RQ

Example) Bolt M5 x 50l 4 pcs.

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Table of Contents

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Electric Actuators

Suction at both ends. 50l/min (ANR) 100l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 106 Made to Order/Clean Room Specification Series LJ1H20 Dimensions/LJ1H202 (X60) Scale: 15% When two dimensions are shown, the top dimension is for 100 to 600mm strokes, and the

LJ1H

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Hydraulic

Example: M5 x 50l 4pcs.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Compact Cylinder with Air Cushion Series RQ

Example) Bolt M5 x 50l 4pcs.

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 1.59111 lb

Please contact us for the latest version.sales@ocaire.com XLA HIGH VACUUM VALVE. BONNEY ASSY XLA-63D-M9//. VACUUM SERIES. XLA NO SIZE RATING. 5.51155 lb. 21.

Please contact us for the latest version.sales@ocaire.com XLA HIGH VACUUM VALVE. XLA NO SIZE RATING. VACUUM SERIES. XLA NO SIZE RATING. 21.

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0242 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 6.94455 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 3.21874 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 2.87308 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.21082 lb

VACUUM VALVE, 21, XLA NO SIZE RATING, .00000 lb

XLA NO SIZE RATING, .00000 lb