5

, 8, 12, 16) Note 2) 115 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 1 90 95 110 115 120 2 (Different surfaces, same surface) 100 105 120 125 130 n (Same surface) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 125 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 130 +

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Flange Size: 16

Flange Size: 16, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9N--Solid State, Gen.

Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Valve Type: Angle Type, Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

Solid State Auto Switches

Weight (g) D-A53 D-A54 D-A56 D-A64 D-A67 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 24 48 96 24 48 24 48 Lead wire length Dimensions (mm) 6 14 6 4.5 5 12 22 Indicator light 12 33 D-A64/A67 without indicator light DD4 16 11 16 Most sensitive position 1639 Reed Auto Switch Tie-rod Mounting Style D-A33C/D-A34C/D-A44C Refer to SMC website for the details of the products conforming to the

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Air Cylinder

30 25 M5 x 0.8 16 16 25 30 32 Rc1/8 16 16 28.5 25 40 Rc1/8 16 16 33 20 50 Rc1/4 18 18 40.5 20 63 Rc1/4 18 18 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1

10

4 40 27 14 30 52 38 16 12 35 13 14 27 8 51 38.5 52.5 M6 x 1 6 21 16 4 50 32 18 35 65 46.5 20 13 40 14 15.5 27.5 11 58 45 59 M8 x 1.25 7 21 16 5 63 32 18 35 75 56.5 20 13 45 14 16.5 28.5 11 58 50 64 M8 x 1.25 7 21 16 5 80 37 22 40 95 72 25 16 45 20 19 37 13 72 62 76.5 M10 x 1.5 10 30 16 5 100 37 26 40 114 89 30 16 55 20 19 37 16 72 71.5 86 M10 x 1.5 10 30 16 5 -Wl Bore size [mm] MM MO N NB

ISO Standard Hydraulic Cylinder

(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100. Note 2) D-A5, A6, A59W, Z7, Z80 cannot be mounted to 32.

15

12.5 14 4.5 98 M5 x 0.8 8.5 70 50 4.6 11 60 NY M4 x 12 3.6 M4 x 12 2.7 M8 x 16 12.5 14 4.5 98 M4 x 0.7 8 70 50 4.6 11 60 NW M4 x 12 3.6 M4 x 12 2.7 M8 x 16 12.5 9 4.5 98 M5 x 0.8 8.5 70 50 4.6 11 60 NT M4 x 12 3.6 M4 x 12 2.7 M8 x 16 12.5 12 8 98 M5 x 0.8 8.5 70 50 4.6 14.5 60 Included Parts List Motor Mounting Diagram Size: 63 Return box Mounting procedure 1) Fix the motor (provided by

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMA-16-M9NA-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 1 Series XMA, XYA Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5

Environment

Selection Example Operating conditions W Workpiece mass: 16 [kg] Speed: 300 [mm/s] 40 Acceleration/Deceleration: 5000 [mm/s2] 35 Stroke: 300 [mm] Lead 3: LEY25C 30 Workpiece mounting condition: Vertical upward downward transfer Work load [kg] 25 20 Lead 6: LEY25B 15 Step 1 Check the work loadspeed.