5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

28.5 G 1/2 VQC VQZ SQ 163.3 VFS 3 1 5 64 52.5 VFR 45 27 VQ7 48 48 1/8" (Bleed port) (Double, 3 position: PE port) 1/8" (PE port) 69.5 69.5 2 position double: VFR621 -E, VFR621 -D(Z) 0 1 0 1 3 position closed center: VFR631 -E, VFR631 -D(Z) 3 position exhaust center: VFR641 -E, VFR641 -D(Z) 3 position pressure center: VFR651 -E, VFR651 -D(Z) 0 1 0 1 0 1 0 1 0 1 0 1 196.1 232 Electrical entry

Filter Regulator

D,E,E1,E2,E3,E4,G,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1.

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Regulator

2 37.5 57.5 37.5 58.5 37.5 58.5 AR30-D 1/8 53 86.5 30.5 26.5 26.5 3.5 37.5 63 37.5 64 37.5 64 AR40-D 1/8 70 91.5 35.5 35.5 35.5 42.5 73 42.5 73 42.5 73 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 M421.5 M381.5 AR40-06-D 1/8 75 93 35.5 35.5 35.5 42.5 73 42.5 73 42.5 73 AR50-D 1/8 90 125 43 45 45 42.5 82.5 42.5 82.5 42.5 82.5 AR60-D 1/8 95 155 45 45 45 42.5 82.5 42.5 82.5 42.5 82.5 3/4 M421.5 3/4, 1 1

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

PFxx-OMA1007

Product name Parts number Note Y200T-2-D For body size 20 Y300T-2-D For body size 30 Spacer with bracket Y400T-1-D For body size 40 Y600T-2-D For body size 60 E200-##-D 1 For body size 20 E300-##-D 1 For body size 30 Piping adapter E400-##-D 1 For body size 40 E600-##-D 1 For body size 60 Wireless adapter EXW1-A11N-X1 For wireless system M12 connector cable (320 mm) 2 EXA1-AC1 For wiring

Common Supply Regulator

Standard Specifications AR40M-D AR20M-D AR30M-D Model IN OUT IN OUT IN OUT 1/8 1/8 1/8 1/4 1/4 1/4 1/4 Port size 1/4 3/8 1/4 3/8 3/8 1/4 1/2 3/8 Pressure gauge port size Note 1) 1/8 1.5 MPa -5 to 60C (No freezing) Air Fluid Ambient and fluid temperature Note 2) Proof pressure 1.0 MPa Max. operatin pressure Without backflow function 0.05 to 0.85 MPa Set pressure range With backflow function

Cylinder

L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIOd, H B C I NTP.()06 I 6 M3XQ.5 1.8 5,5 6,' SNP.oo6 6 Ml0X1.0 3 I. 16.2 _ ~.c1D. '1.0 Mt2X1.0 3 17 19,6 I NTP.()10 10' . M4 X0;7 2.4 , "la.tV NTP.()15 15 M5XO.a I 3,2 I 8 9.2 L.

E-ITV-STD-RF-A

Avoi d carel ess di sassem bl y or rem oval of part s, as t hi s can l ead t o m al f unct i on. 3 CAU TI O N Take t he f ol l ow i ng st eps t o avoi d m al f unct i on due t o noi se. 1) I nst al l a l i ne f i l t er et c. t o t he AC pow er l i ne t o reduce / el i m i nat e pow er suppl y noi se. 2) Avoi d m al f unct i on due t o noi se by i nst al l i ng t hi s product and i t s w

EXxx-OMW0014CN

5 ,) (XD2) . 3-7 EX245-SPN3A 7/8 (5 ) 18 No.EX-OMW0014CN-A PROFINET 1/2 1 TX 2 RX (XF1/XF2) . 3-8 EX245-SPN1A (SCRJ) 1(XF1) 2(XF2) MDI MDI-X 1 TD++ RD++ 2 TD-RD-3 RD++ TD++ 4 5 6 RD-TD-(XF1/XF2) 7 8 . 3-9 EX245-SPN2A (RJ45) 1(XF1) 2(XF2) MDI MDI-X 1 TD++ RD++ 2 RD++ TD++ 3 TD-RD-4 RD-TD-M12(4 ,,D code) (XF1/XF2) . 3-10 EX245-SPN3A M12(4 ,,D code) 19 No.EX-OMW0014CN-A EX245-SPN2A/EX245

ITV_P-E

Power cable 1 Brown Power supply Vcc 2 White NC 3 Blue GND 4 Black Monitor output Signal cable 1 Brown Input signal 1 2 White Input signal 2 3 Blue Input signal 3 4 Black Input signal 4 5 Gray Common Common is no polarity.

Model: Y24 (Applicable Model: AC20*-B), Thread: F (G), Port Size: 01 (1/8)

Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: 0.05 to 0.7 MPa, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape spacer: None, Compatible Model: AC20□-B, Piping connection port diameter: G 1/

Micro Mechanical Valve Series VM1000

Black Rc 01 1 8 NPT N01 1 8 G F01 1 8 Green Y Yellow Body option 1 0 External pilot type Internal pilot type Twist selector (2 position) Key selector (2 position) Note 1) When selecting the flush type, it is not necessary to select the suffix for the actuator.

Precision Regulator

. 0.8 MPa 2 AP100 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Bracket, name plate reverse mounted R Connection NPT 1/8 IR2000 series N01 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 IR1000 series

Process Pump

(Inch) 1/8" x 0.086" 1/8" 1/8" x 1/16" 3/16" 3/16" x 1/8" 1/2" 1/2" x 3/8" 3/8" 3/8" x 1/4" 1/4" 1/4" x 5/32" Refer to Best Pneumatics No. 7 for further details. 13 Series PB Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers.

Precision Regulator Series IR1000/2000/3000

IR3000 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Pressure gauge reverse mounted R Connection NPT 1/8 N01 Series IR2000 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 Series IR1000 Modular and Accessory Combinations

EXxx-OMU0020CN

Diagnostics type 1 . 5-1 Diagnostics type 1 Byte 0 General diagnostics 1 1 General diagnostics 2 2 Valve diagnostics 1 3 Valve diagnostics 2 5.1.1.1.

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Default: Gain 9 Bit Bit 3, 2, 1, 0 Value Bit 3 2 1 0 Setting 0 0 0 0 Gain 0 0 0 0 1 Gain 1 0 0 1 0 Gain 2 0 0 1 1 Gain 3 0 1 0 0 Gain 4 0 1 0 1 Gain 5 0 1 1 0 Gain 6 0 1 1 1 Gain 7 1 0 0 0 Gain 8 1 0 0 1 Gain 9 * 1 0 1 0 Gain A 1 0 1 1 Gain B 1 1 0 0 Gain C 1 1 0 1 Gain D 1 1 1 0 Gain E 1 1 1 1 Gain F * indicates the initial shipping value. 16 - Parameter index 0x43 Parameter name Sensitivity