HRX-OM-T002

2-2 Names of the parts (This drawing shows HRS090-A-20.)

HRX-OM-R026

. 2-2 Names of each part Table 2-1 Accessory list 2pcs. 1 Alarm cord list label (English 1pc.

HRX-OM-W032

Press the 2 sec.

HRX-OM-M090

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-W058

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermo-chiller.

HRX-OM-R016

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-R005

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-R005 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list (2) (4) 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-W038

2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-X027

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermo-chiller.

HRX-OM-O021

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-O021 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

1

Function 2-Hexagon socket head set screw H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.)

Bernoulli Gripper

4 0.1 [MPa] 2 1 2 0 0 0 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 1 1.5 0.5 2 2.5 3 Distance from the workpiece [mm] ZNC60m ZNC80m 30 70 0.5 [MPa] 0.5 [MPa] 60 25 0.4 [MPa] 0.4 [MPa] 50 Lifting force [N] Lifting force [N] 20 0.3 [MPa] 0.3 [MPa] 40 15 0.2 [MPa] 0.2 [MPa] 30 0.1 [MPa] 0.1 [MPa] 10 20 5 10 0 0 0 3 2.5 2 1.5 1

IZT40/41/42

2 Made to order e page 19 Since input/output function cannot be used, specify Nil when the AC adapter is being used. Number of high-voltage cable holders Recommended piping port size for IZT4 Symbol IZT40 IZT41 IZT42 Straight Elbow Straight Elbow Straight Elbow 1 1 1 1 1 2 2 2 2 1 2 1 4 2 3 3 1 3 1 6 2 One-touch fitting symbol Applicable tubing O.D.

Cylinder

to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !

CJP

class Thread tolerance With thread/Without thread Rod end thread Panel mounting Plug mounting Mounting method Mounting nut (2) Mounting nut (1) Standard accessories Hose nipple (1) Gasket (1) Rod end nut (2) Rod end nut (2) Provided to the model with rod end nut.

Hydraulic Filters

Suction filter with case EM820-*1*2 EM530-*1*2 2 104 x l177 EM920-*1*2 EM630-*1*2 2 1/2 132 x l212 EM030-*1*2 EM730-*1*2 3 132 x l212 EM130-*1*2 EM830-*1*2 3 1/2, 4 155 x l193 EM220-*1*2 1/2, 3/4, 1 69 x l88 FHG (Refer to P. 11.) Suction guard EM320-*1*2 1 1/4, 1 1/2, 2 89 x l123 EM420-*1*2 2 1/2, 3 109 x l188 EM040-*1*2 3/8, 1/2 53.1 x l90 FH34 FH44 FH54 FH64 (Refer to P. 15.)

Suction Guard (Produced upon receipt of order) FHG Series

1 1/4B to 2B CW-5H-W Phosphoric ester CW-5H-V PAT.

FGX-OM-R008

Dimensions 1) SFE11 Gasket 2) SFE42/52/53/73 Dimensions: SFE42/52/53/73 Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 3) SFE3A -6- 4) SFE4B/5C/7D Dimensions: SFE4B/5C/7D Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 5) SFE3F Applicable tube O.D. 4 6) SFE4G/5H/7J Applicable tube O.D.

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 17.2 10.2 3.6 3.6 XLAV-25-2 46 21.4 10.2 3.6 3.6 XLAV-40-2 54.5 33.9 10.2 3.6 3.6 XLAV-50-2 61 38.2 10.2 3.6 3.6 XLAV-63-2 80.5 43.8 12 4 2 XLAV-80-2 90.5 59.8 12 4 2 6 A Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16