smcmaintenancepartslist

Recommended length Part No. st + 118 0 2 st + 145 0 2 st + 174 0 2 st + 221 0 2 st + 272 0 2 st + 305 0 2 st + 352 0 2 st + 106 0 2 st + 125 0 2 st + 146 0 2 st + 189 0 2 st + 236 0 2 st + 270 0 2 st + 316 0 2 MY3A16-16B-st MY3A20-16B-st MY3A25-16B-st MY3A32-16B-st MY3A40-16B-st MY3A50-16B-st MY3A63-16B-st MY3B16-16B-st MY3B20-16B-st MY3B25-16B-st MY3B32-16B-st MY3B40-16B-st MY3B50-16B-st

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

CA2

2) n = 2, 4, 6, 8 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 75 + 50(n 2) n = 2, 4, 6, 8 80 + 50(n 2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4, 6, 8 Different sides D-A44C With n Same side 10 75 80 90 1 2 (Different sides and same side) With 1 85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W 15 + 40 (n 2) 2 n = 2, 4, 6, 8 80 + 40 (n 4) 2 n = 4, 8, 12, 16

CL

1/2 8 11 11 13 16 With rod boot CLAL40SCLA40, #2 (#1+#2+#11) CLAL50SCLA50, #2 (#1+#2+#11) CLAL63SCLA63, #2 (#1+#2+#11) CLAL80SCLA80, #2 (#1+#2+#11) CLAL100SCLA100, #2 (#1+#2+#11) Without rod boot Bore (mm) l 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke Y h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14.0 e 43 52 52 65 65 ZZ 244 266 290 339 358 H 51 58 58 71 72 ZZ 252 274 298 348 367 40

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

M5 x 0.8 (Relief port) 2 x 2 x 6.5 counterbore M4 x 0.7 effective depth 8 (Piping port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 38 2 x 3.5 through 8 29 20 0.5 Flat washer 6 10 4 4 20 27 + Stroke 3.5 29 30.5 + Stroke 20 2 x 2 x 9 counterbore M5 x 0.8 effective depth 7 18 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 5.5 2 x 2 x M6 x 1.0 effective depth 10 Note 3) 2 x 5.4 through

I

from the VY Valve. 02 14 2.0 3 03 38 3.3 body Ported Type 04 12 3.9 Terminal Designations are as follows: 04 12 7.2 5 06 34 8.9 1 = 24v Power Supply 2 = Control Signal 3 = Common Negative for both power and signal. 10 1 10 5% 2% + -2% 7 10 1 114 17 12 114 18 9 14 112 2 33 20 2 37 Courtesy of Steven Engineering, Inc. !

Cylinder with Lock

4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 10 D-A5m D-A6m n 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 10 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 20 15 D-A59W n 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 25 20 D-F5NTL n 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 20 + 55 (n 2) 2 (n = 2, 4, 6,

1

With X417 (2 pcs.)

Compact and Lightweight

Applicable model Stations Contents2 Screw Accessories ZH2-TB101-A 1 M3 x 20 2 pcs. ZH2-TB102-A 2 M3 x 35 2 pcs. Hexagon nut (M3) 2 pcs. ZH05DA ZH07DA ZH10DA ZH2-TB103-A 3 M3 x 50 2 pcs. ZH2-TB104-A 4 M3 x 65 2 pcs. Flat washer (for M3) 2 pcs. ZH2-TB106-A 6 M3 x 95 2 pcs. ZH2-TB108-A 8 M3 x 125 2 pcs. ZH2-TB201-A 1 M4 x 30 2 pcs. ZH2-TB202-A 2 M4 x 50 2 pcs.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS-14AB 5 147 2 AS-15AB 7 191 2 AS-16AB 9 236 2 AS-17AB AS-25A Threaded stud kit for manifold AS-9AB 1 set (Adapter for manifold mounting is included.) 3 111 2 AS-24AB 3 119 2 AS-19AB 5 179 2 AS-20AB 7 236 2 AS-21AB 9 258 2 AS-22AB 9 277 2 AS-25AB 9 293 2 AS-43B r Threaded stud kit for manifold AS-30A M4 4 M4 4 Adapter for manifold mounting 119 2 AS-45B 179 2 AS-47B 236 2 AS-48B 277 2 e L-bracket

Speed Controller with

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

Speed Controller with

2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 AS-33B AS-36B AS-32B AS-37B AS-38B M3 4 M3 4 AS-34B AS-36B AS-35B AS-37B AS-32B AS-34B AS-36B AS-38B AS-41B AS-42B AS-44B AS-45B M4 4 M4 4 AS-45B AS-42B AS-44B AS-47B AS-46B Precautions when options are ordered Threaded studs for manifold are not included when L-bracket and DIN rail mounting bracket are ordered.

Speed Controller with One-touch Fittings

Model Metric size Inch size 4 stations 6 stations 8 stations 10 stations pcs. 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 Length 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 Hexagon nut Flat washer pcs. pcs.

MLU

2 No. !5 !6 !7 !8 !

MHC2

MHC2-10l MHC2-16l SMH03, #1 (#1+#9) SMH03, #2 (#2+#9) 2.6-3 Angular Style Standard Series MHC2 MHC2-20l Note) When signal acting type is used, one side port is bleed port and adjusting needle for finger speed is not attached. MHZ2 MHZJ2 When auto switch is used, through hole mounting type is not available.

High Vacuum Angle Valve

0.28 5 XLA-25-2 50 121 0.47 14 B XLA-40-2 65 171 1.1 45 XLA-50-2 70 185 1.8 80 XLA-63-2 88 212 3.1 160 A XLA-80-2 90 257 5.1 200 *1 The same for all series Minimal outgassing Low outgassing makes it possible to use a lower capacity pump and also shorten exhaust time.

Flange Size: 25, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface)

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

(See Fig. 2.)