Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21 ARP30-02BE1 Construction Bleed type Weight (kg) Note 4) 0.2 0.5 0.3 Note 1) When a product with backflow function (ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure. Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Port thread is not provided for products with square embedded-type pressure gauges.
A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG
XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
It can damage the pressure gauge. 1099 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 2 10 21 10 21 Be sure to read this before handling. Refer to page 1382 for Safety Instructions. Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.
It can damage the pressure gauge. 1099 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 2 10 21 10 21 Be sure to read this before handling. Refer to page 1382 for Safety Instructions. Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.
AW30K/40K Note) The flow direction can be changed by taking off the check valve assembly, and replacing it with the square embedded gauge, pressure gauge adaptor assembly and plug assembly. 422 AW60(K) Exploded View 4 Mounting screws (4 pcs) Stem assembly (Convex) Actuators Modular F.R.L.
AR20K AR25K to 40K (-06) AR50K, 60K Body Bonnet Platinum silver Black Zinc die-cast Aluminum die-cast Aluminum die-cast Polyacetal 1 2 Replacement parts Part no. Material Description No.
AW30K/40K Note) The flow direction can be changed by taking off the check valve assembly, and replacing it with the square embedded gauge, pressure gauge adaptor assembly and plug assembly. 422 AW60(K) Exploded View 4 Mounting screws (4 pcs) Stem assembly (Convex) Actuators Modular F.R.L.
VAC 110 VAC 200 VAC 230 VAC DIN terminal (With surge voltage suppressor) 48 VAC 2G 2H 2V 2J 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 2K 2L 100 VAC 110 VAC 200 VAC 230 VAC 2M 2N 2P 2Q 2R 2S Conduit terminal (With surge voltage suppressor) 48 VAC 220 VAC 240 VAC 2W 24 VAC 12 VDC 24 VDC 2T 3A 3B 3C 3D 3E 3F 100 VAC 110 VAC 200 VAC 230 VAC DIN terminal (With surge voltage suppressor) 48 VAC 3G 3H
Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. The XLFV valves are single-acting, normally closed.
Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. The XLFV valves are single-acting, normally closed.
Bore size (mm) 23 25 26 27 28 Retaining plate gasket Wiper ring Rod seal Piston seal Valve seal Tube gasket NLP-125A CS1Q125A-PS SFR-36K 125 P7 C120 G55 PNY-36 NLP-140A CS1Q140A-PS SFR-36K 140 P7 C135 G55 PNY-36 NLP-160A CS1Q160A-PS SFR-40K 160 P7 C155 G55 PNY-40 6-9-6 7 Air Cylinder: With Auto Switch Double Acting, Single Rod Series CDS1 125, 140, 160, 180, 200 How to Order CJ1 CDS1 L 300
iable x43O'X440 .ot avai able wirh AW10 and AW20 NoreJ AWl0 @mes wth a rrack llow medranEm 6 a sla.dad lealure f the set pressure E below o 15MPa back iow may nol occur When a back f,tu m6hmm is requred wrlh a set p$ure or e$ thm 0l5l Pa Optional specif ications NPT AW10 AW20 (K) to 40 Nole 1) Dra n glide s NPT 1i4 (appr @ble to AVJ3oK and 40K), an'i lhe exhaust portlofauto d@ n cmes w lh
Applicable shaft types: Y CRB2 a1 1.5 L1 (mm) CRBU2 Y Size N1 10 1 to 14 CRB1 15 1.5 to 18 (mm) Y = Y = 20 N1 a1 L1 1.5 to 20 Size MSU Size: 10 to 30 Size: 40 0 -0.025 20 30 6.8 10 2h 2 to 22 CRJ 0 -0.025 30 40 9.2 14 3h 18 to 30 CRA1 Symbol: A48 Shorten the long shaft. Symbol: A52 Shorten the short shaft.
DIN terminal (With surge voltage suppressor) VXD XL Lead wire length XL1 XL2 XL3 XL4 600 mm 1000 mm 1500 mm 3000 mm Conduit terminal (With surge voltage suppressor) 3A 3B 3C 3D 3E 3F 3G 3H 3V 3J 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC DIN terminal (With surge voltage suppressor) Enter symbols in the order below when ordering a combination of electrical
Applicable shaft types: J, K, T a1 1.5 L1 N1 (mm) Size N1 a1 L1 0 0.025 20 6.8 10 2h 0 0.025 30 9.2 14 3h Double shaft Symbol: A39 Symbol: A40 Applicable to single vane type only Shaft with through hole (Additional machining of S, Y shaft) Not available for size 10. Minimum machining diameter for d1 is 0.1mm. A parallel keyway is used on the long shaft for size 40.
Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3 M5 Mounting Actuator classification N: T-nut mounting L: T-bracket mounting Series LTF (Incremental encoder) H Applicable actuators Compatible actuator models LTF6ELTF8FLTF6E-K LTF8F-K Symbol 2H 3H
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series LTF (Incremental encoder) H Applicable actuators Compatible actuator models LTF6ELTF8FLTF6E-K LTF8F-K Symbol 2H 3H 2V 3V Motor capacity 100W 200W 100W 200W 1) 1) 2) 2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller