Air preparation filter

Assembly and replacement procedure Nominal No. of the tool Body size Bolt Auto drain Lock nut Nominal size Size Width across flats 70D 6 M8 24 80D 8 M10 90D 7-1. Bracket assembly A) Mount the bracket to the product. B) Mount a washer to the 2 mounting bolts respectively, and hold the bracket to the product. Tightening torque is 6.2Nm for 70D, and 12.5 Nm for 80D and 90D.

A

MHS3-50D 4 52H9 0~0.074 2 4H9 0~0.03 4 7 MHS3-63D 5 65H9 0~0.074 2.5 5H9 0~0.03 5 7.5 MHS3-80D 6 82H9 0~0.087 3 6H9 0~0.03 6 9 (mm) Courtesy of Steven Engineering, Inc. !

CATALOG

2 4H9 0~0.03 4 8 NOTE) FOR MHS2 AND MHS4 DIMENSIONS AND MORE TECHNICAL INFORMATION, REFER TO CAT:E246 MHS3-50D 4 52H9 0~0.074 2 4H9 0~0.03 4 7 MHS3-63D 5 65H9 0~0.074 2.5 5H9 0~0.03 5 7.5 MHS3-80D 6 82H9 0~0.087 3 6H9 0~0.03 6 9 (mm) Courtesy of Steven Engineering, Inc. !

CNA

(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 To order the mounting brackets separately, use the part number shown above.

CA2

(Example) 40D-A3C-4 50D-A3C-5 63D-A3C-6 80D-A3C-8 100D-A3C-10 When other brackets are ordered separately, order by the above part numbers. Stainless steel mounting screw kit A set of stainless steel mounting screws (with set screws) described below is available and can be used as required by the operating environment.

CNA

(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 To order the mounting brackets separately, use the part number shown above.

JXCx-OMT0005CN

=13880h 4Byte = 80h 5Byte = 38h 6Byte = 01h 7Byte = 00h 4 5 6 7 Byte8,9 Byte 1[mm/s] *5 300[mm/s]300d=012Ch 8Byte = 2Ch 9Byte = 01h 8 9 *5 21(P.85 35 - Byte10,11: Byte 10 1[%] *5 11 Byte12-15 Byte 12 0.01[mm] *5 800.00[mm]80d=13880h 12Byte = 80h 13Byte = 38h 14Byte = 01h 15Byte = 00h 13 14 15 Byte16-19 Byte 16 1 10 3 *5 1 1234 17 2 1 2 0 18 3 3 0 0 4 0 0 0 * 16.2.P.65

CL

Example) 40D-A3C-4, 50D-A3C-5, 63D-A3C-6, 80D-A3C-8, 100D-A3C-10 To order the mounting brackets separately, use the part number shown above.

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

XM, XY

Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.

XLAQ/XLDQ

0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.