XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

XLA- ∗ -F7NJ ∗ - ∗ Series

-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

XL-OMV0005

Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

XM, XY

Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.

XLAQ/XLDQ

0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

MNB

MLGC 40 50 63 80 100 MNB 40D-UA MNB 50D-UA CNG P 0.3 MPa MNB 63D-UA Piston rod assembly MNB 80D-UA MNB MNB100D-UA CNA 2. How to replace lock unit 1) Loosen the tie-rod nuts (4 pcs.) on the cylinder head cover side by using a hexagon wrench. For the applicable hexagon wrench, refer to the table below.

MNB

Bore size (mm) 40 50 63 80 100 Lock unit order number MNB 40D-UA MNB 50D-UA P0.3MPa Piston rod assembly P0.3MPa MNB 63D-UA MNB 80D-UA MNB100D-UA 2. Replacement of lock units. 1) Loosen the tie-rod nuts (4pcs.) on the cylinder head cover using a hexagon wrench. Refer to the table below for the applicable hexagon wrench.

Toggle Type Air Gripper

Auto switch mounting screw Hysteresis Auto switch Auto switch reset position (OFF) Auto switch operating position (ON) Tightening torque of auto switch mounting screw (Nm) Air gripper model Hysteresis degree (Max. value) MHT2-32D MHT2-40D MHT2-50D MHT2-63D Auto switch model Tightening torque D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) 3 0.05 to 0.15 3 3 0.10 to 0.20 3 651 A Series MHT2 In addition

Size, Body, Valve Type: 63D (Size: 3; Body Mat'l: C37; Port Size: 3/8; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: J (110VAC); DIN Terminal w/Surge Voltage Suppressor)

Size, Body, Valve Type: 63D (Size: 3; Body Mat'l: C37; Port Size: 3/8; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: D (Oil-free, G Thread), Bracket Interchangeable w/Old Type: XB (Yes)

Size, Body, Valve Type: 63D (Size: 3; Body Mat'l: C37; Port Size: 3/8; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2A (24VDC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: Rc, Bracket Interchangeable w/Old Type: XB (Yes)

Size, Body, Valve Type: 63D (Size: 3; Body Mat'l: C37; Port Size: 3/8; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2A (24VDC; DIN Terminal w/Surge Voltage Suppressor & Light)

Size, Body, Valve Type: 63D (Size: 3; Body Mat'l: C37; Port Size: 3/8; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size, Body, Valve Type: 63D (Size: 3; Body Mat'l: C37; Port Size: 3/8; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2C (110VAC; DIN Terminal w/Surge Voltage Suppressor & Light), Other Options: Rc, Bracket Interchangeable w/Old Type: XB (Yes)

Size, Body, Valve Type: 63D (Size: 3; Body Mat'l: C37; Port Size: 3/8; Orifice Dia: 5, N.O.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2M (110VAC; Conduit Terminal w/Surge Voltage Suppressor & Light), Other Options: Rc, Bracket Interchangeable w/Old Type: XB (Yes)