Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

-4/6 Weight (g) 2.5 3.7 Effective area (mm2) 2.1 4.0 Model L B D E F MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 6.5 8.5 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 B Model L A C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width

Pin Cylinders Series CJP2/CJP

Mounting dimensions of CJ-5H-6. ( ) denotes the dimensions of CJ5H-4.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

) M-5-4-P01 Cap nut C3604 (With electroless nickel plated) M-01H-6, M-5H-6 M-5HL-6, M-5HLH-6 M-5-6-P01 200

CJP

Mounting dimensions of CJ-5H-6. ( ) denotes the dimensions of CJ-5H-4. Rod end nut (Refer to page 6-2-13.)

CJP

Mounting dimensions of CJ-5H-6. ( ) denotes the dimensions of CJ-5H-4. Rod end nut (Refer to page 6-2-13.)

HRX-OM-K003

/min) (At 40L/min) Pump capacity (50Hz/60Hz) *3 MPa (58 / 87 [PSIG] (65 / 94 [PSIG] (58 / 87 [PSIG] (58 / 87 [PSIG] At 1.1 [gal/min]) At 7.9 [gal/min]) At10.6 [gal/min]) At10.6 [gal/min]) 2 to 16 8 to 50 Circulating fluid flow rate display range L/min (0.5 to 4.2 (2.1 to 13.2 gal/min) [gal/min]) Operating range of circulating fluid flow rate *4 [L/min] 3 to 16 (0.8 to 9 to 50 4.2[gal/min]

CQ2

X 45 l X 50 l X 55 l X 60 l X 65 l X 100 l X 125 l X 150 l 8 X 110 l X 135 l M10 X 65l X 70l X 75l X 80l X 85l X 90l X 95l M5 X 40l M5 X 45l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l 15 10.5 7.5 X 100 l X 105 l X 130 l X 155 l M10 X 75l M5 X 40l X 115 l X 140 l X 80l X 85l X 90l X 95l X 45 l X 50 l X 55 l

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed. 

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed. 

JXCx-OMT0023

Position control mode Internal speed control mode PD12 *DI5-2 Input signal device selection 5H (CN1-7) 0808h Refer to Any input signal can be assigned to the CN1-7 pin. The devices that can be assigned and the setting method are the same as in parameter No. PD03. the name and function field. Select th e Internal torque control mode Positioning mode input dev ice of the CN17 pin.

KJ

-4/-6 Effective area (mm2) Weight (g) A B C D E H Model M-5H-4 M-5H-6 7 8 2.1 4.0 2.7 3.9 15.5 16.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 M5 x 0.8 Width across flats 7 15-2-57 5 Series M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 M5 x 0.8 Hose Elbow: M-5HLH-4/-6 Width across flats

KR

-4/6 Weight (g) 2.5 3.7 Effective area (mm2) 2.1 4.0 F E Model L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 7 8 7 8 1.8 2.5 M5 x 0.8 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 Model L A lB C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 M5 x 0.8 Universal Elbow: MS-5UL Universal

Stainless Steel One-touch Fittings Series KG

C A MS-5ALHU-3 MS-5ALHU-4 4.5 5.0 11.8 12.6 1.1 1.4 3.0 3.1 1.6 1.8 8 8.8 10.8 2.5 14.6 2.4 3.7 MS-5ALHU-6 7.0 MS-5ALHU-6 Hose nipple: MS-5H-4, -6 Effective orifice(mm 2) Weight (g) F E Part No. L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 2.1 4.0 2.5 3.7 7 8 7 8 1.8 2.5 Hose elbow: MS-5HLH-4, -6 B Effective orifice(mm 2) Weight (g) Part No.

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B Effective orifice(mm2 Weight (g) ) E H M-5H-4 M-5H-6 15.5 16.5 8.5 9.5 7 8 1.8 2.5 7 8 2.1 4.0 2.7 3.9 6.5 8.5 91 Series M Miniature Fittings M3, R(PT) 1/8, M5 Series M5 Hose elbow: M-5HL-4, -6 Part No. Effective orifice(mm2 Weight (g) ) F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.4 2.4 4.4 5.2 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 Hose elbow: M-5HLH-4, -6 Part No.

HRX-OM-M090

HRS Series 5.7 Run timer, stop timer function 5-15 HRX-OM-M090 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after 3hours Now 1H 2H 3H 4H 5H 6H 7H 8H Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after 2

HRX-OM-W058

HRS-R Series 5.7 Run timer, stop timer function 5-15 HRX-OM-W058 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after Now 1H 2H 3H 4H 5H 6H 7H 8H 3hours Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after

HRX-OM-X027

HRS-R Series 5.7 Run timer, stop timer function 5-15 HRX-OM-X027 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after Now 1H 2H 3H 4H 5H 6H 7H 8H 3hours Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after

HRX-OM-R016

HRS Series 5.7 Run timer, stop timer function 5-15 HRX-OM-R016 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after 3hours Now 1H 2H 3H 4H 5H 6H 7H 8H Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after 2

HRX-OM-W038

HRS Series 5.7 Run timer, stop timer function 5-15 HRX-OM-W038 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after 3hours Now 1H 2H 3H 4H 5H 6H 7H 8H Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after 2

HRX-OM-O021

HRS Series 5.7 Run timer, stop timer function 5-15 HRX-OM-O021 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after 3hours Now 1H 2H 3H 4H 5H 6H 7H 8H Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after 2