: 32F, 40F, 50F Standard/Vacuum pilot Applicable cable O.D. 6 to 8 (D, DZ) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) E P2 P1 C I (Grommet: G) J (DIN terminal: D, DZ) VNA H H VNB VNB D B (Air operated

Ejector Valve Unit, Series ZYY/ZYX

A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.

Coolant Valve

55 60.5 73 Note) ( ): CE-compliant product (-Q) Threaded Type/Port size: 32A, 40A, 50A Pg9 Applicable cable O.D. 6 to 8 Pilot port 12(P1), 10(P2) Port size: refer to table below F H (Air operated) J (External pilot solenoid) Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P2 P1 E D 32 A K B C Main port 1(A) [Back side 2(B)] Port size: refer to table below