Flange Size: 25, Flange Type: KF(NW), Port Direction: G (w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)
Flange Size: 25, Flange Type: KF(NW), Port Direction: G (w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: C (1pc, Valve Closed)
Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Purpose, 2 Wire, Horizontal, Lead Wire: 5m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1pc, Valve Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: G (w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)
Slit Valve 2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0198 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0198 lb
VACUUM VALVE, 21, XLA NO SIZE RATING, .00000 lb
XLA NO SIZE RATING, .00000 lb
This is a legacy product, and replaced byXLA-50GH4-2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING
This is a legacy product, and replaced byXLA-50H5-2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.25529 lb
Description Part no. 1 Bonnet assembly XVD2-02A-30-1 XVD2-02V-30-2 (For VCR) 2 Body assembly XVD2-02S-30-2 (For Swagelok) 3 Exterior seal AS568-024V 526